US4778233A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Steering mirror
Assignee: Applied Materials Inc
•
Filing: 1986-09-19
•
Granted: 1988-10-18
•
Expires: 2006-09-19
Abstract
Abstract A steering mirror for use with a laser pattern generator. A reflective surface is mounted on a pivotally mounted extended member. A piezo electric crystal abuts the extended member and voltage applied to the crystal causes deformation of the crystal and ultimately movement of the reflective surface. A differential impedence transducer is coupled to the extended member to detect movement of the steering mirror. In this manner, the position of the mirror can be accurately controlled.
Inventors
- 👤 Eric Christenson
- 👤 Paul Allen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 19:01
CPC Classifications
G; G02; G02B; G02B7/00; G02B7/18; G02B7/182; G02B7/1821
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
63 words
A device for angularly deflecting an energy beam, said device comprising: a base; a member pivotally mounted on said base, said member having first and second ends; reflecting means coupled to said first end; displacement producing means coupled to said member for moving said member about a pivot; displacement detecting means disposed about said second end for detecting the movement of said member.
Claim 2
Independent Claim
63 words
A device for angularly deflecting an energy beam, said device comprising: a base; a member pivotally mounted on said base, said member having first and second ends; reflecting means coupled to said first end; displacement producing means coupled to said member for moving said member about a pivot; displacement detecting means disposed about said second end for detecting the movement of said member.
Claim 3
Dependent Claim
12 words
The device of claim 1 wherein said reflecting means comprises a mirror.
Claim 4
Dependent Claim
24 words
The device of claim 1 wherein said displacement producing means comprises a piezo electric crystal coupled to a voltage source and to said member.
Claim 5
Dependent Claim
15 words
The device of claim 1 wherein said displacement detecting means comprises a differential impedence transducer.
Claim 6
Dependent Claim
14 words
The device of claim 1 further including damping means coupled to said second end.
Claim 7
Independent Claim
78 words
A device for deflecting an energy beam, said device comprising: a pivotally mounted member having first and second ends; an extended member coupled to said pivotally mounted member; reflecting means coupled to said first end; displacement producing means coupled to said extended member for moving said extended member, said extended member in turn moving said pivotally mounted member about a pivot; displacement detecting means disposed about said second end for detecting the movement of said pivotally mounted member.
Claim 8
Independent Claim
78 words
A device for deflecting an energy beam, said device comprising: a pivotally mounted member having first and second ends; an extended member coupled to said pivotally mounted member; reflecting means coupled to said first end; displacement producing means coupled to said extended member for moving said extended member, said extended member in turn moving said pivotally mounted member about a pivot; displacement detecting means disposed about said second end for detecting the movement of said pivotally mounted member.
Claim 9
Dependent Claim
12 words
A device of claim 6 wherein said reflecting member comprises a mirror.
Claim 10
Dependent Claim
15 words
The device of claim 6 wherein said displacement producing means comprises a piezo electric crystal.
Claim 11
Dependent Claim
15 words
The device of claim 6 wherein said displacement detection means comprises a differential impedence transducer.
Claim 12
Dependent Claim
18 words
The device of claim 6 wherein said extended member is mounted approximately orthogonally to said pivotally mounted member.
Claim 13
Dependent Claim
14 words
The device of claim 6 further including damping means coupled to said second end.
Claim 14
Independent Claim
100 words
A device for angularly deflecting an energy beam in a pattern generation system, said device comprising: a base; a member pivotally mounted on said base, said member having first and second ends; a mirror mounted on said first end, said mirror reflecting said energy beam; displacement producing means coupled to said member for displacing said member and thereby changing the angle of said mirror with respect to said energy beam, said displacement producing means comprising a piezo electric crystal; displacement detecting means disposed about said second end for detecting the displacement of said second end with respect to said base.
Claim 15
Independent Claim
100 words
A device for angularly deflecting an energy beam in a pattern generation system, said device comprising: a base; a member pivotally mounted on said base, said member having first and second ends; a mirror mounted on said first end, said mirror reflecting said energy beam; displacement producing means coupled to said member for displacing said member and thereby changing the angle of said mirror with respect to said energy beam, said displacement producing means comprising a piezo electric crystal; displacement detecting means disposed about said second end for detecting the displacement of said second end with respect to said base.
Claim 16
Dependent Claim
15 words
The device of claim 12 wherein the displacement detecting means comprises a differential impedence transducer.
Claim 17
Dependent Claim
14 words
The device of claim 12 further including damping means coupled to said second end.
Claim 18
Dependent Claim
14 words
The device of claim 12 wherein said second end comprises a paddle shaped extension.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-10-18 | 1992-04-18 | 1992-10-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-10-18 | 1996-04-18 | 1996-10-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-10-18 | 2000-04-18 | 2000-10-18 | $7700.00 | Window Closed / Lapsed |