US4758091A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Pattern generator part holder
Assignee: Applied Materials Inc
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Filing: 1986-11-20
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Granted: 1988-07-19
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Expires: 2006-11-20
Abstract
Abstract The present invention provides a part holder for use in a pattern generation apparatus having a reference point which has a constant spatial relationship between itself and a work piece mounted on the part holder. The part holder is comprised of a material having a low coefficient of thermal linear expansion. In one embodiment, the part holder is formed in sections combined with bonding using a suitable adhesive, such as a low out-gassing epoxy. However, single piece construction may be utilized. In order to eliminate variations in the spatial relationship between the part holder and a coordinate system fixed in space resulting from differences in expansion rates between the part holder and the substrate on which it is mounted, kinematic mounting is employed. The resulting part holder maintains a constant distance between the reference point and the work piece.
Inventors
- 👤 Jonathan A. Bodine
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 03:30
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/70716
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
99 words
An apparatus for positioning a work piece, said apparatus comprising: support means for supporting said work piece, wherein said support means includes one or more reference planes for establishing a desired position of said work piece along at least two orthogonal coordinate directions; wherein said reference planes are comprised of a reflective surface mounted on said support means and perpendicular to a corresponding coordinate direction; substrate means for introducing translational movement to said work piece; coupling means for coupling said support means to said substrate means such that thermal expansion of said substrate means is isolated said support means.
Claim 2
Independent Claim
99 words
An apparatus for positioning a work piece, said apparatus comprising: support means for supporting said work piece, wherein said support means includes one or more reference planes for establishing a desired position of said work piece along at least two orthogonal coordinate directions; wherein said reference planes are comprised of a reflective surface mounted on said support means and perpendicular to a corresponding coordinate direction; substrate means for introducing translational movement to said work piece; coupling means for coupling said support means to said substrate means such that thermal expansion of said substrate means is isolated said support means.
Claim 3
Dependent Claim
15 words
The apparatus of claim 1 wherein said coupling means comprises a plurality of kinematic mounts.
Claim 4
Dependent Claim
21 words
The apparatus of claim 2 wherein each of said kinematic mounts comprises a groove mated to a ball and cone assembly.
Claim 5
Dependent Claim
34 words
The apparatus of claim 1 wherein said support means comprises a material having a coefficient of thermal linear expansion in the range of plus or minus 0.05×10 -6 inches per inch per degree Kelvin.
Claim 6
Dependent Claim
171 words
In a system including a part holder for holding a workpiece, said workpiece mounted on a translation stage, and a lens for directing a writing beam onto said workpiece, apparatus for determining the position of said writing beam relative to said workpiece, said apparatus comprising: a first mirror mounted on said lens; a second mirror mounted on said part holder; a differential interferometer for directing a beam of light to said first and second mirrors, said differential interferometer receiving the reflections of said beams of light from said first and second mirrors and determining the relative position of said first mirror with respect to said second mirror; kinematic mounting means for coupling said part holder to said translation means, said kinematic mounts for eliminating the effect of linear thermal expansion of said translation means on said part holder wherein the absolute position of said work piece is not effected by thermal size changes of the translation means; whereby the position of said writing beam on said workpiece can be accrurately determined.
Claim 7
Dependent Claim
171 words
In a system including a part holder for holding a workpiece, said workpiece mounted on a translation stage, and a lens for directing a writing beam onto said workpiece, apparatus for determining the position of said writing beam relative to said workpiece, said apparatus comprising: a first mirror mounted on said lens; a second mirror mounted on said part holder; a differential interferometer for directing a beam of light to said first and second mirrors, said differential interferometer receiving the reflections of said beams of light from said first and second mirrors and determining the relative position of said first mirror with respect to said second mirror; kinematic mounting means for coupling said part holder to said translation means, said kinematic mounts for eliminating the effect of linear thermal expansion of said translation means on said part holder wherein the absolute position of said work piece is not effected by thermal size changes of the translation means; whereby the position of said writing beam on said workpiece can be accrurately determined.
Claim 8
Dependent Claim
36 words
The apparatus of claim 5 wherein said part holder is comprised of a material having a coefficient of thermal linear expansion in the range of plus or minus 0.05×10 -6 inches per inch per degree Kelvin.
Claim 9
Dependent Claim
11 words
The apparatus of claim 5 wherein said part holder comprises ZERODUR.
Claim 10
Dependent Claim
30 words
The apparatus of claim 5 wherein said kinematic mounting scheme comprises varying means disposed between a channel coupled to said part holder and a cone coupled to said translation means.
Claim 11
Dependent Claim
20 words
The apparatus of claim 5 wherein said kinematic mounts comprise three mounts disposed at 120 degrees one to each other.
Claim 12
Dependent Claim
21 words
The apparatus of claim 5 wherein said part holder comprises a plurality of parts bonded together by a low out-gassing epoxy.
Claim 13
Dependent Claim
13 words
The apparatus of claim 5 wherein said part holder comprises a single unit.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-07-19 | 1992-01-18 | 1992-07-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-07-19 | 1996-01-18 | 1996-07-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-07-19 | 2000-01-18 | 2000-07-19 | $7700.00 | Window Closed / Lapsed |