Patent US1442179A successfully refreshed from Google Patents.
US4909895A
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System and method for providing a conductive circuit pattern utilizing thermal oxidation
Assignee: Pacific Bell Corp
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Filing: 1989-04-11
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Granted: 1990-03-20
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Expires: 2009-04-11
Abstract
Abstract A system and method for improved conductive circuit patterning utilizing laser ablation is disclosed. In an embodiment, a substrate, which has an electroless conductive layer plated thereon, is heated to a predetermined temperature for a predetermined time to form an oxide layer upon the conductive layer. The oxide layer, due to its non-absorptive properties, is more easily ablated than the conductive layer. Hence, the overall processing time for circuit patterning is significantly reduced.
Inventors
- 👤 Dominic A. Cusano
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 00:04
CPC Classifications
C; C23; C23F; C23F4/00; C23F4/02; B; B23; B23K; B23K26/00; B23K26/02; B23K26/06; B23K26/064; B23K26/066; B23K26/18; H; H05; H05K; H05K3/00; H05K3/02; H05K3/027; H05K2201/00; H05K2201/01; H05K2201/0104; H05K2201/0112; H05K2201/03; H05K2201/0332; H05K2201/0335; H05K2201/0347; H05K2203/00; H05K2203/03; H05K2203/0315; H05K2203/05; H05K2203/0548; H05K2203/056; H05K2203/10; H05K2203/107; H05K2203/13; H05K2203/1377; H05K2203/1383; H05K3/10; H05K3/18; H05K3/181
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
100 words
A method for patterning a metallic layer affixed to the surface of an insulating substrate so as to remove said metallic layer in predetermined regions on said substrate surface, said method comprising the steps of: (a) providing an oxide layer on the surface of said metallic layer on a side opposite said substrate surface, said oxide layer being of sufficient thickness to substantially reduce the reflectivity of the surface of said metallic layer; (b) exposing said predetermined regions to an ablative laser beam so as to remove said metallic layer in said predetermined regions; and (c) removing said oxide layer.
Claim 2
Independent Claim
100 words
A method for patterning a metallic layer affixed to the surface of an insulating substrate so as to remove said metallic layer in predetermined regions on said substrate surface, said method comprising the steps of: (a) providing an oxide layer on the surface of said metallic layer on a side opposite said substrate surface, said oxide layer being of sufficient thickness to substantially reduce the reflectivity of the surface of said metallic layer; (b) exposing said predetermined regions to an ablative laser beam so as to remove said metallic layer in said predetermined regions; and (c) removing said oxide layer.
Claim 3
Dependent Claim
28 words
The method of claim 1 wherein said step of providing an oxide layer comprises: heating said metallic layer to a predetermined temperature for a predetermined period of time.
Claim 4
Dependent Claim
22 words
The method of claim 2 wherein said removing step comprises: rinsing said oxide layer from said substrate surface with an aqueous acid.
Claim 5
Dependent Claim
11 words
The method of claim 3 wherein said metallic layer is copper.
Claim 6
Dependent Claim
19 words
The method of claim 4 wherein said oxide layer is copper oxide having a thickness greater than 100 nanometers.
Claim 7
Independent Claim
100 words
A system for patterning a metallic layer affixed to the surface of an insulating substrate so as to remove said metallic layer in predetermined regions on said substrate surface, said system comprising: means for providing an oxide layer on the surface of said metallic layer on a side opposite said substrate surface, said oxide layer being of sufficient thickness to substantially reduce the reflectivity of the surface of said metallic layer; means for exposing said predetermined regions to an ablative laser beam so as to remove said metallic layer in said predetermined regions; and means for removing said oxide layer.
Claim 8
Independent Claim
100 words
A system for patterning a metallic layer affixed to the surface of an insulating substrate so as to remove said metallic layer in predetermined regions on said substrate surface, said system comprising: means for providing an oxide layer on the surface of said metallic layer on a side opposite said substrate surface, said oxide layer being of sufficient thickness to substantially reduce the reflectivity of the surface of said metallic layer; means for exposing said predetermined regions to an ablative laser beam so as to remove said metallic layer in said predetermined regions; and means for removing said oxide layer.
Claim 9
Dependent Claim
16 words
The system of claim 6 wherein said means for providing an oxide layer comprises an oven.
Claim 10
Dependent Claim
13 words
The system of claim 8 wherein said exposing means comprises an excimer laser.
Claim 11
Dependent Claim
15 words
The system of claim 8 wherein said removing means comprises a bath of aqueous acid.
Claim 12
Dependent Claim
19 words
The system of claim 9 wherein said excimer laser operates in the range of 180 nm to 370 nm.
Claim 13
Independent Claim
102 words
A method for providing a metallic pattern on a substrate comprising the steps of: (a) applying a precious metal to said substrate surface; (b) depositing a metallic layer on said precious metal; (c) heating said metallic layer for a predetermined time at a predetermined temperature to provide an oxide layer on said metallic layer said oxide layer being of sufficient thickness to substantially reduce the reflectivity of the surface of said metallic layer; (d) masking said substrate in accordance with a predetermined pattern; (e) applying an ablative laser beam to said masked substrate; and (f) removing said oxide layer from said substrate.
Claim 14
Independent Claim
102 words
A method for providing a metallic pattern on a substrate comprising the steps of: (a) applying a precious metal to said substrate surface; (b) depositing a metallic layer on said precious metal; (c) heating said metallic layer for a predetermined time at a predetermined temperature to provide an oxide layer on said metallic layer said oxide layer being of sufficient thickness to substantially reduce the reflectivity of the surface of said metallic layer; (d) masking said substrate in accordance with a predetermined pattern; (e) applying an ablative laser beam to said masked substrate; and (f) removing said oxide layer from said substrate.
Claim 15
Dependent Claim
22 words
The method of claim 11 wherein said oxide layer removing step comprises the step of rinsing said substrate with an aqueous acid.
Claim 16
Independent Claim
105 words
A system for providing a metallic pattern on a substrate comprising: means for applying a precious metal to said substrate surface; means for depositing a metallic layer on said precious metal; means for heating said metallic layer for a predetermined time at a predetermined temperature to provide an oxide layer on said metallic layer said oxide layer being of sufficient thickness to substantially reduce the reflectivity of the surface of said metallic layer; means for masking said substrate in accordance with a predetermined conductive pattern; means for applying a laser beam to said masked substrate; and means for removing said oxide layer from said substrate.
Claim 17
Independent Claim
105 words
A system for providing a metallic pattern on a substrate comprising: means for applying a precious metal to said substrate surface; means for depositing a metallic layer on said precious metal; means for heating said metallic layer for a predetermined time at a predetermined temperature to provide an oxide layer on said metallic layer said oxide layer being of sufficient thickness to substantially reduce the reflectivity of the surface of said metallic layer; means for masking said substrate in accordance with a predetermined conductive pattern; means for applying a laser beam to said masked substrate; and means for removing said oxide layer from said substrate.
Claim 18
Dependent Claim
16 words
The system of claim 13 in which said laser beam applying means comprises an excimer laser.
Claim 19
Dependent Claim
20 words
The system of claim 14 in which said excimer laser operates between the frequencies of 180 nm to 370 nm.
Claim 20
Dependent Claim
19 words
The system of claim 15 in which said removing means comprises means for rinsing said substrate with an acid.
Claim 21
Independent Claim
119 words
A method for providing a metallic pattern on a substrate comprising the steps of: (a) applying a precious metal to a substrate surface; (b) depositing a metallic layer on said precious metal; (c) heating said metallic layer for a predetermined time at a predetermined temperature to form an oxide layer on said metallic layer said oxide layer being of sufficient thickness to substantially reduce the reflectivity of the surface of said metallic layer; (d) applying a barrier material on said metallic layer; (e) masking said substrate in accordance with a predetermined conductive pattern; (f) applying a laser beam to said masked substrate; (g) removing said barrier material from said substrate; and (h) removing said oxide layer from said substrate.
Claim 22
Independent Claim
119 words
A method for providing a metallic pattern on a substrate comprising the steps of: (a) applying a precious metal to a substrate surface; (b) depositing a metallic layer on said precious metal; (c) heating said metallic layer for a predetermined time at a predetermined temperature to form an oxide layer on said metallic layer said oxide layer being of sufficient thickness to substantially reduce the reflectivity of the surface of said metallic layer; (d) applying a barrier material on said metallic layer; (e) masking said substrate in accordance with a predetermined conductive pattern; (f) applying a laser beam to said masked substrate; (g) removing said barrier material from said substrate; and (h) removing said oxide layer from said substrate.
Claim 23
Dependent Claim
13 words
The method of claim 17 wherein said barrier material comprises an organic material.
Claim 24
Dependent Claim
22 words
The method claim 18 wherein said barrier material removing step comprises rinsing said organic material from said substrate surface with a solvent.
Claim 25
Dependent Claim
20 words
The method of claim 19 wherein said oxide layer removing step comprises rinsing said substrate in an aqueous acid solution.
Claim 26
Independent Claim
123 words
A system for providing a metallic pattern on a substrate comprising: means for applying a precious metal to said substrate surface; means for depositing a metallic layer on said precious metal; means for heating said substrate for a predetermined time at a predetermined temperature to form an oxide layer on said metallic layer said oxide layer being of sufficient thickness to substantially reduce the reflectivity of the surface of said metallic layer; means for applying a barrier material on said metallic layer; means for masking said substrate in accordance with a predetermined conductive pattern; means for applying a laser beam to said masked substrate; means for removing said barrier material from said substrate; and means for removing said oxide layer from said substrate.
Claim 27
Independent Claim
123 words
A system for providing a metallic pattern on a substrate comprising: means for applying a precious metal to said substrate surface; means for depositing a metallic layer on said precious metal; means for heating said substrate for a predetermined time at a predetermined temperature to form an oxide layer on said metallic layer said oxide layer being of sufficient thickness to substantially reduce the reflectivity of the surface of said metallic layer; means for applying a barrier material on said metallic layer; means for masking said substrate in accordance with a predetermined conductive pattern; means for applying a laser beam to said masked substrate; means for removing said barrier material from said substrate; and means for removing said oxide layer from said substrate.
Claim 28
Dependent Claim
14 words
The system of claim 21 in which said barrier material comprises an organic material.
Claim 29
Dependent Claim
22 words
The system of claim 22 in which said barrier material removing means comprises means for rinsing said substrate with an organic solvent.
Claim 30
Dependent Claim
16 words
The system of claim 23 wherein said oxide layer removing means comprises an aqueous acid solution.
References Cited (Backward Citations)
US4622095A
Cited
US4834834A
Cited
USPTO Annuity & Maintenance Windows
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| 3.5 Years (Year 4) | 1993-03-19 | 1993-09-18 | 1994-03-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-03-19 | 1997-09-18 | 1998-03-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-03-19 | 2001-09-18 | 2002-03-20 | $7700.00 | Window Closed / Lapsed |