US5084371A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Positive-working, radiation-sensitive mixture based on acid-cleavable and photochemically acid-forming compounds, and the production of relief patterns and relief images
Assignee: BASF SE
•
Filing: 1989-04-14
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Granted: 1992-01-28
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Expires: 2009-04-14
Abstract
Abstract A positive-working, radiation-sensitive mixture and a process for the production of relief images. The radiation-sensitive mixture contains (a) a water-insoluble polymeric binder which is soluble or at least dispersible in aqueous alkaline solutions and (b) an organic compound whose solubility in an aqueous alkaline developer is increased by the action of an acid and which contains one or more acid-cleavable groups and in addition a further group which produces a strong acid on exposure to radiation, the polymeric binder (a) consisting a mixture of a phenolic polymer and a resin of the novolak type. The novel mixture is particularly suitable for the production of photoresists.
Inventors
- 👤 Reinhold Schwalm
- 👤 Horst Binder
- 👤 Rudolf Schuhmacher
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 02:49
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/0045
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
96 words
A radiation-sensitive mixture which contains (a) a water-insoluble binder which is soluble or at least dispersible in aqueous alkaline solutions and (b) organic compound whose solubility in an aqueous alkaline developer is increased by the action of an acid and which contains one or more acid-cleavable groups and in addition a further group which produces a strong acid on exposure to radiation, wherein the polymeric binder (a) contains a mixture of a phenolic polymer having a molecular weight of from 1,000 to 250,000 and a novolak resin having a molecular weight of from 300 to 20,000.
Claim 2
Dependent Claim
96 words
A radiation-sensitive mixture which contains (a) a water-insoluble binder which is soluble or at least dispersible in aqueous alkaline solutions and (b) organic compound whose solubility in an aqueous alkaline developer is increased by the action of an acid and which contains one or more acid-cleavable groups and in addition a further group which produces a strong acid on exposure to radiation, wherein the polymeric binder (a) contains a mixture of a phenolic polymer having a molecular weight of from 1,000 to 250,000 and a novolak resin having a molecular weight of from 300 to 20,000.
Claim 3
Dependent Claim
25 words
The radiation-sensitive mixture as claimed in claim 1, wherein the phenolic polymer of component (a) is poly-(p-hydroxystyrene), poly-(p-hydroxy-α-methylstyrene) or a copolymer of p-hydroxystyrene and p-hydroxy-α-methylstyrene.
Claim 4
Dependent Claim
30 words
The radiation-sensitive mixture as claimed in claim 1, wherein the resin of the novolak type of component (a) is a p-alkylphenyl/formaldehyde novolak resin or a predominantly o,o'-bonded phenol/formaldehyde novolak resin.
Claim 5
Dependent Claim
87 words
The radiation-sensitive mixture as claimed in claim 1, wherein the organic compound (b) is a sulfonium salt of the general formula (I) ##STR6## where R 1 to R 3 are identical or different and are aliphatic and/or aromatic radicals which may contain heteroatoms, or two of the radicals R to R: are bonded to one another to form a ring, with the proviso that one or more of the radicals R 1 to R 3 contain one or more acid-cleavable groups, and X⊖ is a non-nucleophilic counter-ion.
Claim 6
Dependent Claim
92 words
The radiation-sensitive mixture as claimed in claim 1, which contains (a 1 ) from 40 to 90% by weight of the phenolic polymer, (a 2 ) from 5 to 40% by weight of a novolak resin and (b) from 5 to 20% by weight of a sulfonium salt of the formula (I), with the proviso that the sum of the percentages stated under (a 1 ), (a 2 ) and (b) is 100, and the solids content of the mixture in an organic solvent may be from 5 to 40% by weight.
Claim 7
Dependent Claim
66 words
A process for the production of a relief pattern or relief image, which process comprises applying the radiation-sensitive mixture of claim 1 to a substrate, heating to remove residual solvent, subjecting the mixture to imagewise exposure, heating to 60°-120° C., and treating the mixture with an alkaline or polar solvent to remove the material in the exposed areas while leaving the material in the unexposed areas.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-01-27 | 1995-07-29 | 1996-01-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-01-27 | 1999-07-29 | 2000-01-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-01-27 | 2003-07-29 | 2004-01-28 | $7700.00 | Window Closed / Lapsed |