US5203208A
Expired / Lapsed
US
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Symmetrical micromechanical gyroscope
Assignee: Charles Stark Draper Laboratory Inc
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Filing: 1991-04-29
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Granted: 1993-04-20
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Expires: 2011-04-29
Abstract
Abstract A symmetrical micromechanical gyroscope includes an inertial mass symmetrically supported about both drive and sense axes, for detecting rotational movement about an input axis. Two pairs of flexures attached to diametrically opposed sides of the inertial mass support the mass within a gyroscope support frame. Each of the flexures are oriented at generally a 45° angle from both the drive and the sense axes. In response to an applied drive signal, the inertial mass is induced to vibrate about a drive axis which is co-planar with and orthogonal to the sense axis. Both pair of flexures participate equally during rotation of the mass.
Inventors
- 👤 Jonathan J. Bernstein
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 00:33
CPC Classifications
G; G01; G01C; G01C19/00; G01C19/56; G01C19/5719; G01P; G01P15/00; G01P15/02; G01P15/08; G01P2015/0805; G01P2015/0822; G01P2015/084
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
271 words
A symmetrical, micromechanical gyroscope, for detecting rotational movement about an input axis, comprising: a gyroscope support frame including a cavity above which is suspended an inertial mass; first and second pairs of flexures suspending said mass above said cavity; said first pair of flexures including first and second flexible elements, each of said flexible elements including a first end coupled to a first side of said mass, and a second end coupled to a first portion of said support frame, each of said first and second flexible elements oriented generally at a 45° angle from a sense axis; said second pair of flexures including third and forth flexible elements, each of said flexible elements including a first end coupled to a second side of said mass diametrically opposed from said first side of the mass, and a second end coupled to a second portion of said support frame, diametrically opposed from the first portion of said support frame, said third and forth flexible elements oriented generally at a 45° angle from said sense axis; a drive axis, about which said inertial mass is induced to vibrate in response to an applied drive signal, said drive axis coplanar with and orthogonal to said sense axis; means for driving said hydroscope about said drive axis; means for sensing rotation of said inertial mass about said sense axis; and wherein each flexible element of said first and second pair of flexures is oriented generally at a 45° angle from said drive axis, for providing a micromechanical gyroscope with flexures coupling said inertial mass which are symmetrically oriented about both said drive and sense axes.
Claim 2
Dependent Claim
271 words
A symmetrical, micromechanical gyroscope, for detecting rotational movement about an input axis, comprising: a gyroscope support frame including a cavity above which is suspended an inertial mass; first and second pairs of flexures suspending said mass above said cavity; said first pair of flexures including first and second flexible elements, each of said flexible elements including a first end coupled to a first side of said mass, and a second end coupled to a first portion of said support frame, each of said first and second flexible elements oriented generally at a 45° angle from a sense axis; said second pair of flexures including third and forth flexible elements, each of said flexible elements including a first end coupled to a second side of said mass diametrically opposed from said first side of the mass, and a second end coupled to a second portion of said support frame, diametrically opposed from the first portion of said support frame, said third and forth flexible elements oriented generally at a 45° angle from said sense axis; a drive axis, about which said inertial mass is induced to vibrate in response to an applied drive signal, said drive axis coplanar with and orthogonal to said sense axis; means for driving said hydroscope about said drive axis; means for sensing rotation of said inertial mass about said sense axis; and wherein each flexible element of said first and second pair of flexures is oriented generally at a 45° angle from said drive axis, for providing a micromechanical gyroscope with flexures coupling said inertial mass which are symmetrically oriented about both said drive and sense axes.
Claim 3
Dependent Claim
43 words
The gyroscope of claim 1 wherein said first and second pairs of flexures are generally co-planar with a surface of said gyroscope support frame, with at least a portion of a surface of said inertial mass, and with said sense and drive axes.
Claim 4
Dependent Claim
26 words
The gyroscope of claim 1 wherein said gyroscope support frame, inertial mass, and first and second pairs of flexures are fabricated from a single silicon substrate.
Claim 5
Dependent Claim
17 words
The gyroscope of claim 3 wherein said cavity is formed by anisotropic etching of said silicon substrate.
Claim 6
Dependent Claim
24 words
The gyroscope of claim 1 wherein said inertial mass includes a structure extending above and below the planar surface of said gyroscope support frame.
Claim 7
Dependent Claim
13 words
The gyroscope of claim 5 wherein said inertial mass is formed by plating.
Claim 8
Dependent Claim
27 words
The gyroscope of claim 1 further including a plurality of strain relief slots disposed proximate one end of each of said first and second pairs of flexures.
Claim 9
Dependent Claim
31 words
The gyroscope of claim 1 wherein said at least one means for driving includes a drive electrode and said at least one means for sensing includes at least one sense electrode.
Claim 10
Dependent Claim
17 words
The gyroscope of claim 8 wherein said drive and sense means are buried electrodes or bridge electrodes.
Claim 11
Dependent Claim
332 words
A symmetrical, micromechanical gyroscope fabricated from a single unitary silicon substrate, for detecting rotational movement about an input axis, comprising: a gyroscope support frame including a cavity within which is suspended an inertial mass; first and second pair of flexures suspending said mass within said cavity; said first and second pair of flexures generally co-planar with a surface of said gyroscope support frame and with a sense axis about which rotational movement of said inertial mass may be sensed; said first pair of flexures including first and second flexible elements, each of said flexible elements including a first end coupled to a first side of said mass, and a second end coupled to a first portion of said support frame, each of said first and second flexible elements oriented generally at a 45° angle from said sense axis; said second pair of flexures including third and forth flexible elements, each of said flexible elements including a first end coupled to a second side of said mass diametrically opposed from said first side of the mass, and a second end coupled to a second portion of said support frame, diametrically opposed from the first portion of said support frame, said third and forth flexible elements oriented generally at a 45° angle from said sense axis; a drive axis, about which said inertial mass is induced to vibrate in response to an applied drive signal, said drive axis co-planar with and orthogonal to said sense axis; wherein each flexible element of said first and second pair of flexures is oriented generally at a 45° angle from said drive axis, for providing a micromechanical gyroscope with flexures supporting said inertial mass which are symmetrically oriented about both said drive and sense axes; drive means, for driving said gyroscope about said drive axis; sense means, for sensing rotation of said inertial mass about said sense axis; and means, responsive to said drive and sense means, for calculating the rotation of said gyroscope about said input axis.
Claim 12
Dependent Claim
332 words
A symmetrical, micromechanical gyroscope fabricated from a single unitary silicon substrate, for detecting rotational movement about an input axis, comprising: a gyroscope support frame including a cavity within which is suspended an inertial mass; first and second pair of flexures suspending said mass within said cavity; said first and second pair of flexures generally co-planar with a surface of said gyroscope support frame and with a sense axis about which rotational movement of said inertial mass may be sensed; said first pair of flexures including first and second flexible elements, each of said flexible elements including a first end coupled to a first side of said mass, and a second end coupled to a first portion of said support frame, each of said first and second flexible elements oriented generally at a 45° angle from said sense axis; said second pair of flexures including third and forth flexible elements, each of said flexible elements including a first end coupled to a second side of said mass diametrically opposed from said first side of the mass, and a second end coupled to a second portion of said support frame, diametrically opposed from the first portion of said support frame, said third and forth flexible elements oriented generally at a 45° angle from said sense axis; a drive axis, about which said inertial mass is induced to vibrate in response to an applied drive signal, said drive axis co-planar with and orthogonal to said sense axis; wherein each flexible element of said first and second pair of flexures is oriented generally at a 45° angle from said drive axis, for providing a micromechanical gyroscope with flexures supporting said inertial mass which are symmetrically oriented about both said drive and sense axes; drive means, for driving said gyroscope about said drive axis; sense means, for sensing rotation of said inertial mass about said sense axis; and means, responsive to said drive and sense means, for calculating the rotation of said gyroscope about said input axis.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-04-19 | 1996-10-19 | 1997-04-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-04-19 | 2000-10-19 | 2001-04-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-04-19 | 2004-10-19 | 2005-04-20 | $7700.00 | Window Closed / Lapsed |