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US5153754A Expired / Lapsed US ⏱️ 0.0 years remaining

Multi-layer address lines for amorphous silicon liquid crystal display devices

Assignee: General Electric Co
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Filing: 1989-11-29
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Granted: 1992-10-06
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Expires: 2009-11-29
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Abstract

Abstract Each scan line of a liquid crystal display (LCD) includes: a first layer of titanium disposed on the LCD substrate surface to promote adhesion of the scan line to the substratae surface; a layer of molybdenum or aluminum disposed on the first titanium layer to provide a low resistance address line; and a second layer of titanium disposed on the molybdenum layer to promote adhesion of a subsequently deposited layer of passivation material, semiconductor material or the like over the scan line. The multi-layered scan line side walls may be etched to promote step coverage of subsequently deposited layers of material. The data lines may also have a multi-layer conductor structure similar to the scan lines.

Inventors

  • 👤 Nathan R. Whetten

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-01 10:30
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/136; G02F1/1362; G02F1/1368; C; C23; C23F; C23F1/00; C23F1/10; C23F1/14; C23F1/16; C23F1/26; H; H10; H10D; H10D86/00; H10D86/40; H10D86/441; H10D86/60; G02F1/136286; G02F1/13629; H10D30/00; H10D30/60; H10D30/67; H10D30/6729; H10D30/6737; H10D30/6739; H10D30/674; H10D30/6741; H10D30/6743

Claims Analysis

Total Claims: 25
Claim 1
Independent Claim 114 words
An electrically conductive address line for fabrication upon a relatively large insulative substrate surface, comprising: a first layer of an electrically conductive, laser-weldable material disposed on said insulative substrate surface and selected to adhere thereto; and a second layer of an electrically conductive, low bulk resistivity material directly disposed upon said first layer to form a multi-layer conductive line; said second layer of conductive material being selected from the group consisting of molybdenum and aluminum; said first and second layers being disposed between and electrically coupled to selected ones of a plurality of active semiconductor devices positioned on said insulative substrate surface in an array having an area greater than about four square inches.
Claim 2
Dependent Claim 114 words
An electrically conductive address line for fabrication upon a relatively large insulative substrate surface, comprising: a first layer of an electrically conductive, laser-weldable material disposed on said insulative substrate surface and selected to adhere thereto; and a second layer of an electrically conductive, low bulk resistivity material directly disposed upon said first layer to form a multi-layer conductive line; said second layer of conductive material being selected from the group consisting of molybdenum and aluminum; said first and second layers being disposed between and electrically coupled to selected ones of a plurality of active semiconductor devices positioned on said insulative substrate surface in an array having an area greater than about four square inches.
Claim 3
Dependent Claim 14 words
The conductive line of claim 1, wherein said first layer conductive material is titanium.
Claim 4
Dependent Claim 30 words
The conductive line of claim 1, wherein said multi-layer line has side edges which are tapered to promote step coverage of subsequent layers of material deposited upon said conductive line.
Claim 5
Dependent Claim 25 words
The device of claim 1 wherein the width of said first and second conductive layers at the interface between said layers is substantially the same.
Claim 6
Dependent Claim 132 words
An electrically conductive address line for fabrication upon a relatively large insulative substrate surface, comprising; a first layer of an electrically conductive, laser-weldable material disposed on said insulative substrate surface and selected to adhere thereto; a second layer of an electrically conductive, low bulk resistivity material directly disposed upon said first layer to form a multi-layer conductive line; and a third layer of an electrically conductive, laser weldable material selected to adhere to a non-metallic overlying surface, said third layer being directly disposed upon said second layer to form a multi-layer line; said first, second, and third layers being disposed between and electrically coupled to selected ones of a plurality of active semiconductor devices positioned on said insulative substrate surface in an array having an area greater than about four square inches.
Claim 7
Dependent Claim 132 words
An electrically conductive address line for fabrication upon a relatively large insulative substrate surface, comprising; a first layer of an electrically conductive, laser-weldable material disposed on said insulative substrate surface and selected to adhere thereto; a second layer of an electrically conductive, low bulk resistivity material directly disposed upon said first layer to form a multi-layer conductive line; and a third layer of an electrically conductive, laser weldable material selected to adhere to a non-metallic overlying surface, said third layer being directly disposed upon said second layer to form a multi-layer line; said first, second, and third layers being disposed between and electrically coupled to selected ones of a plurality of active semiconductor devices positioned on said insulative substrate surface in an array having an area greater than about four square inches.
Claim 8
Dependent Claim 20 words
The conductive line of claim 5, wherein said first conductive layer material and said third conductive layer material are titanium.
Claim 9
Dependent Claim 22 words
The conductive line of claim 5, wherein said second conductive layer material is selected from the group consisting of molybdenum and aluminum.
Claim 10
Dependent Claim 23 words
The conductive address line of claim 5, wherein said first and third conductive layers are between about 400 and about 1000 angstroms thick.
Claim 11
Dependent Claim 17 words
The conductive address line of claim 5, wherein said second conductive layer is about 1000 angstroms thick.
Claim 12
Dependent Claim 30 words
The conductive line of claim 5, wherein said multi-layer line has side edges which are tapered to promote step coverage of subsequent layers of material deposited upon said conductive line.
Claim 13
Dependent Claim 161 words
A liquid crystal display device, comprising: a multiplicity of pixels arranged substantially in rows and columns, said pixels forming an array having an area greater than about four square inches; a plurality of electrically conductive scan lines including at least one scan line for transmitting electrical signals to each row of pixels; and a plurality of electrically conductive data lines including at least one data line for transmitting electrical signals to each column of pixels; each of said scan lines insulatively crossing each of said data lines at a different crossover location and comprising: (a) a first layer of an electrically conductive, laser weldable material disposed on, and adhering to, a surface of a substrate of the liquid crystal display device; (b) a second layer of an electrically conductive, low bulk resistivity material directly disposed upon said first layer; respective ones of said scan lines being disposed between and electrically coupled to said pixels arranged in respective ones of said rows.
Claim 14
Dependent Claim 161 words
A liquid crystal display device, comprising: a multiplicity of pixels arranged substantially in rows and columns, said pixels forming an array having an area greater than about four square inches; a plurality of electrically conductive scan lines including at least one scan line for transmitting electrical signals to each row of pixels; and a plurality of electrically conductive data lines including at least one data line for transmitting electrical signals to each column of pixels; each of said scan lines insulatively crossing each of said data lines at a different crossover location and comprising: (a) a first layer of an electrically conductive, laser weldable material disposed on, and adhering to, a surface of a substrate of the liquid crystal display device; (b) a second layer of an electrically conductive, low bulk resistivity material directly disposed upon said first layer; respective ones of said scan lines being disposed between and electrically coupled to said pixels arranged in respective ones of said rows.
Claim 15
Dependent Claim 43 words
The liquid crystal display device of claim 11, further comprising a third layer of an electrically conductive, laser-weldable material selected to adhere to a non-metallic overlying surface, said third layer being directly disposed upon said second layer to form a multi-layer scan line.
Claim 16
Dependent Claim 22 words
The liquid crystal display device of claim 12, wherein said first conductive layer material and said third conductive layer material are titanium.
Claim 17
Dependent Claim 24 words
The liquid crystal display device of claim 12, wherein said first and third conductive layers are between about 400 and about 1000 angstroms thick.
Claim 18
Dependent Claim 24 words
The liquid crystal display device of claim 11, wherein said second conductive material layer is selected from the group consisting of aluminum and molybdenum.
Claim 19
Dependent Claim 37 words
The liquid crystal display device of claim 11, wherein said multi-layer scan line has side edges which are tapered to a degree selected to promote step coverage of subsequent layers of materials deposited upon said scan line.
Claim 20
Dependent Claim 18 words
The liquid crystal display device of claim 11, wherein said second conductive layer is about 1000 angstroms thick.
Claim 21
Dependent Claim 21 words
The liquid crystal display device of claim 11, wherein said data line comprises a plurality of layers of electrically conductive material.
Claim 22
Dependent Claim 41 words
The liquid crystal display device of claim 11, wherein said data line comprises: a first layer of titanium disposed upon an underlying substrate; and a second layer, selected from the group consisting of molybdenum and aluminum, disposed upon said first layer.
Claim 23
Dependent Claim 24 words
The liquid crystal display device of claim 19, wherein said data line further comprises a third layer of titanium disposed over said second layer.
Claim 24
Dependent Claim 90 words
The liquid crystal display device of claim 11, further comprising switching means associated with each of said multiplicity of pixels, said switching means being capable of transferring electrical signals to said pixel from one selected combination of said plurality of scan lines and said plurality of data lines for conversion to a visual signal, said switching means comprising at least one electrode having multiple layer of conductive material and being connected to at least one of said pixels and to said selected combination of conductive scan lines and data lines.
Claim 25
Dependent Claim 25 words
The device of claim 11 wherein the width of said first and second conductive layers at the interface between said layers is substantially the same.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1995-10-06 1996-04-06 1996-10-06 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1999-10-06 2000-04-06 2000-10-06 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2003-10-06 2004-04-06 2004-10-06 $7700.00 Window Closed / Lapsed

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