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US4362384A Expired / Lapsed US ⏱️ 0.0 years remaining

Means for providing uniform illumination to a light sensitive element

Assignee: SVG LITHOGRAPHY Inc A CORP OF
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Filing: 1981-05-01
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Granted: 1982-12-07
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Expires: 2001-05-01
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Abstract

Abstract In a ring field projection optical system for imaging a mask on a wafer the illumination source has readily adjustable means for obtaining uniform exposure along the length of the arcuate zone of illumination.

Inventors

  • 👤 Orest Engelbrecht
  • 👤 David A. Markle

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-27 17:46
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70058

Claims Analysis

Total Claims: 5
Claim 1
Independent Claim 180 words
Means for controlling the transmission of light from a light source to a mask for reproducing an image comprising; a plate member having an elongated curved slit opening disposed between said light source and said element, a flexible band secured to said plate member and extending along said slit opening, said flexible band disposed perpendicular to said plate member to obstruct light from said light source from passing through said slit opening, a plurality of sets of adjustment elements connected between spaced areas on said flexible band and said plate member to permit independent flexure of said flexible band at selected points to vary the degree of the slit opening along its length, said plurality of sets of adjustment elements comprising a plurality of flexible strips secured between said flexible band and a plurality of brackets pivotally mounted to said plate member, a plurality of flexible cables connected to move said brackets and thereby said flexible band, and manual control elements for selectively adjusting said flexible cables thereby controlling the effective width of said slit opening along the length thereof.
Claim 2
Dependent Claim 180 words
Means for controlling the transmission of light from a light source to a mask for reproducing an image comprising; a plate member having an elongated curved slit opening disposed between said light source and said element, a flexible band secured to said plate member and extending along said slit opening, said flexible band disposed perpendicular to said plate member to obstruct light from said light source from passing through said slit opening, a plurality of sets of adjustment elements connected between spaced areas on said flexible band and said plate member to permit independent flexure of said flexible band at selected points to vary the degree of the slit opening along its length, said plurality of sets of adjustment elements comprising a plurality of flexible strips secured between said flexible band and a plurality of brackets pivotally mounted to said plate member, a plurality of flexible cables connected to move said brackets and thereby said flexible band, and manual control elements for selectively adjusting said flexible cables thereby controlling the effective width of said slit opening along the length thereof.
Claim 3
Dependent Claim 33 words
Means for controlling as set forth in claim 1 wherein a plurality of springs are connected between said plurality of brackets and said plate member to normally bias said brackets in set positions.
Claim 4
Dependent Claim 38 words
Means for controlling as set forth in claim 2 further comprising fixed connection means connected from approximately the center of said flexible band to said plate member to provide a reference area from which adjustments may be made.
Claim 5
Dependent Claim 28 words
Means for controlling as set forth in claim 3 further including, a wafer to be exposed, a ring field projection system disposed between said mask and said wafer.

References Cited (Backward Citations)

US3594081A Cited
US3722980A Cited
US3907427A Cited
US4068947A Cited
US3967895A Cited
US4080057A Cited
US4125323A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1985-12-06 1986-06-07 1986-12-07 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1989-12-06 1990-06-07 1990-12-07 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1993-12-06 1994-06-07 1994-12-07 $7700.00 Window Closed / Lapsed

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