US5227839A
Expired / Lapsed
US
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Small field scanner
Assignee: Nikon Corp
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Filing: 1991-06-24
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Granted: 1993-07-13
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Expires: 2011-06-24
Abstract
Abstract A method and apparatus for printing arbitrarily large circuit patterns using small field optics. The use of small field imaging optics allows the use of high NA lens designs capable of printing smaller geometries than otherwise would be possible. The field size in a first axis is extended by scanning an object and image past the lens; the field size in a second axis is extended by stitching the scans together in an overlapped fashion. This overlapped printing technique averages many random and systematic errors and allows the placement of field adjacencies within die boundaries. The effective field size of such a system is limited only be reticle size and stage mechanics. The apparatus further includes error correction loops for enhancing stage synchronization accuracy and for reducing field adjacency errors.
Inventors
- 👤 Paul C. Allen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 11:14
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70058; G03F7/70216; G03F7/70258; G03F7/70358; G03F7/70425; G03F7/70475; G03F7/70691; G03F7/70716; G03F7/70725
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
194 words
An apparatus for generating a pattern on a substrate, said pattern defined by a reticle, said substrate including a film responsive to radiant energy, said apparatus comprised essentially of: a. means for creating radiant energy, said radiant energy dispersed in a beam of a predetermined shape; b. means for dispersing said radiant energy in a beam of a predetermined shape; c. a steering aperture positioned at a focal plane of said means for creating radiant energy, said steering aperture for creating a proper reticle image; d. means for directing said radiant energy beam towards said reticle thus creating a reticle image; e. means for directing said reticle image along a predetermined optical path towards said substrate; f. means for precisely placing said reticle image on said substrate; g. image reduction means, said image reduction means for reducing said reticle image prior to generating said reticle image on said substrate; and h. scanning means for generating a first reticle image stripe in a first direction on said substrate and for printing a second reticle image stripe in a second direction on said substrate, wherein said first reticle image stripe overlaps said second reticle image stripe.
Claim 2
Independent Claim
194 words
An apparatus for generating a pattern on a substrate, said pattern defined by a reticle, said substrate including a film responsive to radiant energy, said apparatus comprised essentially of: a. means for creating radiant energy, said radiant energy dispersed in a beam of a predetermined shape; b. means for dispersing said radiant energy in a beam of a predetermined shape; c. a steering aperture positioned at a focal plane of said means for creating radiant energy, said steering aperture for creating a proper reticle image; d. means for directing said radiant energy beam towards said reticle thus creating a reticle image; e. means for directing said reticle image along a predetermined optical path towards said substrate; f. means for precisely placing said reticle image on said substrate; g. image reduction means, said image reduction means for reducing said reticle image prior to generating said reticle image on said substrate; and h. scanning means for generating a first reticle image stripe in a first direction on said substrate and for printing a second reticle image stripe in a second direction on said substrate, wherein said first reticle image stripe overlaps said second reticle image stripe.
Claim 3
Independent Claim
183 words
An apparatus for generating a pattern on a substrate, said pattern defined by a reticle, said substrate including a film responsive to radiant energy, said apparatus comprised essentially of: a. means for creating radiant energy, said radiant energy dispersed in a beam of a predetermined shape; b. means for dispersing said radiant energy in a beam of a predetermined shape; c. means for directing said radiant energy beam towards said reticle thus creating a reticle image; d. means for directing said reticle image along a predetermined optical path, towards said substrate; e. means for precisely placing said reticle image on said substrate comprised of a steering mirror positioned at an aperture plane in said optical path; f. image reduction means, said image reduction means for reducing said reticle image prior to generating said reticle image on said substrate; and g. scanning means for generating a first reticle image stripe in a first direction on said substrate and for printing a second reticle image stripe in a second direction on said substrate, wherein said first reticle image stripe overlaps said second reticle image stripe.
Claim 4
Independent Claim
183 words
An apparatus for generating a pattern on a substrate, said pattern defined by a reticle, said substrate including a film responsive to radiant energy, said apparatus comprised essentially of: a. means for creating radiant energy, said radiant energy dispersed in a beam of a predetermined shape; b. means for dispersing said radiant energy in a beam of a predetermined shape; c. means for directing said radiant energy beam towards said reticle thus creating a reticle image; d. means for directing said reticle image along a predetermined optical path, towards said substrate; e. means for precisely placing said reticle image on said substrate comprised of a steering mirror positioned at an aperture plane in said optical path; f. image reduction means, said image reduction means for reducing said reticle image prior to generating said reticle image on said substrate; and g. scanning means for generating a first reticle image stripe in a first direction on said substrate and for printing a second reticle image stripe in a second direction on said substrate, wherein said first reticle image stripe overlaps said second reticle image stripe.
Claim 5
Dependent Claim
22 words
The apparatus as recited in claim 2 wherein said image reduction means reduces said reticle image by a 4 to 1 ratio.
Claim 6
Dependent Claim
19 words
The apparatus as recited in claim 3 wherein said predetermined shape of said radiant energy beam is a trapezoid.
Claim 7
Dependent Claim
87 words
The apparatus as recited in claim 4 wherein said scanning means is comprised of: a reticle stage for supporting said reticle on a reticle plane and moving said reticle to a predetermined location at a predetermined velocity; a wafer stage for supporting said substrate on a wafer plane and moving said wafer to a predetermined location at a predetermined velocity; synchronization means coupled to said reticle stage and said wafer stage for detecting and correcting for errors in synchronization between said reticle stage and said wafer stage.
Claim 8
Dependent Claim
15 words
The apparatus as recited in claim 5 wherein said radiant energy source is a laser.
Claim 9
Dependent Claim
18 words
The apparatus as recited in claim 6 wherein said second direction is the reverse of said first direction.
Claim 10
Independent Claim
205 words
An apparatus for generating a pattern defined by a reticle on a substrate, said substrate including a film responsive to radiant energy, said apparatus comprising: a. a radiant source for creating radiant energy, said radiant energy in the form of a beam; b. a uniformer for creating a uniform radiant energy beam of a predetermined shape; c. a first lens assembly for creating a conjugate image of said uniform radiant energy beam emanating from said uniformer, said radiant energy beam directed towards a reticle plane; d. a reticle stage for supporting said reticle on said reticle plane, and further for moving said reticle to a predetermined location on said reticle plane, said reticle plane being where an exposure image is created, e. a second lens assembly for reducing said exposure image by a predetermined reduction ratio; f. steering means for precisely placing said exposure image onto a predetermined proper location on said substrate; g. a wafer stage for supporting said substrate on a wafer plane, and further for moving said substrate to predetermined locations on said wafer plane; and h. control means for controlling the velocity and location of said reticle stage and said wafer stage and for controlling the movement of said steering means.
Claim 11
Independent Claim
205 words
An apparatus for generating a pattern defined by a reticle on a substrate, said substrate including a film responsive to radiant energy, said apparatus comprising: a. a radiant source for creating radiant energy, said radiant energy in the form of a beam; b. a uniformer for creating a uniform radiant energy beam of a predetermined shape; c. a first lens assembly for creating a conjugate image of said uniform radiant energy beam emanating from said uniformer, said radiant energy beam directed towards a reticle plane; d. a reticle stage for supporting said reticle on said reticle plane, and further for moving said reticle to a predetermined location on said reticle plane, said reticle plane being where an exposure image is created, e. a second lens assembly for reducing said exposure image by a predetermined reduction ratio; f. steering means for precisely placing said exposure image onto a predetermined proper location on said substrate; g. a wafer stage for supporting said substrate on a wafer plane, and further for moving said substrate to predetermined locations on said wafer plane; and h. control means for controlling the velocity and location of said reticle stage and said wafer stage and for controlling the movement of said steering means.
Claim 12
Dependent Claim
58 words
The apparatus as recited in claim 8 where said apparatus is further comprised of: a. a first laser interferometer for determining the position of said reticle stage; b. a second laser interferometer for determining the position of said wafer stage; and c. processing means for determining when said reticle stage and said wafer stage are not in synchronization.
Claim 13
Dependent Claim
32 words
The apparatus as recited in claim 9 wherein said ratio of velocity of said reticle stage to said wafer stage is the same as said reduction ratio of said second optical assembly.
Claim 14
Dependent Claim
15 words
The apparatus as recited in claim 10 wherein said reduction ratio if 4 to 1.
Claim 15
Dependent Claim
15 words
The apparatus as recited in claim 8 wherein said steering means is a steering mirror.
Claim 16
Dependent Claim
14 words
The apparatus as recited in claim 12 wherein said predetermined shape is a trapezoid.
Claim 17
Dependent Claim
15 words
The apparatus as recited in claim 13 wherein said radiant energy source is a laser.
Claim 18
Dependent Claim
30 words
The apparatus as recited in claim 12 wherein said apparatus if further comprised of a steering aperture, said steering aperture positioned at a focal plane of said first lens assembly.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-07-12 | 1997-01-11 | 1997-07-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-07-12 | 2001-01-11 | 2001-07-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-07-12 | 2005-01-11 | 2005-07-13 | $7700.00 | Window Closed / Lapsed |