US4068947A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Optical projection and scanning apparatus
Assignee: SVG LITHOGRAPHY Inc A CORP OF
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Filing: 1976-03-29
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Granted: 1978-01-17
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Expires: 1996-03-29
Abstract
Abstract A unity magnification catoptric image-forming system and an illumination system on the one hand, and an object- and image-surface supporting means on the other hand, are arranged for relative movement to retain the object and image surfaces in unity magnification conjugate planes of the catoptric system while effecting a scanning-type exposure of successive portions of the image surface to successively illuminated portions of the object. Fine motion mechanisms permit accurate preliminary adjustment of the object- and image-receiving surfaces relative to each other while under visual examination with the aid of the catoptric image-forming system.
Inventors
- 👤 Jere D. Buckley
- 👤 David A. Markle
- 👤 William H. Newell
- 👤 Abe Offner
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 12:21
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70216; G03F7/70233; B; B23; B23Q; B23Q1/00; B23Q1/25; B23Q1/26; B23Q1/34; B23Q1/36; G02; G02B; G02B17/00; G02B17/02; G02B17/06; G02B17/0605; G02B17/0615; G03F7/70358
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
196 words
Apparatus for photographically exposing an image-receiving surface to a light image of an object, said apparatus comprising: an optical system having an optical axis and conjugate planes; a carriage; separate stages on said carriage for supporting an object surface and an image-receiving surface in said conjugate planes, respectively, each of said stages including four link members pivotally interconnected at points defining a parallelogram, one link member of each parallelogram being adapted for supporting thereon such object and image receiving surfaces, respectively; means to rotate a second link member in each parallelogram respectively opposite said one link member thereof, rotation of said second link member causing concomitant rotation of an object surface and imagereceiving surface supported on said one link member of the respective parallelogram; and means to translate said second link member of each parallelogram and means to rotate a third link member in each parallelogram, translation of said second link member in each parallelogram causing concomitant translation of such object and image-receiving surfaces in one direction and rotation of said third link member in each parallelogram causing concomitant rotation of such object surface and image-receiving surface in a direction substantially normal to said one direction.
Claim 2
Dependent Claim
196 words
Apparatus for photographically exposing an image-receiving surface to a light image of an object, said apparatus comprising: an optical system having an optical axis and conjugate planes; a carriage; separate stages on said carriage for supporting an object surface and an image-receiving surface in said conjugate planes, respectively, each of said stages including four link members pivotally interconnected at points defining a parallelogram, one link member of each parallelogram being adapted for supporting thereon such object and image receiving surfaces, respectively; means to rotate a second link member in each parallelogram respectively opposite said one link member thereof, rotation of said second link member causing concomitant rotation of an object surface and imagereceiving surface supported on said one link member of the respective parallelogram; and means to translate said second link member of each parallelogram and means to rotate a third link member in each parallelogram, translation of said second link member in each parallelogram causing concomitant translation of such object and image-receiving surfaces in one direction and rotation of said third link member in each parallelogram causing concomitant rotation of such object surface and image-receiving surface in a direction substantially normal to said one direction.
Claim 3
Dependent Claim
75 words
Apparatus according to claim 1 wherein the stage for the support of the object surface comprises a tray disposed on said opposite link member of said stage and means to shift said tray relatively on said opposite link member and transversely of the plane of an object surface supported thereon, and wherein said carriage includes abutment means to arrest said transverse motion of said tray with said object surface in one of said conjugate planes.
Claim 4
Dependent Claim
47 words
Apparatus according to claim 1 wherein said stage for support of an image-receiving surface includes an outer ring angularly movable with respect to said carriage and an aperture plate journaled for motion over said outer ring, said aperture plate constituting said opposite link member of said stage.
Claim 5
Dependent Claim
15 words
Apparatus according to claim 1 including flexure means coupling adjacent ones of said link members.
Claim 6
Dependent Claim
81 words
Apparatus according to claim 1 including: means to illuminate an area in the conjugate plane in which the object surface is supported; and means to advance said object surface and image-receiving surface relative to said optical system, simultaneously and at the same rate, in said conjugate planes so that said object surface moves transversely of said area in its respective conjugate plane, whereby the image-receiving surface moves simultaneously transversely of the image of said illuminated area in its respective conjugate plane.
Claim 7
Dependent Claim
91 words
Apparatus according to claim 1 wherein said conjugate planes are parallel to each other and to said optical axis, and which further comprises: means to illuminate an area in the conjugate plane in which the object surface is supported; and means mounting the optical system and carriage for arcuate pivotal movement relative to one another in a direction generally parallel to said optical axis for relatively moving said object surface and image-receiving surface simultaneously transversely of the respective conjugate planes and for moving said object surface transversely of said illuminated area.
Claim 8
Dependent Claim
35 words
Apparatus according to claim 6 wherein said optical system and illuminating means are in relatively fixed position and said carriage is pivoted for rotation about an axis that is fixed relative to the optical system.
Claim 9
Dependent Claim
198 words
Apparatus for photographically exposing an image-receiving surface to a light image of an object comprising: an optical system having an optical axis and conjugate planes parallel to each other and to said optical axis; a carriage; separate stages on said carriage for supporting an object surface and an image-receiving surface in the positions of said conjugate planes, respectively; means to illuminate an area in the conjugate plane in which the object surface is to be supported; means mounting said optical system and carriage for arcuate pivotal movement relative to one another in a direction generally parallel to said optical axis thus relatively moving simultaneously the object surface and image-receiving surface supported on the respective stages transversely of the respective conjugate planes, while moving said object surface transversely of said illuminated area, said pivotal mounting means comprising a first member fixed on the carriage; a second member connected to said optical system and in fixed position relative thereto; and first and second flexible blades mounted in planes intersecting substantially at right angles along a line coincident with the axis of said pivotal movement, each of said blades having opposite end portions connected respectively to said first and second members.
Claim 10
Dependent Claim
198 words
Apparatus for photographically exposing an image-receiving surface to a light image of an object comprising: an optical system having an optical axis and conjugate planes parallel to each other and to said optical axis; a carriage; separate stages on said carriage for supporting an object surface and an image-receiving surface in the positions of said conjugate planes, respectively; means to illuminate an area in the conjugate plane in which the object surface is to be supported; means mounting said optical system and carriage for arcuate pivotal movement relative to one another in a direction generally parallel to said optical axis thus relatively moving simultaneously the object surface and image-receiving surface supported on the respective stages transversely of the respective conjugate planes, while moving said object surface transversely of said illuminated area, said pivotal mounting means comprising a first member fixed on the carriage; a second member connected to said optical system and in fixed position relative thereto; and first and second flexible blades mounted in planes intersecting substantially at right angles along a line coincident with the axis of said pivotal movement, each of said blades having opposite end portions connected respectively to said first and second members.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1981-01-16 | 1981-07-18 | 1982-01-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1985-01-16 | 1985-07-18 | 1986-01-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1989-01-16 | 1989-07-18 | 1990-01-17 | $7700.00 | Window Closed / Lapsed |