US3892973A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Mask structure for X-ray lithography
Assignee: AT&T Inc
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Filing: 1974-02-15
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Granted: 1975-07-01
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Expires: 1994-02-15
Abstract
Abstract A mask structure for use in an x-ray lithographic system comprises as the substrate thereof a Mylar film stretched over and bonded to a support ring. The stretched Mylar film exhibits an attractive combination of advantageous properties such as high planarity, dimensional stability, mechanical strength, low x-ray absorption, resistance to organic solvents, optical transparency, and ready availability in a variety of thicknesses with optical quality surfaces.
Inventors
- 👤 Gerald Allan Coquin
- 👤 Juan Ramon Maldonado
- 👤 Dan Maydan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 17:46
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/22; G03F1/38; G03F1/48
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
33 words
IN COMBINATION IN A MASK STRUCTURE, A DIMENSIONALLY STABLE SUPPORT MEMBER, A X-RAY TRANSPARENT HEAT-TREATED FILM STRETCHED OVER AND BONDED TO SAID SUPPORT MEMBER, AND AN X-RAY ABSORPTIVE PATTERN DISPOSED ON SAID FILM.
Claim 2
Dependent Claim
33 words
IN COMBINATION IN A MASK STRUCTURE, A DIMENSIONALLY STABLE SUPPORT MEMBER, A X-RAY TRANSPARENT HEAT-TREATED FILM STRETCHED OVER AND BONDED TO SAID SUPPORT MEMBER, AND AN X-RAY ABSORPTIVE PATTERN DISPOSED ON SAID FILM.
Claim 3
Dependent Claim
38 words
In combination in a mask structure, a dimensionally stable support member, an x-ray-transparent film stretched over and bonded to said support member, and an x-ray-absorptive pattern disposed on said film, wherein said film is made of polyethylene terephthalate.
Claim 4
Dependent Claim
38 words
In combination in a mask structure, a dimensionally stable support member, an x-ray-transparent film stretched over and bonded to said support member, and an x-ray-absorptive pattern disposed on said film, wherein said film is made of polyethylene terephthalate.
Claim 5
Dependent Claim
16 words
A combination as in claim 2 further including x-ray-transparent means for protecting said pattern from damage.
Claim 6
Dependent Claim
26 words
A combination as in claim 3 still further including a layer deposited on said film for absorbing all but a narrow preselected band of x-ray wavelengths.
Claim 7
Dependent Claim
24 words
A combination as in claim 4 wherein said x-ray-transparent means comprises a layer of boron carbide deposited on said film to cover said pattern.
Claim 8
Dependent Claim
13 words
A combination as in claim 5 wherein said pattern is made of gold.
Claim 9
Dependent Claim
18 words
A combination as in claim 6 wherein said support member is shaped in the form of a ring.
Claim 10
Independent Claim
43 words
A method of fabricating an x-ray mask substrate comprising the steps of bonding peripheral portions of an x-ray-transparent film to a dimensionally stable support member, heat treating the film to impart a tautness thereto, and forming an x-ray-absorptive pattern on said taut film.
Claim 11
Independent Claim
43 words
A method of fabricating an x-ray mask substrate comprising the steps of bonding peripheral portions of an x-ray-transparent film to a dimensionally stable support member, heat treating the film to impart a tautness thereto, and forming an x-ray-absorptive pattern on said taut film.
Claim 12
Dependent Claim
55 words
In combination in a mask structure, a dimensionally stable support member, an x-ray-transparent film stretched over and bonded to said support member, an x-ray-absorptive pattern disposed on said film, x-ray-transparent means for protecting said pattern from damage, and a layer deposited on said film for absorbing all but a narrow preselected band of x-ray wavelengths.
Claim 13
Dependent Claim
55 words
In combination in a mask structure, a dimensionally stable support member, an x-ray-transparent film stretched over and bonded to said support member, an x-ray-absorptive pattern disposed on said film, x-ray-transparent means for protecting said pattern from damage, and a layer deposited on said film for absorbing all but a narrow preselected band of x-ray wavelengths.
References Cited (Backward Citations)
US3743842A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-06-30 | 1978-12-30 | 1979-07-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-06-30 | 1982-12-30 | 1983-07-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-06-30 | 1986-12-30 | 1987-07-01 | $7700.00 | Window Closed / Lapsed |