Process for the production of a layer of metal oxide supraconductor material by laser evaporation

Abstract

Abstract The process can be used to produce a layer of a superconducting high-Tc material. For this purpose, a suitable target material is deposited on an allotted substrate by means of a pulsed laser whose wavelength is in the ultraviolet region, and the desired superconducting metal oxide phase with ordered crystal structure is formed by heat treatment and oxygen treatment. According to the invention, the heat treatment and oxygen treatment are carried out simultaneously during the evaporation step. In this step, the energy density of the laser radiation (7) at the target material (8) exceeds 3 J/cm<2>, the pulse energy of the laser is not less than 1.5 J/pulse, the substrate (11) is heated to a temperature of 600 DEG C to 800 DEG C, and the pressure of the oxygen atmosphere is between 0.02 mbar and 1 mbar. <IMAGE>

Inventors

• 👤 Bernhard Dipl.-Phys. Roas
• 👤 Gerhard Dr. Endres
• 👤 Ludwig Dr. Schultz

Bibliographic Details