US4534047A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Mask ring assembly for X-ray lithography
Assignee: SVG LITHOGRAPHY Inc A CORP OF
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Filing: 1984-01-06
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Granted: 1985-08-06
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Expires: 2004-01-06
Abstract
Abstract This invention is directed to a mask ring assembly for X-ray lithography which is particularly adapted, among other possible uses, for use in replicating integrated circuit patterns, said assembly including a mask ring, a plurality of kinematic mounts for removably mounting the mask ring on an alignment cartridge, each of the kinematic mounts including a funnel-like shaped seat member and a mating ball-like shaped member, one of said members being on the mask ring and the other of the members being mounted on the alignment cartridge.
Inventors
- 👤 Warren Deschenaux
- 👤 Gregory Hughes
- 👤 Justin Kreuzer
- 👤 Carlo La Fiandra
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 04:18
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/22
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
75 words
In combination: a mask ring, a mask membrane having a mask pattern thereon mounted on said mask ring; an alignment cartridge; a plurality of kinematic mounts for removably mounting said mask ring on said alignment cartridge; each of said kinematic mounts including a funnel-like shaped seat member and a mating ball-like shaped member, one of said members being mounted on said mask ring and the other of said members being mounted on said alignment cartridge.
Claim 2
Dependent Claim
75 words
In combination: a mask ring, a mask membrane having a mask pattern thereon mounted on said mask ring; an alignment cartridge; a plurality of kinematic mounts for removably mounting said mask ring on said alignment cartridge; each of said kinematic mounts including a funnel-like shaped seat member and a mating ball-like shaped member, one of said members being mounted on said mask ring and the other of said members being mounted on said alignment cartridge.
Claim 3
Dependent Claim
29 words
The combination according to claim 1 wherein said ball-like shaped members are mounted on said alignment cartridge and said funnel-like shaped seat members are fabricated in said mask ring.
Claim 4
Dependent Claim
22 words
The combination according to claim 1 wherein said plurality of kinematic mounts comprise three mounts spaced about 120° apart from each other.
Claim 5
Dependent Claim
27 words
The combination according to claim 1 wherein each of said ball-like shaped members have a fluid passage extending through it to its respective funnel-like shaped seat member.
Claim 6
Dependent Claim
23 words
The combination according to claim 1 further comprising radially compliant flexure means for mounting the other of said members on said alignment cartridge.
Claim 7
Dependent Claim
16 words
The combination according to claim 1 wherein said funnel-like shaped seat members are cone-shaped seat members.
Claim 8
Dependent Claim
23 words
The combination according to claim 6 wherein each of said cone-shaped seats has a total included angle of the order of about 60°.
Claim 9
Dependent Claim
43 words
The combination according to claim 1 wherein said funnel-like shaped seat members and said mating ball-like shaped members coact to form sealed chambers therebetween respectively, and said assembly further comprises means for forming a vacuum in said chambers to hold said members together.
Claim 10
Dependent Claim
18 words
The combination according to claim 1 wherein said mask ring has an alignment notch on the periphery thereof.
Claim 11
Dependent Claim
149 words
In combination: a mask ring, a mask membrane having a mask pattern thereon mounted on said mask ring; an alignment cartridge; there kinematic mounts for removably mounting said mask ring on said alignment cartridge, said mounts being space about 120° apart from each other; each of said kinematic mounts including a cone-shaped seat as part of said mask ring, each of said cone-shaped seats having a total included angle of the order of about 60°; each of said kinematic mounts including a mating ball-like shaped member, radially compliant flexure means for mounting each of said ball-like shaped members on said alignment cartridge; and each of said cone-shaped seats and its mating ball-like shaped member coacting to form a sealed chamber there between, said ball-like shaped member having a fluid passage extending through it to said cone-shaped seat for forming a vacuum in said chamber to hold the members together.
Claim 12
Dependent Claim
149 words
In combination: a mask ring, a mask membrane having a mask pattern thereon mounted on said mask ring; an alignment cartridge; there kinematic mounts for removably mounting said mask ring on said alignment cartridge, said mounts being space about 120° apart from each other; each of said kinematic mounts including a cone-shaped seat as part of said mask ring, each of said cone-shaped seats having a total included angle of the order of about 60°; each of said kinematic mounts including a mating ball-like shaped member, radially compliant flexure means for mounting each of said ball-like shaped members on said alignment cartridge; and each of said cone-shaped seats and its mating ball-like shaped member coacting to form a sealed chamber there between, said ball-like shaped member having a fluid passage extending through it to said cone-shaped seat for forming a vacuum in said chamber to hold the members together.
Claim 13
Dependent Claim
31 words
The combination according to claim 10 wherein each of said ball-like shaped members is friction welded to a post and said post is fixedly attached to said radially compliant flexure means.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-08-05 | 1989-02-04 | 1989-08-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-08-05 | 1993-02-04 | 1993-08-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-08-05 | 1997-02-04 | 1997-08-06 | $7700.00 | Window Closed / Lapsed |