US5231075A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for preparing superconducting oxide thin films
Assignee: Sumitomo Electric Industries Ltd
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Filing: 1991-06-12
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Granted: 1993-07-27
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Expires: 2011-06-12
Abstract
Abstract A laser ablation process for preparing superconducting oxide thin films such as YBa 2 Cu 3 O 7-x comprises ablating a target surface with pulsed laser beam to cause deposition of target molecules on a substrate. The incident laser beam on the target surface has an energy of 5 to 10 J/cm 2 per pulse.
Inventors
- 👤 Tatsuoki Nagaishi
- 👤 Hisao Hattori
- 👤 Hideo Itozaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 08:22
CPC Classifications
H; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0296; H10N60/0521; C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/28
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
81 words
A laser-assisted evaporation process for preparing a superconducting oxide thin film, comprising illuminating a surface of a target with pulsive laser light to cause deposition of target molecules on a substrate, wherein the laser light is provided by a CO 2 laser or an excimer laser, the incident laser light on the target surface has an energy of from about 5 to 10 J/cm 2 per pulse, and the target comprises a sinter of YBa 2 Cu 3 O 7-x .
Claim 2
Dependent Claim
81 words
A laser-assisted evaporation process for preparing a superconducting oxide thin film, comprising illuminating a surface of a target with pulsive laser light to cause deposition of target molecules on a substrate, wherein the laser light is provided by a CO 2 laser or an excimer laser, the incident laser light on the target surface has an energy of from about 5 to 10 J/cm 2 per pulse, and the target comprises a sinter of YBa 2 Cu 3 O 7-x .
Claim 3
Dependent Claim
34 words
A laser ablation process as defined by claim 1, wherein the laser beam is emitted from a laser apparatus and directed through a condensing means which focuses the laser beam on the target surface.
Claim 4
Dependent Claim
24 words
A laser ablation process as defined by claim 2, wherein the condensing means comprises at least one synthetic quartz lens having a non-reflective coating.
Claim 5
Dependent Claim
18 words
A laser ablation process as defined by claim 1, wherein the substrate is arranged to face the target.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-07-26 | 1997-01-25 | 1997-07-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-07-26 | 2001-01-25 | 2001-07-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-07-26 | 2005-01-25 | 2005-07-27 | $7700.00 | Window Closed / Lapsed |