US3786332A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Micro positioning apparatus
Assignee: Compagnie Francaise Thomson Houston SA
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Filing: 1969-03-19
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Granted: 1974-01-15
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Expires: 1989-03-19
Abstract
Abstract A workpiece is positioned in the order of tenths of microns, or less, with respect to a fixed assembly, with automatic stabilization of coordinates by apparatus having a solid base with two movable carriages, displacable each in a different orthogonal direction, which drive a reference block bearing the piece to be positioned. To compensate for malpositioning a correction means is provided consisting of an assembly of at least three concentric frames, the first one (C1) being fixed on the upper carriage and the other two being coupled to each other by resilient means and position transducers, such as piezoelectric ceramic or megnetostrictive elements. The transducer displaces the corresponding frame along a direction where no resilient means are present. Displacement is measured by four interferometers whose beams illuminate reflecting faces of the reference blocks and fringes; or photoelectric microscopes aimed for instance at an engraved marking on the block of some tens microns wide are used.
Inventors
- 👤 G Hepner
- 👤 M Lacombat
- 👤 R Marcy
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 16:50
CPC Classifications
G; G01; G01B; G01B9/00; G01B9/02; G01B9/02015; G01B9/02017; G01B9/02019; G01B9/02021; G01B9/02027; Y; Y10; Y10T; Y10T409/00; Y10T409/30; Y10T409/30084; Y10T409/300896
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
371 words
In a positioning apparatus for accurately positioning a piece (P) with respect to a fixed assembly and automatic stabilization of its coordinates having a base (Z); movable carriage means (V, W) located on said base; a reference block (A, C3) carrying the piece (P) to be positioned; means (11-14) disposed to detect, with respect to said base, any deviation of position of said reference block (A) with respect to a pre-selected initial position of said reference block and generating error voltages upon such deviation; said positioning apparatus comprising correction means (C) disposed on said carriage means (V, W) and supporting said reference block (A), said correction means comprising a pair of frames (C2, C3) of different sizes, the inner frame (C3) being smaller and located concentrically within the outer frame (C2); first resilient coupling means (L2, L2) interposed between and interconnecting the inner (C3) and the outer (C2) of said frames at opposite sides thereof for resisting relative motion between said frames in a first direction, and maintaining alignment in said first direction while permitting deflection in a direction transverse to said first direction, the first resilient means having their respective terminal ends fixed to respective frames; second resilient coupling means (L1, L1) interposed between and interconnecting the outer of said frames (C2), and said base at opposite sides of said outer frame for resisting relative motion between said outer frame and said base (C1; Z) in the transverse direction, while permitting deflection in said first direction, the second resilient means (L1, L1) having one end fixed to said outer one of said frames and the other to said base; first position transducer means (Y1, Y2) interposed between said concentric frames (C2, C3) and acting in said transverse direction; second position transducer means (X1, X2) interposed between said outer frame (C2) and the base (C1; Z) and acting in said first direction; said reference block (A; C3) being supported by said inner frame; said deviation detection and error signal generating means being interconnected with said first and second transducer means and controlling said transducer means to effect resilient deformation of the respective resilient means to position the inner frame, and with it, said reference block, to reduce the deviation to zero.
Claim 2
Dependent Claim
371 words
In a positioning apparatus for accurately positioning a piece (P) with respect to a fixed assembly and automatic stabilization of its coordinates having a base (Z); movable carriage means (V, W) located on said base; a reference block (A, C3) carrying the piece (P) to be positioned; means (11-14) disposed to detect, with respect to said base, any deviation of position of said reference block (A) with respect to a pre-selected initial position of said reference block and generating error voltages upon such deviation; said positioning apparatus comprising correction means (C) disposed on said carriage means (V, W) and supporting said reference block (A), said correction means comprising a pair of frames (C2, C3) of different sizes, the inner frame (C3) being smaller and located concentrically within the outer frame (C2); first resilient coupling means (L2, L2) interposed between and interconnecting the inner (C3) and the outer (C2) of said frames at opposite sides thereof for resisting relative motion between said frames in a first direction, and maintaining alignment in said first direction while permitting deflection in a direction transverse to said first direction, the first resilient means having their respective terminal ends fixed to respective frames; second resilient coupling means (L1, L1) interposed between and interconnecting the outer of said frames (C2), and said base at opposite sides of said outer frame for resisting relative motion between said outer frame and said base (C1; Z) in the transverse direction, while permitting deflection in said first direction, the second resilient means (L1, L1) having one end fixed to said outer one of said frames and the other to said base; first position transducer means (Y1, Y2) interposed between said concentric frames (C2, C3) and acting in said transverse direction; second position transducer means (X1, X2) interposed between said outer frame (C2) and the base (C1; Z) and acting in said first direction; said reference block (A; C3) being supported by said inner frame; said deviation detection and error signal generating means being interconnected with said first and second transducer means and controlling said transducer means to effect resilient deformation of the respective resilient means to position the inner frame, and with it, said reference block, to reduce the deviation to zero.
Claim 3
Dependent Claim
92 words
Apparatus according to claim 1, comprising further means to compensate for rotational movement, said further means comprising a third frame (C4); third resilient deflection means coupling said inner frame (C3) and said third frame, said third frame supporting said reference (A) carrying said piece (P) to be positioned with accuracy; third position transducer means acting on said third resilient deflection means to slightly rotate said third frame with respect to said inner frame, and thus with respect to said base upon being energized to compensate for spurious rotation of said reference block.
Claim 4
Dependent Claim
74 words
Positioning apparatus according to claim 1 wherein the poSition detection means provided to detect any deviation of said reference block from its preselected initial position comprises optical means consisting of a monochromatic source of light, interferometer means (I1-I4) illuminated by said source reflecting on corresponding faces of said reference block; and receiving means to receive information carried by said optical means and to derive therefrom data related to said deviation of said reference block.
Claim 5
Dependent Claim
85 words
Positioning apparatus according to claim 1 wherein said receiving means comprises photoreceiver means, logical means, said logical latter means being responsive and connected to the output from said photo receiving means and controlling a reversible counter to derive data related to the direction of said deviation of said reference block; and comparator means to compare said data with reference data corresponding to said preselected position of said reference block, said logic means being responsive to the drift of the fringes produced by said interferometer means.
Claim 6
Dependent Claim
68 words
Positioning apparatus according to claim 1 wherein said transducer means are piezoelectric ceramics; means biasing the piezoelectric ceramics to balance the respective positions of the frames in the absence of any correcting signal, said ceramics being disposed so as to move the frame to which they are coupled in a direction different from that controllable by said resilient means and independently therefrom, said ceramics receiving said error voltages.
Claim 7
Dependent Claim
130 words
Positioning apparatus according to claim 1 wherein the inner frame comprises a rotatable plate (T); a stand (C5 - FIG. 5) bearing the rotation axis of the rotatable plate (T); a piece (P) to be accurately positioned having an axis of revolution; crossed carriage means mounted on said plate (T) for pre-adjusting the position of said piece (P) with respect to said plate (T); mechanical comparator means (N) mounted on said stand (C5), to sense, concurrently while said plate (T) is rotating about its axis, a part of the peripheral outline of said piece (P); and optical means to accurately position said piece (P) controlling and connected to said transducer means, whereby to bring into coincidence the axis of said plate (T) with the axis of said revolution piece (P).
Claim 8
Dependent Claim
13 words
Positioning apparatus according to claim 1 wherein said transducer means are magnetostrictive elements.
Claim 9
Dependent Claim
23 words
Positioning apparatus according to claim 3 wherein said reference block has orthogonal mirror faces, operating as moving mirrors of the associated interferometer means.
Claim 10
Dependent Claim
48 words
Positioning apparatus according to claim 4 wherein the logic means includes a reversible counter; and means are provided distinguishing between the two possible directions of count and along which said reference block may be moved with respect to a reference axis, said distinguishing means controlling said reversible counter.
Claim 11
Dependent Claim
44 words
Apparatus according to claim 3 comprising piezoelectric ceramic transducer means, the reference mirrors of said interferometer means being respectively mounted on said piezoelectric ceramic transducer means; and potentiometer means connected to and controlling said piezoelectric ceramic transducer means to provide for fine adjustment thereof.
Claim 12
Dependent Claim
35 words
Apparatus according to claim 1 comprising potentiometer means connected to and coupled to said transducer means controlling the resilient coupling means to said frames to provide for fine adjustment of the position of said frames.
Claim 13
Dependent Claim
46 words
Apparatus according to claim 1 further comprising photoelectronic microscopes (D1, D2, D3) located on said base to determine, accurately, the initial position of said reference block; and engraved markings of about 10 microns width on said reference block, said microscopes being aimed at said engraved markings.
Claim 14
Dependent Claim
43 words
Apparatus according to claim 12 comprising reference lines formed on said base, said reference lines extending in orthogonal directions and forming reference lines for said photoelectric microscopes and for reference mirrors of an interferometer; said carraige means being movable in said orthogonal directions.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-01-14 | 1977-07-16 | 1978-01-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-01-14 | 1981-07-16 | 1982-01-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-01-14 | 1985-07-16 | 1986-01-15 | $7700.00 | Window Closed / Lapsed |