Photosolubilizable composition

Claim 2

A photosolubilizable composition containing (a) a first compound capable of producing an acid by irradiation with actinic radiation and (b) a high molecular weight compound, whose solubility in a developing solution is increased by the action of an acid, said high molecular weight compound incorporating at least 1 mol% of a monomer unit represented by formula (I) ##STR8## wherein R 1 represents a hydrogen atom, a halogen atom or an alkyl group; R 2 , R 3 , and R 4 each represents a hydrogen atom, an alkyl group, an aryl group or --OR 5 ; R 5 represents an alkyl group or an aryl group; and

Claim 3

A represents a single chemical bond, --O--R 6 --CO-- or ##STR9## wherein R 6 represents a divalent aliphatic or aromatic hydrocarbon residue; and R 7 represents a hydrogen atom, an alkyl group, an aryl group or --CO--R 8 , wherein R 8 represents an alkyl group or an aryl group; provided that at least one of R 2 , R 3 and R 4 represents a group other than the group consisting of a hydrogen atom, a methyl group or --OR 5 .

Claim 4

A represents a single chemical bond, --O--R 6 --CO-- or ##STR9## wherein R 6 represents a divalent aliphatic or aromatic hydrocarbon residue; and R 7 represents a hydrogen atom, an alkyl group, an aryl group or --CO--R 8 , wherein R 8 represents an alkyl group or an aryl group; provided that at least one of R 2 , R 3 and R 4 represents a group other than the group consisting of a hydrogen atom, a methyl group or --OR 5 .

Claim 5

A photosolubilizable composition as in claim 1, wherein R 1 represents a hydrogen atom, or an alkyl group.

Claim 6

A photosolubilizable composition as in claim 1, wherein R 1 represents a hydrogen atom or a methyl group.

Claim 7

A photosolubilizable composition as in claim 1, wherein said first compound (a) is orthoquinonediazidosulfonyl chloride, an s-triazine derivative substituted by a halomethyl group, or an oxadiazole derivative substituted by a halomethyl group.

Claim 8

A photosolubilizable composition as in claim 1, wherein said high molecular weight compound (b) is a copolymer composed of the monomer unit represented by formula (I) and an ethylenically unsaturated compound.

Claim 9

A photosolubilizable composition as in claim 1, wherein said high molecular weight compound (b) has a weight average molecular weight of from 1,000 to 1,000,000.

Claim 10

A photosolubilizable composition as in claim 6, wherein said high molecular weight compound (b) has a weight average molecular weight of from 5,000 to 1,000,000.

Claim 11

A photosolubilizable composition as in claim 1, wherein the weight ratio of the first compound (a) to the high molecular weight compound (b) is from 0.001/1 to 2/1.

Claim 12

A photosolubilizable composition as in claim 8, wherein the weight ratio of the first compound (a) to the high molecular weight compound (b) is from 0.01/1 to 0.8/1.

Claim 13

A photosolubilizable composition as in claim 1, wherein said composition further contains an alkali-soluble resin.

Claim 14

A photosolubilizable composition as in claim 10, wherein said alkali-soluble resin is present in an amount of from 10 to 90% by weight based on the total weight of the composition.

Claim 15

A photosolubilizable composition containing a high molecular weight compound, whose solubility in a developing solution is increased by irradiation with actinic radiation, said high molecular weight compound incorporating at least one monomer unit represented by formula (I) ##STR10## wherein R 1 represents a hydrogen atom, a halogen atom or an alkyl group; R 2 , R 3 , and R 4 each represents a hydrogen atom, an alkyl group, an aryl group, or --OR 5 ; R 5 represents an alkyl group or an aryl group; and A represents a single chemical bond, ##STR11## wherein R 6 represents a divalent aliphatic or aromatic hydrocarbon residue; and R 7 represents a hydrogen atom, an alkyl group, an aryl group or --CO--R 8 , wherein R 8 represents an alkyl group or an aryl group; provided that at least one of R 2 , R 3 and R 4 represents a group other that the group consisting of a hydrogen atom, a methyl group or --OR 5 ; and at least one monomer unit represented by formula (II) ##STR12## wherein R 1 and A are the same as defined above; and Z represents a group capable of producing an acid by irradiation with actinic radiation.

Claim 16

A photosolubilizable composition containing a high molecular weight compound, whose solubility in a developing solution is increased by irradiation with actinic radiation, said high molecular weight compound incorporating at least one monomer unit represented by formula (I) ##STR10## wherein R 1 represents a hydrogen atom, a halogen atom or an alkyl group; R 2 , R 3 , and R 4 each represents a hydrogen atom, an alkyl group, an aryl group, or --OR 5 ; R 5 represents an alkyl group or an aryl group; and A represents a single chemical bond, ##STR11## wherein R 6 represents a divalent aliphatic or aromatic hydrocarbon residue; and R 7 represents a hydrogen atom, an alkyl group, an aryl group or --CO--R 8 , wherein R 8 represents an alkyl group or an aryl group; provided that at least one of R 2 , R 3 and R 4 represents a group other that the group consisting of a hydrogen atom, a methyl group or --OR 5 ; and at least one monomer unit represented by formula (II) ##STR12## wherein R 1 and A are the same as defined above; and Z represents a group capable of producing an acid by irradiation with actinic radiation.

Claim 17

A photosolubilizable composition as in claim 12, wherein R 1 represents a hydrogen atom, or an alkyl group.

Claim 18

A photosolubilizable composition as in claim 12, wherein R 1 represents a hydrogen atom, or a methyl group.

Claim 19

A photosolubilizable composition as in claim 12, wherein Z in formula (II) is a group containing an s-triazine unit substituted with a trihalomethyl group or a group containing an oxadiazole unit substituted with a trihalomethyl group.

Claim 20

A photosolubilizable composition as in claim 12, wherein a molar ratio of the monomer unit represented by formula (I) to the monomer unit represented by formula (II) is from 1/0.0001 to 1/10.

Claim 21

A photosolubilizable composition as in claim 12, wherein the molar ratio of the monomer unit of formula (I) to the monomer unit of formula (II) is from 1/0.005 to 1/0.5.

Claim 22

A photosolubilizable composition as in claim 12, wherein said high molecular weight compound has a weight average molecular weight of from 1,000 to 1,000,000.

Claim 23

A photosolubilizable composition as in claim 12, wherein said high molecular weight compound has a weight average molecular weight of from 5,000 to 1,000,000.

Claim 24

A photosolubilizable composition as in claim 12, wherein said composition further contains an alkali-soluble resin.

Claim 25

A photosolubilizable composition as in claim 20, wherein said alkali-soluble resin is present in an amount of from 10 to 90% by weight based on the total weight of the composition.