US4228212A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Composite conductive structures in integrated circuits
Assignee: General Electric Co
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Filing: 1979-06-11
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Granted: 1980-10-14
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Expires: 1999-06-11
Abstract
Abstract A composite conductive structure in integrated circuit devices is described. The composite conductive structure includes an insulating substrate on which is provided a conductor of a refractory metal substantially nonreactive with silicon dioxide. A layer of a silicide of the refractory metal covers the conductor and a layer of silicon dioxide covers the layer of the silicide. A method of making such structures is also described.
Inventors
- 👤 Dale M. Brown
- 👤 Marvin Garfinkel
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 10:42
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6302; H10P14/6304; H10P14/6306; H10P14/6308; H10D; H10D64/00; H10D64/01; H10D64/013; H10D64/01302; H10D64/01304; H10D64/01322; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/064; H10W20/066; H10W20/40; H10W20/41; H10W20/44; H10W20/4403; H10W20/4437; H10W20/4441; Y; Y10; Y10S; Y10S148/00; Y10S148/103; Y10S148/141; Y10S148/147; Y10T; Y10T428/00; Y10T428/24; Y10T428/24802; Y10T428/24917; Y10T428/24926
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
69 words
In combination, a substrate of semiconductor material having a major surface, a layer of insulating material overlying said major surface, a conductor of a refractory metallic material which is substantially non-reactive with silicon dioxide overlying said insulating layer, a layer of a silicide of said metallic material overlying the exposed surfaces of said conductor, a layer of silicon dioxide overlying the exposed surfaces of said layer of said silicide.
Claim 2
Dependent Claim
69 words
In combination, a substrate of semiconductor material having a major surface, a layer of insulating material overlying said major surface, a conductor of a refractory metallic material which is substantially non-reactive with silicon dioxide overlying said insulating layer, a layer of a silicide of said metallic material overlying the exposed surfaces of said conductor, a layer of silicon dioxide overlying the exposed surfaces of said layer of said silicide.
Claim 3
Dependent Claim
24 words
The combination of claim 1 in which said refractory metallic material is selected from the class consisting of molybdenum, tungsten, tantalum, platinum and palladium.
Claim 4
Dependent Claim
12 words
The combination of claim 2 in which said metallic material is molybdenum.
Claim 5
Dependent Claim
12 words
The combination of claim 2 in which said metallic material is tungsten.
Claim 6
Dependent Claim
12 words
The combination of claim 2 in which said metallic material is tantalum.
Claim 7
Dependent Claim
12 words
The combination of claim 2 in which said metallic material is platinum.
Claim 8
Dependent Claim
12 words
The combination of claim 2 in which said metallic material is palladium.
Claim 9
Dependent Claim
13 words
The combination of claim 1 in which said insulating material is silicon dioxide.
Claim 10
Dependent Claim
34 words
The combination of claim 1 in which said layer of insulating material is constituted of a layer of silicon nitride overlying a layer of silicon dioxide, said conductor overlying said layer of silicon nitride.
Claim 11
Dependent Claim
19 words
The combination of claim 1 in which said insulating material is a composite of silicon dioxide and silicon nitride.
Claim 12
Dependent Claim
12 words
The combination of claim 1 in which said semiconductor material is silicon.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1983-10-14 | 1984-04-14 | 1984-10-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1987-10-14 | 1988-04-14 | 1988-10-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1991-10-14 | 1992-04-14 | 1992-10-14 | $7700.00 | Window Closed / Lapsed |