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US5061870A
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US
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Surface acoustic wave device
Assignee: Murata Manufacturing Co Ltd
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Filing: 1990-07-06
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Granted: 1991-10-29
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Expires: 2010-07-06
Abstract
Abstract A surface accoustic wave device includes a substrate which is made up of single-crystalline dielectric member and a piezoelectric thin film epitaxially grown thereon. An aluminum electrode defining an interdigital electrode is formed along the interface between the dielectric member and the piezoelectric thin film. This aluminum electrode is formed of an aluminum film which is crystallographically oriented in a constant direction, whereby stressmigration of the aluminum electrode is suppressed, while enabling epitaxial growth of the piezoelectric thin film over the entire surface insert.
Inventors
- 👤 Hideharu Ieki
- 👤 Atsushi Sakurai
- 👤 Koji Kimura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 21:02
CPC Classifications
H; H03; H03H; H03H9/00; H03H9/25; H03H3/00; H03H3/007; H03H3/08; H03H9/02; H03H9/02535; H03H9/02543; H03H9/02582; H03H9/125; H03H9/145; H03H9/14538
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
60 words
A surface acoustic wave device comprising: a substrate comprising a single-crystalline dielectric member having a surface and a piezoelectric thin film epitaxially grown on said surface of said dielectric member; and electrode means formed along the interface between said dielectric member and said piezoelectric thin film, said electrode means including an aluminum film being crystallographically oriented in a constant direction.
Claim 2
Dependent Claim
60 words
A surface acoustic wave device comprising: a substrate comprising a single-crystalline dielectric member having a surface and a piezoelectric thin film epitaxially grown on said surface of said dielectric member; and electrode means formed along the interface between said dielectric member and said piezoelectric thin film, said electrode means including an aluminum film being crystallographically oriented in a constant direction.
Claim 3
Dependent Claim
53 words
A surface acoustic wave device in accordance with claim 1, wherein said single-crystalline dielectric member is formed of an element selected from the group consisting of silicon, sapphire, diamond and quartz crystal, and said piezoelectric thin film is formed of a material selected from the group consisting of zinc oxide and aluminum nitride.
Claim 4
Dependent Claim
88 words
A surface acoustic wave device comprising: a substrate comprising a single-crystalline dielectric member having a surface and a piezoelectric thin film epitaxially grown on said surface of aid dielectric member; and electrode means formed along the interface between said dielectric member and said piezoelectric thin film, said electrode means including an aluminum film being crystallographically oriented in a constant direction; wherein aid single-crystalline dielectric member is formed of sapphire, said piezoelectric thin film is formed of zinc oxide, and said aluminum film is a (311) plane oriented film.
Claim 5
Dependent Claim
88 words
A surface acoustic wave device comprising: a substrate comprising a single-crystalline dielectric member having a surface and a piezoelectric thin film epitaxially grown on said surface of aid dielectric member; and electrode means formed along the interface between said dielectric member and said piezoelectric thin film, said electrode means including an aluminum film being crystallographically oriented in a constant direction; wherein aid single-crystalline dielectric member is formed of sapphire, said piezoelectric thin film is formed of zinc oxide, and said aluminum film is a (311) plane oriented film.
Claim 6
Dependent Claim
40 words
A surface acoustic wave device in accordance with claim 1, claim 2 or claim 3 wherein said aluminum film contains an admixture formed of at least one element selected from the group consisting of Cu, Ti, Ni, Mg and Pd.
Claim 7
Dependent Claim
24 words
A surface acoustic wave device in accordance with claim 4, wherein said aluminum film contains 0.1 to 10 percent by weight of said admixture.
Claim 8
Dependent Claim
113 words
A surface acoustic wave device comprising: a substrate comprising a single-crystalline dielectric member having a surface and a piezoelectric thin film epitaxially grown on said surface of said dielectric member; and electrode means formed along the interface between said dielectric member and said piezoelectric thin film, said electrode means including an aluminum film being crystallographically oriented in a constant direction, said single-crystalline dielectric member being formed of an element selected from the group consisting of silicon, sapphire, diamond and quartz crystal, said piezoelectric thin film being formed of a material selected from the group consisting of zinc oxide and aluminum nitride, and said aluminum film being formed of a (311) plane oriented film.
Claim 9
Dependent Claim
113 words
A surface acoustic wave device comprising: a substrate comprising a single-crystalline dielectric member having a surface and a piezoelectric thin film epitaxially grown on said surface of said dielectric member; and electrode means formed along the interface between said dielectric member and said piezoelectric thin film, said electrode means including an aluminum film being crystallographically oriented in a constant direction, said single-crystalline dielectric member being formed of an element selected from the group consisting of silicon, sapphire, diamond and quartz crystal, said piezoelectric thin film being formed of a material selected from the group consisting of zinc oxide and aluminum nitride, and said aluminum film being formed of a (311) plane oriented film.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-10-28 | 1995-04-29 | 1995-10-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-10-28 | 1999-04-29 | 1999-10-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-10-28 | 2003-04-29 | 2003-10-29 | $7700.00 | Window Closed / Lapsed |