Process for preparing an alpha-phase silicon nitride material and thereafter converting to non-densified beta-phase material

Claim 2

A process for preparing an alpha-phase silicon nitride material and thereafter converting to non-densified beta-phase silicon nitride material, comprising: (a) comminuting a slurry including a mixture of (i) silicon-containing powder, and (ii) water, said comminuting being performed to form non-oxidized surfaces on the silicon powder and to allow chemical reaction between the silicon and the water; (b) reducing the water content of the reacted slurry to a degree sufficient to form a resultant dry mass; (c) nitriding the dry mass by exposure to a nitriding gas including at least nitrogen to form a mass of silicon nitride material which is predominantly in the alpha-phase; and (d) converting the resultant silicon nitride mass at a conversion temperature of from about 1450° C. to about 2100° C. to convert the silicon nitride from an alpha-phase material to non-densified beta phase silicon nitride material.

Claim 3

The process of claim 1, wherein said comminuting is performed by a method selected from the group consisting of ball milling, rod milling, vibratory grinding, Union Process grinding, jet milling, cone grinding, jaw crushing, and hammer milling.

Claim 4

The process of claim 1, wherein said comminuting is performed by ball milling.

Claim 5

The process of claim 1, wherein said comminuting is performed until the silicon powder size is less than 10 microns.

Claim 6

The process of claim 1, wherein said comminuting is performed for greater than two hours.

Claim 7

The process of claim 1, further comprising admixing a dispersing aid into the slurry in the comminuting step.

Claim 8

The process of claim 1, further comprising admixing organic additives to the slurry before reducing its water content to effect the physical properties of the silicon mixture.

Claim 9

The process of claim 7, wherein said organic additives are selected from the group consisting of binders, lubricants, plasticizers, and viscosity modifiers including dispersing agents.

Claim 10

The process of claim 7, wherein said admixing is accomplished by comminuting the slurry with the organic additives for at least 30 minutes after said organic additives are admixed.

Claim 11

The process of claim 1, further comprising the step of at least periodically venting the evolving gases from the reacting slurry.

Claim 12

The process of claim 1, further comprising a step of aging the comminuted slurry in the absence of comminuting for a period of time sufficient to allow the chemical reaction to be completed.

Claim 13

The process of claim 1, wherein reducing the water content is performed by a method selected from the group consisting of spray drying, slip casting, extrusion, injection molding, and tape casting.

Claim 14

The process of claim 1, further comprising a step of forming the resulting dry mass into an article before exposing the article to the nitriding gas, said forming being performed by a method selected from the group consisting of isopressing, dry pressing, extruding, and injection molding.

Claim 15

The process of claim 7, further comprising a step of placing the resultant dry mass into a furnace and filling the furnace with a combustible gas atmosphere while increasing the temperature from about room temperature to about 1000° C. over a time period from about 1 to about 5 hours while flowing the combustible gas therethrough, such that the organic additives are burned off without causing damage to the dry mass.

Claim 16

The process of claim 14, wherein said combustible gas atmosphere includes hydrogen gas.

Claim 17

The process of claim 1, wherein the composition of the nitriding gas remains substantially constant throughout the nitriding step by monitored addition of pure nitrogen.

Claim 18

The process of claim 1, wherein the nitriding gas includes pure nitrogen.

Claim 19

The process of claim 1, wherein the nitriding gas includes nitrogen and helium.

Claim 20

The process of claim 1, wherein the nitriding gas includes nitrogen, helium and hydrogen.

Claim 21

The process of claim 1, wherein said nitriding gas comprises from about 40 to about 60 mole percent nitrogen, from about 40 to about 60 mole percent helium, and from about 1 to about 4 mole percent hydrogen.

Claim 22

The process of claim 1, wherein said nitriding step is performed while heating at an increasing temperature rate of from about 5° C. to about 50° C. per hour until an elevated temperature of about 1350° C to about 1450° C. is reached.

Claim 23

The process of claim 21, wherein said nitriding step begins at about 1000° C. and is performed while heating at an increasing temperature rate of from about 5° C. to about 50° C. per hour until an elevated temperature of about 1350° C. to about 1450° C. is reached.

Claim 24

The process of claim 21, wherein the nitriding step is performed while the temperature rate is a 15°-25° C. increase per hour.

Claim 25

The process of claim 21, wherein the increasing temperature rate during nitriding is substantially linear.

Claim 26

The process of claim 1, further comprising holding the temperature achieved during the nitriding step between about 1350° C. to about 1450° C. for less than 2 hours.

Claim 27

The process of claim 1, wherein said conversion includes utilizing at least a nitrogen-containing atmosphere during the conversion.

Claim 28

The process of claim 1, wherein said conversion includes utilizing an atmosphere containing at least nitrogen and helium during the conversion.

Claim 29

A process for preparing an alpha-phase silicon nitride material and thereafter converting to non-densified beta-phase silicon nitride material, comprising: (a) comminuting a slurry including a mixture of (i) silicon-containing powder, and (ii) water, said comminuting being performed to form non-oxidized surfaces on the silicon powder and to allow chemical reaction between the silicon and the water; (b) reducing the water content of the reacted slurry to a degree sufficient to form a resultant dry mass; (c) nitriding the dry mass by exposure to a nitriding gas including at least nitrogen to form a mass of silicon nitride material which is predominantly in the alpha-phase; and (d) converting the resultant silicon nitride mass at a conversion temperature of from about 1450° C. to about 2100° C. to convert the silicon nitride from an alpha-phase material to non-densified beta phase silicon nitride material, wherein said conversion includes utilizing an atmosphere containing at least nitrogen and hydrogen during the conversion.

Claim 30

A process for preparing an alpha-phase silicon nitride material and thereafter converting to non-densified beta-phase silicon nitride material, comprising: (a) comminuting a slurry including a mixture of (i) silicon-containing powder, and (ii) water, said comminuting being performed to form non-oxidized surfaces on the silicon powder and to allow chemical reaction between the silicon and the water; (b) reducing the water content of the reacted slurry to a degree sufficient to form a resultant dry mass; (c) nitriding the dry mass by exposure to a nitriding gas including at least nitrogen to form a mass of silicon nitride material which is predominantly in the alpha-phase; and (d) converting the resultant silicon nitride mass at a conversion temperature of from about 1450° C. to about 2100° C. to convert the silicon nitride from an alpha-phase material to non-densified beta phase silicon nitride material, wherein said conversion includes utilizing an atmosphere containing at least nitrogen and hydrogen during the conversion.

Claim 31

A process for preparing an alpha-phase silicon nitride material and thereafter converting to non-densified beta-phase silicon nitrode material, comprising: (a) comminuting a slurry including a mixture of (i) silicon-containing powder, and (ii) water, said comminuting being performed to form non-oxidized surfaces on the silicon powder and to allow chemical reaction between the silicon and the water; (b) reducing the water content of the reacted slurry to a degree sufficient to form a resultant dry mass; (c) nitriding the dry mass by exposure to a nitriding gas including at least nitrogen to form a mass of silicon nitride material which is predominantly in the alpha-phase; and (d) converting the resultant silicon nitride mass at a conversion temperature of from about 1450° C. to about 2100° C. to convert the silicon nitride from an alpha-phase material to non-densified beta phase silicon nitride material, wherein said conversion includes utilizing an atmosphere containing at least nitrogen, helium and hydrogen during the conversion.

Claim 32

A process for preparing an alpha-phase silicon nitride material and thereafter converting to non-densified beta-phase silicon nitrode material, comprising: (a) comminuting a slurry including a mixture of (i) silicon-containing powder, and (ii) water, said comminuting being performed to form non-oxidized surfaces on the silicon powder and to allow chemical reaction between the silicon and the water; (b) reducing the water content of the reacted slurry to a degree sufficient to form a resultant dry mass; (c) nitriding the dry mass by exposure to a nitriding gas including at least nitrogen to form a mass of silicon nitride material which is predominantly in the alpha-phase; and (d) converting the resultant silicon nitride mass at a conversion temperature of from about 1450° C. to about 2100° C. to convert the silicon nitride from an alpha-phase material to non-densified beta phase silicon nitride material, wherein said conversion includes utilizing an atmosphere containing at least nitrogen, helium and hydrogen during the conversion.

Claim 33

The process of claim 1, wherein said conversion includes utilizing the same atmosphere as the atmospheric gas used during the nitriding step.

Claim 34

The process of claim 1, wherein said conversion includes utilizing an atmosphere containing substantially pure nitrogen.

Claim 35

The process of claim 1, wherein said conversion step is performed under vacuum from the end of the nitriding step to the beginning of the converting step, then an atmosphere containing at least nitrogen is admitted during the duration of the converting step.

Claim 36

The process of claim 1, wherein said conversion step is accomplished while utilizing the conversion atmosphere at a pressure of from vacuum to atmospheric pressure.

Claim 37

The process of claim 1, wherein said conversion step is accomplished while utilizing the conversion atmosphere at a pressure of from atmospheric to about 150 psig.

Claim 38

The process of claim 1, wherein said conversion step is accomplished while utilizing the conversion atmosphere at about 50 psig.

Claim 39

The process of claim 1, wherein said conversion step is accomplished while utilizing a conversion atmosphere including at least nitrogen at a partial pressure greater than 50 psig.

Claim 40

The process of claim 1, wherein said conversion step is accomplished while heating from the temperature achieved at the end of the nitriding step to the beginning of the conversion step at an increasing rate of from about 250° C. to about 1250° C. per hour until an elevated temperature of about 1450° C. to about 2100° C. is reached.

Claim 41

The process of claim 1, wherein said conversion step is accomplished while heating from the temperature achieved at the end of the nitriding step to the beginning of the conversion step at an increasing rate of from about 500° C. to about 1000° C. per hour until an elevated temperature of about 1450° C. to about 2100° C. is reached.

Claim 42

The process of claim 1, wherein said increasing rate includes about 500° C. per hour until the elevated temperature is reached.

Claim 43

The process of claim 1, wherein said conversion step is accomplished by maintaining a temperature of between about 1450° C. to about 2100° C. until the silicon nitride is converted to non-densified beta phase silicon nitride.

Claim 44

The process of claim 1, wherein said conversion step is accomplished by maintaining a conversion temperature of between about 1650° C. to about 1850° C. until the silicon nitride is converted to non-densified beta phase silicon nitride.

Claim 45

The process of claim 1, wherein said conversion step is accomplished by maintaining the conversion temperature for about 0.3 to about 20 hours until the silicon nitride is converted to non-densified beta phase silicon nitride.

Claim 46

The process of claim 1, wherein said conversion step is accomplished by maintaining a conversion temperature for about 5 to about 10 hours until substantially all of the silicon nitride is converted to non-densified beta phase silicon nitride.

Claim 47

A process for preparing an alpha-phase silicon nitride material and thereafter converting to non-densified beta-phase silicon nitride material, comprising: (a) comminuting a slurry including a mixture of (i) silicon-containing powder, and (ii) water, said comminuting being performed to form non-oxidized surfaces on the silicon powder and to allow chemical reaction between the silicon and the water; (b) reducing the water content of the reacted slurry to a degree sufficient to form a resultant dry mass; (c) nitriding the dry mass by exposure to a nitriding gas including at least nitrogen to form a mass of silicon nitride material which is predominantly in the alpha-phase; and (d) converting the resultant silicon nitride mass at a conversion temperature of from about 1450° C. to about 2100° C. to convert the silicon nitride from an alpha-phase material to non-densified beta phase silicon nitride material, wherein said conversion step is accomplished by maintaining the conversion temperature for about 1 to about 2 hours until substantially all of the silicon nitride is converted to non-densified beta phase silicon nitride.

Claim 48

A process for preparing an alpha-phase silicon nitride material and thereafter converting to non-densified beta-phase silicon nitride material, comprising: (a) comminuting a slurry including a mixture of (i) silicon-containing powder, and (ii) water, said comminuting being performed to form non-oxidized surfaces on the silicon powder and to allow chemical reaction between the silicon and the water; (b) reducing the water content of the reacted slurry to a degree sufficient to form a resultant dry mass; (c) nitriding the dry mass by exposure to a nitriding gas including at least nitrogen to form a mass of silicon nitride material which is predominantly in the alpha-phase; and (d) converting the resultant silicon nitride mass at a conversion temperature of from about 1450° C. to about 2100° C. to convert the silicon nitride from an alpha-phase material to non-densified beta phase silicon nitride material, wherein said conversion step is accomplished by maintaining the conversion temperature for about 1 to about 2 hours until substantially all of the silicon nitride is converted to non-densified beta phase silicon nitride.

Claim 49

The process of claim 1, further comprising cooling down the resulting non-densified silicon nitride mass from the conversion temperature to room temperature at a rate of from about 250° C. to about 1250° C. per hour.

Claim 50

The process of claim 45, wherein said cooling down occurs at a rate of from about 500° C. to about 1000° C. per hour until room temperature is reached.

Claim 51

The process of claim 45, wherein said cooling down occurs at about 500° C. per hour until room temperature is reached.

Claim 52

The process of claim 1, further comprising a step of adding at least one nitriding agent into the silicon and water slurry before the comminution step is completed.

Claim 53

The process of claim 48, wherein the at least one nitriding agent is selected from the group consisting of iron oxides, lead oxides, nickel carbonyl, nickel oxides, silicon carbide, graphite, carbon, aluminum oxides, Fe 2 O 3 , NiO, CoO, CaF, PbO, Li 2 O, Na 2 O, K 2 O, K 2 O, BaO, BN, albite (NaAlSi 3 O 8 ), orthclase (KAlSi 3 O 8 ), anorthite (CaAl 2 Si 2 O 8 ), nepheline syenite, talc, borax, soda ash, Pb 3 O 4 , alpha-phase Si 3 N 4 and mixtures thereof.

Claim 54

The process of claim 1, further comprising compacting the dry mass before nitriding.

Claim 55

The process of claim 1, further comprising compacting the mass of silicon nitride resulting form the nitriding step into a compacted article before the step of converting to beta-phase silicon nitride.

Claim 56

The process of claim 1, wherein the step of comminuting is accomplished by employing the slurry components in amounts such that the slurry contains about 10 to 60 volume percent solids and about 90 to 40 volume percent water.

Claim 57

A process for preparing an alpha-phase silicon nitride material and thereafter converting to non-densified beta-phase silicon nitride material, comprising: (a) comminuting a slurry including a mixture of (i) silicon-containing powder, (ii) water, and (iii) at least one nitriding agent selected from the group consisting of iron oxides, lead oxides, nickel carbonyl, nickel oxides, silicon carbide, graphite, carbon, aluminum oxides, Fe 2 O 3 , NiO, CoO, CaF, PbO, Li 2 O, Na 2 O, K 2 O, BaO, BN, albite (NaAlSi 3 O 8 ), orthclase (KAlSi 3 O 8 ), anorthite (CaAl 2 Si 2 O 8 ), nepheline syenite, talc, borax, soda ash, Pb 3 O 4 , alpha-phase Si 3 N 4 and mixtures thereof for aiding in further processing steps, said comminuting being performed to form non-oxidized surfaces on the silicon powder and to allow chemical reaction between the silicon and the water; (b) reducing the water content of the reacted slurry to a degree sufficient to form a resultant dry mass; (c) nitriding the dry mass by exposure to a nitriding gas including at least nitrogen to form a mass of silicon nitride material which is predominantly in the alpha-phase; and (d) heating the resultant silicon nitride mass at about 1450° C. to about 2100° C. to convert the silicon nitride from an alpha-phase material to a non-densified beta phase silicon nitride material.

Claim 58

A process for preparing an alpha-phase silicon nitride material and thereafter converting to non-densified beta-phase silicon nitride material, comprising: (a) comminuting a slurry including a mixture of (i) silicon-containing powder, (ii) water, and (iii) at least one nitriding agent selected from the group consisting of iron oxides, lead oxides, nickel carbonyl, nickel oxides, silicon carbide, graphite, carbon, aluminum oxides, Fe 2 O 3 , NiO, CoO, CaF, PbO, Li 2 O, Na 2 O, K 2 O, BaO, BN, albite (NaAlSi 3 O 8 ), orthclase (KAlSi 3 O 8 ), anorthite (CaAl 2 Si 2 O 8 ), nepheline syenite, talc, borax, soda ash, Pb 3 O 4 , alpha-phase Si 3 N 4 and mixtures thereof for aiding in further processing steps, said comminuting being performed to form non-oxidized surfaces on the silicon powder and to allow chemical reaction between the silicon and the water; (b) reducing the water content of the reacted slurry to a degree sufficient to form a resultant dry mass; (c) nitriding the dry mass by exposure to a nitriding gas including at least nitrogen to form a mass of silicon nitride material which is predominantly in the alpha-phase; and (d) heating the resultant silicon nitride mass at about 1450° C. to about 2100° C. to convert the silicon nitride from an alpha-phase material to a non-densified beta phase silicon nitride material.