Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
161 words
Apparatus for providing a tightly adherent coating on a substrate comprising a first chamber, means for providing an ionizable gas to the first chamber, a cathode comprising the substrate in the first chamber, a second chamber adjacent to the first chamber, a wall between the first chamber and the second chamber, an anode comprising a supply of the coating material, an exposed surface portion of the material being in the first chamber and spaced from the cathode, a source of electrons in the second chamber, means for directing electrons from the source in a beam through an opening in the wall and on to the exposed surface portion of the anode, said second chamber being fluid-tight except at the opening in the wall, said opening closely conforming to the cross section of the beam of electrons passing through it. means for substantially evacuating the second chamber, and means for providing the cathode with a negative electric potential relative to the anode.
Claim 2
Dependent Claim
161 words
Apparatus for providing a tightly adherent coating on a substrate comprising a first chamber, means for providing an ionizable gas to the first chamber, a cathode comprising the substrate in the first chamber, a second chamber adjacent to the first chamber, a wall between the first chamber and the second chamber, an anode comprising a supply of the coating material, an exposed surface portion of the material being in the first chamber and spaced from the cathode, a source of electrons in the second chamber, means for directing electrons from the source in a beam through an opening in the wall and on to the exposed surface portion of the anode, said second chamber being fluid-tight except at the opening in the wall, said opening closely conforming to the cross section of the beam of electrons passing through it. means for substantially evacuating the second chamber, and means for providing the cathode with a negative electric potential relative to the anode.
Claim 3
Dependent Claim
15 words
Apparatus as in claim 1, wherein the electron directing means comprises an electron beam gun.
Claim 4
Dependent Claim
67 words
Apparatus as in claim 2, wherein the gun directs the electron beam initially in a direction approximately parallel to the wall and away from the exposed anode surface portion, bends the beam through approximately one right angle to pass through the opening, and then bends it through approximately two more right angles to strike the exposed anode surface portion in a direction approximately perpendicular to the wall.
Claim 5
Dependent Claim
20 words
Apparatus as in claim 3, wherein the exposed anode surface portion is approximately planar and generally parallel to the wall.
Claim 6
Dependent Claim
29 words
Apparatus as in claim 4, comprising also deflection means for causing the electron beam to scan a substantial area of the exposed anode surface portion in a predetermined manner.
Claim 7
Dependent Claim
17 words
Apparatus as in claim 4, wherein the substrate is positioned substantially opposite the exposed anode surface portion.
Claim 8
Dependent Claim
27 words
Apparatus as in claim 2, wherein the pressure in the second chamber is maintained at less than about 10 3 torr during operation of the electron gun.
Claim 9
Dependent Claim
29 words
Apparatus as in claim 4, comprising also means for maintaining the exposed anode surface portion at a predetermined location as material is evaporated therefrom during coating of the substrate.
Claim 10
Dependent Claim
48 words
Apparatus as in claim 1, wherein the substrate is supported by a portion of the housing of the first chamber, the support including an insulative connecting member and a conductive barrier substantially surrounding the insulative member to prevent any substantial deposition of coating material on the insulative member.
Claim 11
Dependent Claim
19 words
Apparatus as in claim 1, wherein the gas provided to the first chamber is nitrogen or an inert gas.
Claim 12
Dependent Claim
15 words
Apparatus as in claim 1, wherein the gas provided to the first chamber is argon.
Claim 13
Dependent Claim
29 words
Apparatus as in claim 1, wherein including means to maintain the pressure in the first chamber at about 5 to 50 microns of mercury during coating of the substrate.
Claim 14
Dependent Claim
20 words
Apparatus as in claim 1, wherein the negative electric potential provided at the cathode is about 1 to 5 kilovolts.