US4362384A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Means for providing uniform illumination to a light sensitive element
Assignee: SVG LITHOGRAPHY Inc A CORP OF
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Filing: 1981-05-01
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Granted: 1982-12-07
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Expires: 2001-05-01
Abstract
Abstract In a ring field projection optical system for imaging a mask on a wafer the illumination source has readily adjustable means for obtaining uniform exposure along the length of the arcuate zone of illumination.
Inventors
- 👤 Orest Engelbrecht
- 👤 David A. Markle
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 17:46
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70058
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
180 words
Means for controlling the transmission of light from a light source to a mask for reproducing an image comprising; a plate member having an elongated curved slit opening disposed between said light source and said element, a flexible band secured to said plate member and extending along said slit opening, said flexible band disposed perpendicular to said plate member to obstruct light from said light source from passing through said slit opening, a plurality of sets of adjustment elements connected between spaced areas on said flexible band and said plate member to permit independent flexure of said flexible band at selected points to vary the degree of the slit opening along its length, said plurality of sets of adjustment elements comprising a plurality of flexible strips secured between said flexible band and a plurality of brackets pivotally mounted to said plate member, a plurality of flexible cables connected to move said brackets and thereby said flexible band, and manual control elements for selectively adjusting said flexible cables thereby controlling the effective width of said slit opening along the length thereof.
Claim 2
Dependent Claim
180 words
Means for controlling the transmission of light from a light source to a mask for reproducing an image comprising; a plate member having an elongated curved slit opening disposed between said light source and said element, a flexible band secured to said plate member and extending along said slit opening, said flexible band disposed perpendicular to said plate member to obstruct light from said light source from passing through said slit opening, a plurality of sets of adjustment elements connected between spaced areas on said flexible band and said plate member to permit independent flexure of said flexible band at selected points to vary the degree of the slit opening along its length, said plurality of sets of adjustment elements comprising a plurality of flexible strips secured between said flexible band and a plurality of brackets pivotally mounted to said plate member, a plurality of flexible cables connected to move said brackets and thereby said flexible band, and manual control elements for selectively adjusting said flexible cables thereby controlling the effective width of said slit opening along the length thereof.
Claim 3
Dependent Claim
33 words
Means for controlling as set forth in claim 1 wherein a plurality of springs are connected between said plurality of brackets and said plate member to normally bias said brackets in set positions.
Claim 4
Dependent Claim
38 words
Means for controlling as set forth in claim 2 further comprising fixed connection means connected from approximately the center of said flexible band to said plate member to provide a reference area from which adjustments may be made.
Claim 5
Dependent Claim
28 words
Means for controlling as set forth in claim 3 further including, a wafer to be exposed, a ring field projection system disposed between said mask and said wafer.
References Cited (Backward Citations)
US3594081A
Cited
US3722980A
Cited
US3907427A
Cited
US4068947A
Cited
US3967895A
Cited
US4080057A
Cited
US4125323A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1985-12-06 | 1986-06-07 | 1986-12-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1989-12-06 | 1990-06-07 | 1990-12-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1993-12-06 | 1994-06-07 | 1994-12-07 | $7700.00 | Window Closed / Lapsed |