US4775814A
Expired / Lapsed
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Saw device
Assignee: Hitachi Ltd
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Filing: 1987-05-19
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Granted: 1988-10-04
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Expires: 2007-05-19
Abstract
Abstract In a SAW device comprising a piezoelectric substrate and at least one set of metallic electrodes formed on the piezoelectric substrate, at least one set of the electrodes have a laminated structure comprised of a layer of an aluminum film added with an impurity at a concentration of 6 wt. % or less and another layer of a film of pure aluminum or aluminum added with an impurity at a concentration of 0.4 wt. % or less. The SAW device having the laminated structure of electrodes can handle high frequency electric signals of higher power and/or larger amplitudes.
Inventors
- 👤 Akitsuna Yuhara
- 👤 Jun Sasaki
- 👤 Tetsuya Hirashima
- 👤 Jun Yamada
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 12:18
CPC Classifications
H; H03; H03H; H03H3/00; H03H3/007; H03H3/08; H03H9/00; H03H9/02; H03H9/02535; H03H9/02818; H03H9/02929; H03H9/125; H03H9/145; H03H9/14538; H03H9/14541
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
59 words
A SAW device comprising a piezoelectric substrate and sets of finger electrodes disposed on said piezoelectric substrate, at least one set of said electrodes having a laminated structure including a first layer of an aluminum film and a second layer of an aluminum film which is disposed in laminated relationship with said first layer and including with an impurity.
Claim 2
Dependent Claim
59 words
A SAW device comprising a piezoelectric substrate and sets of finger electrodes disposed on said piezoelectric substrate, at least one set of said electrodes having a laminated structure including a first layer of an aluminum film and a second layer of an aluminum film which is disposed in laminated relationship with said first layer and including with an impurity.
Claim 3
Dependent Claim
26 words
A SAW device according to claim 1, wherein the impurity is added to said second layer at a positive concentration of 6 wt. % or less.
Claim 4
Dependent Claim
69 words
A SAW device comprising a piezoelectric substrate and sets of finger electrodes disposed on said piezoelectric substrate, at least one set of said electrodes having a laminated structure including a first layer of an aluminum film and a second layer of an aluminum film which is disposed in laminated relationship with said first layers and including an impurity selected from the group consisting of titanium, chromium, vanadium and manganese.
Claim 5
Dependent Claim
69 words
A SAW device comprising a piezoelectric substrate and sets of finger electrodes disposed on said piezoelectric substrate, at least one set of said electrodes having a laminated structure including a first layer of an aluminum film and a second layer of an aluminum film which is disposed in laminated relationship with said first layers and including an impurity selected from the group consisting of titanium, chromium, vanadium and manganese.
Claim 6
Dependent Claim
79 words
A SAW device comprising a piezoelectric substrate and sets of finger electrodes disposed on said piezoelectric substrate, at least one set of said electrodes having a laminated structure including a first layer of an aluminum film and a second layer of an aluminum film which is disposed in laminated relationship with said first layer and including an impurity selected from the group consisting of titanium, chromium, vanadium and manganese, at a positive concentration of 6 wt. % or less.
Claim 7
Dependent Claim
79 words
A SAW device comprising a piezoelectric substrate and sets of finger electrodes disposed on said piezoelectric substrate, at least one set of said electrodes having a laminated structure including a first layer of an aluminum film and a second layer of an aluminum film which is disposed in laminated relationship with said first layer and including an impurity selected from the group consisting of titanium, chromium, vanadium and manganese, at a positive concentration of 6 wt. % or less.
Claim 8
Dependent Claim
39 words
A SAW device accoring to claim 1, wherein the aluminum film of said first layer includes an impurity selected from the group consisting of titanium, copper, magnesium, zinc and nickel, at a concentration of 0.4 wt. % or less.
Claim 9
Dependent Claim
39 words
A SAW device according to claim 2, wherein the aluminum film of said first layer includes an impurity selected from the group consisting of titanium, copper, magnesium, zinc and nickel, at a concentration of 0.4 wt. % or less.
Claim 10
Dependent Claim
39 words
A SAW device according to claim 3, wherein the aluminum film of said first layer includes an impurity selected from the group consisting of titanium, copper, magnesium, zinc and nickel, at a concentration of 0.4 wt. % or less.
Claim 11
Dependent Claim
39 words
A SAW device according to claim 4, wherein the aluminum film of said first layer includes an impurity selected from the group consisting of titanium, copper, magnesium, zinc and nickel, at a concentration of 0.4 wt. % or less.
Claim 12
Dependent Claim
24 words
A SAW device according to claim 1, wherein the overall film thickness of said first layer is larger than that of said second layer.
Claim 13
Dependent Claim
24 words
A SAW device according to claim 3, wherein the overall film thickness of said first layer is larger than that of said second layer.
Claim 14
Dependent Claim
24 words
A SAW device according to claim 4, wherein the overall film thickness of said first layer is larger than that of said second layer.
Claim 15
Dependent Claim
24 words
A SAW device according to claim 5, wherein the overall film thickness of said first layer is larger than that of said second layer.
Claim 16
Dependent Claim
24 words
A SAW device according to claim 6, wherein the overall film thickness of said first layer is larger than that of said second layer.
Claim 17
Dependent Claim
24 words
A SAW device according to claim 7, wherein the overall film thickness of said first layer is larger than that of said second layer.
Claim 18
Dependent Claim
24 words
A SAW device according to claim 8, wherein the overall film thickness of said first layer is larger than that of said second layer.
Claim 19
Dependent Claim
75 words
A SAW device comprising a piezoelectric substrate and sets of finger electrodes disposed on said substrate, at least one set of said electrodes having a laminated structure made up of a plurality of layers including at least one of a first layer type of an aluminum film and at least one of a second layer type of an aluminum film which includes an impurity selected from the group consisting of titanium, chromium, vanadium and manganese.
Claim 20
Dependent Claim
75 words
A SAW device comprising a piezoelectric substrate and sets of finger electrodes disposed on said substrate, at least one set of said electrodes having a laminated structure made up of a plurality of layers including at least one of a first layer type of an aluminum film and at least one of a second layer type of an aluminum film which includes an impurity selected from the group consisting of titanium, chromium, vanadium and manganese.
Claim 21
Dependent Claim
53 words
A SAW device according to claim 16, wherein said laminated structure includes a first layer of said first layer type formed on said substrate and a second layer of said second layer type formed on said first layer, the thickness of said first layer being greater than the thickness of said second layer.
Claim 22
Dependent Claim
53 words
A SAW device according to claim 16, wherein said laminated structure includes a first layer of said second layer type formed on said substrate and a second layer of said first layer type formed on said first layer, the thickness of said second layer being greater than the thickness of said first layer.
Claim 23
Dependent Claim
69 words
A SAW device according to claim 16, wherein said laminated structure includes a first layer of said first layer type formed on said substrate, a second layer of said second layer type formed on said first layer, and a third layer of said first layer type formed on said second layer, the combined thickness of said first and third layers being greater than the thickness of said second layer.
Claim 24
Dependent Claim
69 words
A SAW device according to claim 16, wherein said laminated structure includes a first layer of said second layer type formed on said substrate, a second layer of said first layer type formed on said first layer, and a third layer of said second layer type formed on said second layer, the thickness of said second layer being greater than the combined thickness of said first and third layers.
Claim 25
Dependent Claim
85 words
A SAW device according to claim 16, wherein said laminated structure includes a first layer of said first layer type formed on said substrate, a second layer of said second layer type formed on said first layer, a third layer of said first layer type formed on said second layer, and a fourth layer of said second layer type formed on said third layer, the combined thickness of said first and third layers being greater than the combined thickness of said second and fourth layers.
Claim 26
Dependent Claim
27 words
A SAW device according to claim 17, wherein said first layer type includes an impurity selected from the group consisting of titanium, copper, magnesium, zinc and nickel.
Claim 27
Dependent Claim
20 words
A SAW device according to claim 22, wherein said first layer includes first and second sublayers having different impurity concentrations.
Claim 28
Dependent Claim
33 words
A SAW device according to claim 22, wherein said first layer includes first and second sublayers having different impurity concentrations, and said second layer includes first and second sublayers having different impurity concentrations.
Claim 29
Dependent Claim
20 words
A SAW device according to claim 17, wherein said second layer has first and second sublayers having different impurity concentrations.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1991-10-04 | 1992-04-04 | 1992-10-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-10-04 | 1996-04-04 | 1996-10-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-10-04 | 2000-04-04 | 2000-10-04 | $7700.00 | Window Closed / Lapsed |