US4617192A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process for making optical INP devices
Assignee: Nokia Bell Labs
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Filing: 1985-02-28
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Granted: 1986-10-14
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Expires: 2005-02-28
Abstract
Abstract The invention is a process for putting down coatings of aluminum oxide on optical surfaces using electron-beam deposition in an oxygen-enriched atmosphere. Particularly good results are obtained when oxygen is flowed over or directed at the surface to be coated. Such coatings have extremely low losses compared to many conventional optical coatings and are particularly useful for anti-reflection coatings on various devices. In particular, for optical devices with indium phosphide surfaces operating at wavelengths near 1.3 μm, the optical properties of aluminum oxide coatings are near optimum for anti-reflection coatings and the thermal expansion characteristics are a close match to those of indium phosphide.
Inventors
- 👤 Aland K. Chin
- 👤 Shobha Singh
- 👤 LeGrand G. V. Uitert
- 👤 George J. Zydzik
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 09:32
CPC Classifications
H; H10; H10H; H10H20/00; H10H20/80; H10H20/84; H10F; H10F30/00; H10F30/20; H10F30/21; H10F30/22; H10F30/223; H10F77/00; H10F77/30; H10F77/306; H10H20/81; H10H20/811; H10H20/822; H10H20/824; H10P; H10P14/00; H10P14/60; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6332; H10P14/69; H10P14/692; H10P14/6938; H10P14/6939; H10P14/69391
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
128 words
A process for making an optical device comprising at least one semiconductor substrate with optical surface for the transmission of radiation, said optical surface at least partially coated with a coating consisting essentially of aluminum oxide put down by electron-beam deposition in a vacuum chamber, said vacuum chamber comprising semiconductor substrate with optical surface and source, characterized in that the electron-beam deposition is carried out with a pressure in the vacuum chamber of less than 10 -3 Torr, the oxygen content of the gas in the vacuum chamber is greater than 30 percent by volume, and the concentration of oxygen near the semiconductor substrate with optical surface is at least a factor of 10 greater than near the electron-beam source and the source comprises single crystal aluminum oxide.
Claim 2
Dependent Claim
128 words
A process for making an optical device comprising at least one semiconductor substrate with optical surface for the transmission of radiation, said optical surface at least partially coated with a coating consisting essentially of aluminum oxide put down by electron-beam deposition in a vacuum chamber, said vacuum chamber comprising semiconductor substrate with optical surface and source, characterized in that the electron-beam deposition is carried out with a pressure in the vacuum chamber of less than 10 -3 Torr, the oxygen content of the gas in the vacuum chamber is greater than 30 percent by volume, and the concentration of oxygen near the semiconductor substrate with optical surface is at least a factor of 10 greater than near the electron-beam source and the source comprises single crystal aluminum oxide.
Claim 3
Dependent Claim
24 words
The process of claim 1 in which the oxygen content of the gas in the vacuum chamber is greater than 60 percent by volume.
Claim 4
Dependent Claim
24 words
The process of claim 2 in which the oxygen content of the gas in the vacuum chamber is greater than 90 percent by volume.
Claim 5
Dependent Claim
17 words
The process of claim 3 in which the gas in the vacuum chamber consists essentially of oxygen.
Claim 6
Dependent Claim
19 words
The process of claim 1 in which the pressure in the vacuum chamber is less than 10 -4 Torr.
Claim 7
Dependent Claim
15 words
The process of claim 8 in which the pressure is less than 10 -5 Torr.
Claim 8
Dependent Claim
39 words
The process of claim 1 in which a gas consisting of at least 30 percent oxygen in admitted into the vacuum chamber near the surface being coated, and the flow of gas is directed toward the surface being coated.
Claim 9
Dependent Claim
13 words
The process of claim 7 in which the gas consists essentially of oxygen.
Claim 10
Dependent Claim
25 words
The process of claim 8 in which the gas is admitted into the vacuum chamber at a rate from 0.01 to 10 milliliters per minute.
Claim 11
Dependent Claim
17 words
The process of claim 9 in which the rate is from 0.03 to 3.0 milliliters per minute.
Claim 12
Dependent Claim
20 words
The process of claim 1 in which the optical surface is at a temperature between 50 and 250 degrees C.
Claim 13
Dependent Claim
17 words
The process of claim 11 in which the temperature range is from 50 to 160 degrees C.
Claim 14
Dependent Claim
14 words
The process of claim 1 in which the optical device is a light-emitting diode.
Claim 15
Dependent Claim
14 words
The process of claim 1 in which the optical device is an optical detector.
Claim 16
Dependent Claim
13 words
The process of claim 1 in which the optical device is a laser.
Claim 17
Dependent Claim
19 words
The process of claim 1 in which the radiation is in the wavelength range from 0.5 to 2.0 μm.
Claim 18
Dependent Claim
16 words
The process of claim 16 in which the wavelength range is from 0.8 to 1.6 μm.
Claim 19
Dependent Claim
16 words
The process of claim 17 in which the wavelength range is from 1.2 to 1.6 μm.
Claim 20
Dependent Claim
15 words
The process of claim 1 in which the optical surface consists essentially of indium phosphide.
Claim 21
Dependent Claim
13 words
The process of claim 19 in which the optical device is a photodetector.
Claim 22
Dependent Claim
14 words
The process of claim 19 in which the optical device is a light-emitting diode.
Claim 23
Dependent Claim
13 words
The process of claim 1 in which the coating is an anti-reflection coating.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-10-13 | 1990-04-14 | 1990-10-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-10-13 | 1994-04-14 | 1994-10-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-10-13 | 1998-04-14 | 1998-10-14 | $7700.00 | Window Closed / Lapsed |