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US5108935A Expired / Lapsed US ⏱️ 0.0 years remaining

Reduction of hot carrier effects in semiconductor devices by controlled scattering via the intentional introduction of impurities

Assignee: Texas Instruments Inc
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Filing: 1990-11-16
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Granted: 1992-04-28
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Expires: 2010-11-16
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Abstract

Abstract This invention discloses a method for reducing hot carriers in a transistor structure by means of increasing the scattering rate of the carriers. The increased scattering rate is accomplished by introducing scattering sites comprising of non-conventional dopants, an element which is not boron, phosphorous, or arsenic, into the base or channel region of a transistor.

Inventors

  • 👤 Mark S. Rodder

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-27 20:01
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/01; H10D30/021; H10D30/0221; H10D62/00; H10D62/80; H10D62/83; H10D62/834; Y; Y10; Y10S; Y10S438/00; Y10S438/914; Y10S438/918

Claims Analysis

Total Claims: 5
Claim 1
Independent Claim 38 words
A method of fabricating a transistor with reduced hot carrier generation, said method comprising: introducing scattering sites comprised of non-conventional dopants into regions of said transistor, wherein the scattering sites are introduced by in-situ introduction during material deposition.
Claim 2
Independent Claim 38 words
A method of fabricating a transistor with reduced hot carrier generation, said method comprising: introducing scattering sites comprised of non-conventional dopants into regions of said transistor, wherein the scattering sites are introduced by in-situ introduction during material deposition.
Claim 3
Dependent Claim 28 words
The method of claim 1, wherein said transistor is selected from the group consisting of: vertical bipolar junction transistor, lateral bipolar junction transistor, vertical MOSFET, or lateral MOSFET.
Claim 4
Dependent Claim 29 words
The method of claim 1, wherein said transistor region is selected from the group consisting of: the base region, the channel region, and a portion of the channel region.
Claim 5
Dependent Claim 26 words
The method of claim 1, wherein concentration of said scattering sites is greater than 10 17 cm 3 but less than 10 20 cm 3 .

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1995-04-28 1995-10-28 1996-04-28 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1999-04-28 1999-10-28 2000-04-28 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2003-04-28 2003-10-28 2004-04-28 $7700.00 Window Closed / Lapsed

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