US5124180A
Expired / Lapsed
US
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Method for the formation of fluorine doped metal oxide films
Assignee: BTU International Inc
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Filing: 1991-03-11
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Granted: 1992-06-23
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Expires: 2011-03-11
Abstract
Abstract The invention relates to a method of producing a substantially haze free, fluorine doped metal oxide coating on a substrate such as glass. The method includes the steps of heating a surface of the substrate to be coated, contacting the surface with a vapor including a metal oxide precursor, an oxidizing agent, and a dopant containing a chemically reactive vinylic fluorine atom, and thermally oxidizing the vapor into a fluorine containing metal oxide film. Another feature of the invention is an apparatus for producing a uniform, substantially haze free, fluorine containing metal oxide thin film coating on a substrate such as glass. The apparatus includes a heater to heat the substrate to between approximately 450° and 600° C. and a conveyor to convey the heated substrated to a reaction zone adjacent an injector head. The injector head produces a vapor containing a metal oxide precursor, an oxidizing agent, and a dopant containing a chemically reactive vinylic fluorine atom. The vapor is oxidized into a fluorine containing metal oxide coating on the substrate.
Inventors
- 👤 James W. Proscia
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 12:55
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/407; C03; C03C; C03C17/00; C03C17/001; C03C17/002; C03C17/22; C03C17/23; C03C17/245; H; H10; H10F; H10F71/00; H10F71/138; C03C2217/00; C03C2217/20; C03C2217/21; C03C2217/211; C03C2217/24; C03C2217/241; C03C2218/00; C03C2218/10; C03C2218/15; C03C2218/152; Y; Y02; Y02E; Y02E10/00; Y02E10/50
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
58 words
A method of producing a substantially haze free fluorine doped metallic oxide coating on a substrate comprising the steps of: heating a surface of the substrate; contacting said surface with a vapor comprising: a metal oxide precursor, an oxygen containing agent; a dopant containing a vinylic fluorine; and thermally reacting said vapor into a fluorine containing metal oxide.
Claim 2
Independent Claim
58 words
A method of producing a substantially haze free fluorine doped metallic oxide coating on a substrate comprising the steps of: heating a surface of the substrate; contacting said surface with a vapor comprising: a metal oxide precursor, an oxygen containing agent; a dopant containing a vinylic fluorine; and thermally reacting said vapor into a fluorine containing metal oxide.
Claim 3
Dependent Claim
27 words
The method of claim 1 wherein the step of heating the surface causes the temperature of said surface to reach between approximately 450° C. and 600° C.
Claim 4
Dependent Claim
14 words
The method of claim 1 wherein said metal oxide precursor is a tin halide.
Claim 5
Dependent Claim
12 words
The method of claim 3 wherein said tin halide is tin tetrachloride.
Claim 6
Dependent Claim
14 words
The method of claim 4 wherein said oxygen containing agent is a hydroxylated compound.
Claim 7
Dependent Claim
11 words
The method of claim 5 herein said hydroxylated compound is water.
Claim 8
Dependent Claim
15 words
The method of claim 5 wherein said hydroxylated compound is a low molecular weight alcohol.
Claim 9
Dependent Claim
12 words
The method of claim 1 wherein said vinylic fluorine dopant is chlorotrifluoroethylene.
Claim 10
Dependent Claim
12 words
The method of claim 1 wherein said vinylic fluorine dopant is difluoroethylene.
Claim 11
Dependent Claim
14 words
The method of claim 1 wherein said metallic oxide precursor is an organo-tin compound.
Claim 12
Dependent Claim
12 words
The method of claim 10 wherein said organo-tin compound is tetramethyl tin.
Claim 13
Dependent Claim
12 words
The method of claim 10 wherein said oxygen containing agent is oxygen.
Claim 14
Dependent Claim
14 words
The method of claim 1 wherein said metallic oxide precursor is an organo-tin halide.
Claim 15
Dependent Claim
23 words
The method of claim 13 wherein said oxygen containing agent is one of the group comprising oxygen, water and low molecular weight alcohols.
Claim 16
Independent Claim
54 words
A method of providing a tin oxide thin film layer on a substrate comprising the steps of: heating a surface of the substrate; contacting said surface with a vapor comprising: a tin chloride, an hydroxylated compound; and a dopant containing a vinylic fluorine; and thermally reacting said vapor into a fluorine containing metal oxide.
Claim 17
Independent Claim
54 words
A method of providing a tin oxide thin film layer on a substrate comprising the steps of: heating a surface of the substrate; contacting said surface with a vapor comprising: a tin chloride, an hydroxylated compound; and a dopant containing a vinylic fluorine; and thermally reacting said vapor into a fluorine containing metal oxide.
Claim 18
Dependent Claim
11 words
The method of claim 15 wherein said hydroxylated compound is water.
Claim 19
Dependent Claim
12 words
The method of claim 15 wherein said hydroxylated compound is an alcohol.
Claim 20
Independent Claim
77 words
A method of producing a high conductivity fluorine containing titanium oxide layer on a substrate comprising the steps of: heating a surface of the substrate; contacting said surface with a first vapor comprising: tin tetrachloride and a dopant containing a vinylic fluorine; and a second vapor comprising an hydroxylated compound; and mixing said first vapor and second vapor near the surface of the substrate, and thermally reacting said vapor into a fluorine containing titanium oxide thin film.
Claim 21
Independent Claim
77 words
A method of producing a high conductivity fluorine containing titanium oxide layer on a substrate comprising the steps of: heating a surface of the substrate; contacting said surface with a first vapor comprising: tin tetrachloride and a dopant containing a vinylic fluorine; and a second vapor comprising an hydroxylated compound; and mixing said first vapor and second vapor near the surface of the substrate, and thermally reacting said vapor into a fluorine containing titanium oxide thin film.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1995-06-23 | 1995-12-23 | 1996-06-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-06-23 | 1999-12-23 | 2000-06-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-06-23 | 2003-12-23 | 2004-06-23 | $7700.00 | Window Closed / Lapsed |