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Method of making a light-emitting diode with anti-reflection layer optimization

Assignee: Eastman Kodak Co
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Filing: 1991-07-19
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Granted: 1992-08-04
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Expires: 2011-07-19
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Abstract

Abstract Improved light output from LED's or the like are obtained by modifying the combined thickness dimensions of a transmissive diffusion mask layer and anti-reflection coating layer at the periphery of the window forming the light-emitting region.

Inventors

  • 👤 Christopher J. Albergo
  • 👤 Robert J. Maryjanowski
  • 👤 Mary L. Ott

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-28 07:33
CPC Classifications
H; H10; H10H; H10H20/00; H10H20/80; H10H20/84; H10H20/81; H10H20/822; H10H20/824; H10H29/00; H10H29/10; H10H29/14

Claims Analysis

Total Claims: 10
Claim 1
Independent Claim 152 words
In a method of forming a light-emitting semiconductor device, the steps including providing a substrate of semiconductor material; forming a first layer upon said substrate of one type of material suited for forming a p-n junction; depositing a light transmissive dielectric mask layer over said first layer; etching a window in said dielectric layer; diffusing a substance through said window to form a diffused region in said first layer of a second type of material cooperating with the material of the first type to form a p-n junction; covering said window and portions of said mask adjacent said window with an anti-reflection layer and the improvement which comprises: wherein in the step of depositing the mask layer the thickness thereof is adjusted so that the combined thickness of the mask layer and anti-reflection layer are such as to provide a minimum of internal reflection of light emitted from beneath said mask layer.
Claim 2
Dependent Claim 152 words
In a method of forming a light-emitting semiconductor device, the steps including providing a substrate of semiconductor material; forming a first layer upon said substrate of one type of material suited for forming a p-n junction; depositing a light transmissive dielectric mask layer over said first layer; etching a window in said dielectric layer; diffusing a substance through said window to form a diffused region in said first layer of a second type of material cooperating with the material of the first type to form a p-n junction; covering said window and portions of said mask adjacent said window with an anti-reflection layer and the improvement which comprises: wherein in the step of depositing the mask layer the thickness thereof is adjusted so that the combined thickness of the mask layer and anti-reflection layer are such as to provide a minimum of internal reflection of light emitted from beneath said mask layer.
Claim 3
Dependent Claim 22 words
The method of claim 1 and wherein in the step of covering said window, said window is covered with a dielectric material.
Claim 4
Dependent Claim 46 words
The method of claim 2 and wherein the mask layer and anti-reflection layer are each formed of silicon nitride and wherein the thickness of the anti-reflection layer overlying the mask area is about 2700 Å and the thickness of the mask layer is about 1800 Å.
Claim 5
Dependent Claim 46 words
The method of claim 1 and wherein the mask layer and anti-reflection layer are each formed of silicon nitride and wherein the thickness of the anti-reflection layer overlying the mask area is about 2700 Å and the thickness of the mask layer is about 1800 Å.
Claim 6
Dependent Claim 16 words
The method of claim 4 and wherein the anti-reflection layer covering said window is a dielectric.
Claim 7
Dependent Claim 30 words
The method of claim 1 and wherein the thickness of the anti-reflection layer is such as to provide a minimum of internal reflection of light emitted from beneath said window.
Claim 8
Dependent Claim 138 words
In a method of forming a light-emitting semiconductor device, the steps including providing a substrate of semiconductor material and forming a p-n junction in said material; depositing a light transmissive dielectric mask layer upon said substrate and forming a light-transmissive window in said dielectric layer; covering said window and portions of said mask adjacent said window with an anti-reflection layer and the improvement which comprises: wherein in the step of depositing the mask layer the thickness thereof is adjusted so that the combined thickness of the mask layer and anti-reflection layer are such as to provide a minimum of internal reflection of light emitted from beneath said mask layer at areas adjacent said window and the thickness of the anti-reflection layer is such as to provide a minimum of internal reflection of light emitted from beneath said window.
Claim 9
Dependent Claim 138 words
In a method of forming a light-emitting semiconductor device, the steps including providing a substrate of semiconductor material and forming a p-n junction in said material; depositing a light transmissive dielectric mask layer upon said substrate and forming a light-transmissive window in said dielectric layer; covering said window and portions of said mask adjacent said window with an anti-reflection layer and the improvement which comprises: wherein in the step of depositing the mask layer the thickness thereof is adjusted so that the combined thickness of the mask layer and anti-reflection layer are such as to provide a minimum of internal reflection of light emitted from beneath said mask layer at areas adjacent said window and the thickness of the anti-reflection layer is such as to provide a minimum of internal reflection of light emitted from beneath said window.
Claim 10
Dependent Claim 22 words
The method of claim 7 and wherein in the step of covering said window, said window is covered with a dielectric material.

References Cited (Backward Citations)

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USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1995-08-04 1996-02-03 1996-08-04 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1999-08-04 2000-02-03 2000-08-04 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2003-08-04 2004-02-03 2004-08-04 $7700.00 Window Closed / Lapsed

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