US4968954A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Epitaxial layer-bearing wafer of rare earth gallium garnet for MSW device
Assignee: Shin-Etsu Chemical Co Ltd
•
Filing: 1989-05-18
•
Granted: 1990-11-06
•
Expires: 2009-05-18
Abstract
Abstract An improved epitaxial single crystal wafer suitable as a working element of magnetostatic wave devices is proposed which comprises a substrate single crystal wafer of a rare earth gallium garnet, e.g., gadolinium gallium garnet, neodymium gallium garnet and samarium gallium garnet, and an epitaxial layer formed thereon having a chemical composition, different from conventional yttrium iron garnet, Y 3 Fe 5 O 12 , of the formula (Y.sub.1-x M.sub.x).sub.a Fe.sub.8-a O.sub.12 or (Y.sub.1-x M.sub.x).sub.a (Fe 1-Y Q y ) 8-a O 12 , in which M is an element selected from the group consisting of bismuth, lanthanum, gadolinium and lutetium, the subscript a is a positive number in the range from 3.0 to 3.1, the subscript x is a positive number in the range from 0.01 to 0.9, Q is an element selected from the group consisting of aluminum, gallium, indium and scandium and the subscript y is a positive number in the range from 0.1 to 0.2. These epitaxial wafers are advantageous in respect of the greatly decreased problem of mismatching in the lattice constants between the substrate and the epitaxial layer.
Inventors
- 👤 Toshihiko Ryuo
- 👤 Satoru Fukuda
- 👤 Tatsuo Mori
- 👤 Masayuki Tanno
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 14:10
CPC Classifications
H; H01; H01F; H01F10/00; H01F10/08; H01F10/10; H01F10/18; H01F10/20; H01F10/24; H01F10/245; H03; H03B; H03B9/00; H03B9/12; H03B9/14; H03B9/142; H03H; H03H2/00; H03H2/001
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
105 words
An epitaxial single crystal wafer which comprises: (a) a single crystal wafer of a rare earth gallium garnet as a substrate wafer; and (b) an epitaxial layer of a magnetic single crystal having a thickness of at least 10 μm on at least one surface of the substrate wafer and represented by the chemical formula (Y.sub.1-x M.sub.x).sub.a Fe.sub.8-a O.sub.12, in which M is an element selected from the group consisting of bismuth, lanthanum, gadolinium and lutetium, the subscript a is a positive number in the range from 3.0 to 3.1 and the subscript x is a positive number in the range from 0.01 to 0.9.
Claim 2
Dependent Claim
105 words
An epitaxial single crystal wafer which comprises: (a) a single crystal wafer of a rare earth gallium garnet as a substrate wafer; and (b) an epitaxial layer of a magnetic single crystal having a thickness of at least 10 μm on at least one surface of the substrate wafer and represented by the chemical formula (Y.sub.1-x M.sub.x).sub.a Fe.sub.8-a O.sub.12, in which M is an element selected from the group consisting of bismuth, lanthanum, gadolinium and lutetium, the subscript a is a positive number in the range from 3.0 to 3.1 and the subscript x is a positive number in the range from 0.01 to 0.9.
Claim 3
Dependent Claim
25 words
The epitaxial single crystal wafer as claimed in claim 1 in which the rare earth gallium garnet as the substrate wafer is gadolinium gallium garnet.
Claim 4
Dependent Claim
20 words
The epitaxial single crystal wafer as claimed in claim 2 in which the value of x does not exceed 0.3.
Claim 5
Dependent Claim
59 words
The epitaxial single crystal wafer as claimed in claim 2 in which the epitaxial layer of a magnetic single crystal has a chemical composition expressed by the formula (Y.sub.1-x La.sub.x).sub.a Fe.sub.8-a O.sub.12, in which x is a positive number in the range from 0.01 to 0.02 and a is a positive number in the range from 3.01 to 3.04.
Claim 6
Dependent Claim
59 words
The epitaxial single crystal wafer as claimed in claim 2 in which the epitaxial layer of a magnetic single crystal has a chemical composition expressed by the formula (Y.sub.1-x Bi.sub.x).sub.a Fe.sub.8-a O.sub.12, in which x is a positive number in the range from 0.01 to 0.03 and a is a positive number in the range from 3.01 to 3.04.
Claim 7
Dependent Claim
59 words
The epitaxial single crystal wafer as claimed in claim 2 in which the epitaxial layer of a magnetic single crystal has a chemical composition expresed by the formula (Y.sub.1-x Gd.sub.x).sub.a Fe.sub.8-a O.sub.12, in which x is a positive number in the range from 0.07 to 0.09 and a is a positive number in the range from 3.02 to 3.05.
Claim 8
Dependent Claim
70 words
The epitaxial single crystal wafer as claimed in claim 2 in which the epitaxial layer of a magnetic single crystal has a chemical composition expressed by the formula (Y.sub.1-x-y Bi.sub.x Lu.sub.y).sub.a Fe.sub.8-a O.sub.12, in which x is a positive number smaller than 0.095 and y is a positive number smaller than 0.2 with the proviso that x=0.4y+0.15 and a is a positive number in the range from 3.01 to 3.05.
Claim 9
Dependent Claim
25 words
The epitaxial single crystal wafer as claimed in claim 1 in which the rare earth gallium garnet as the substrate wafer is neodrymium gallium garnet.
Claim 10
Dependent Claim
25 words
The epitaxial single crystal wafer as claimed in claim 1 in which the rare earth gallium garnet as the substrate wafer is samarium gallium garnet.
Claim 11
Dependent Claim
24 words
The epitaxial single crystal wafer as claimed in claim 9 in which the value of x is in the range from 0.1 to 0.8.
Claim 12
Dependent Claim
51 words
The epitaxial single crystal wafer as claimed in claim 1 in which the rare earth gallium garnet as the substrate wafer is a modified gadolinium gallium garnet having a chemical composition expressed by the formula Gd.sub.A Ca.sub.B Ga.sub.C Zr.sub.B O.sub.12, in which 2.60≦A≦2.80, 0.22≦B≦0.42 and 4.56≦C≦4.76 with the proviso that A+2B+C=8.
Claim 13
Dependent Claim
57 words
The epitaxial single crystal wafer as claimed in claim 1 in which the rare earth gallium garnet as the substrate wafer is a modified gadolinium gallium garnet having a chemical composition expressed by the formula Gd.sub.E Ca.sub.F Ga.sub.G Mg.sub.H Zr.sub.I O.sub.12, in which 2.60≦E≦2.80, 0.25≦F≦0.45, 3,90≦G≦4.10 and 0.20≦H≦0.40 and 0.55≦I≦0.75 with the proviso that E+F+G+H+I=8 and F+H=I.
Claim 14
Dependent Claim
62 words
A tunable filter for magnetostatic waves comprising an epitaxial single crystal wafer according to claim 1 provided on the surface of the epitaxial layer with an exciting electrode and a detecting electrode for magnetostatic waves and held in an external magnetic field in such a disposition that the plane of the epitaxial layer is perpendicular to the direction of the magnetic field.
Claim 15
Dependent Claim
62 words
A tunable filter for magnetostiatic waves comprising an epitaxial single crystal wafer according to claim 5 provided on the surface of the epitaxial layer with an exciting electrode and a detecting electrode for magnetostatic waves and held in an external magnetic field in such a disposition that the plane of the epitaxial layer is perpendicular to the direction of the magnetic field.
Claim 16
Dependent Claim
24 words
An oscillator for magnetostatic waves which comprises a tunable filter according to claim 13 and an amplifier connected in series to the tunable filter.
Claim 17
Dependent Claim
133 words
An epitaxial single crystal wafer which comprises: (a) a single crystal wafer of gadolinium gallium garnet as a substrate wafer; and (b) an epitaxial layer of a magnetic single crystal having a thickness of at least 10 μm on at least one surface of the substrate wafer and represented by the chemical formula (Y.sub.1-x M.sub.x).sub.a (Fe.sub.1-y Q.sub.y).sub.8-a O.sub.12, in which M is an element selected from the group consisting of bismuth, lanthanum, gadolinium and lutetium, the subscript a is a positive number in the range from 3.0 to 3.1, the subscript x is a positive number in the range from 0.01 to 0.9, Q is an element selected from the group ocnsisting of aluminum, gallium, indium and scandium and the subscript y is a positive number in the range from 0.1 to 0.2.
Claim 18
Dependent Claim
133 words
An epitaxial single crystal wafer which comprises: (a) a single crystal wafer of gadolinium gallium garnet as a substrate wafer; and (b) an epitaxial layer of a magnetic single crystal having a thickness of at least 10 μm on at least one surface of the substrate wafer and represented by the chemical formula (Y.sub.1-x M.sub.x).sub.a (Fe.sub.1-y Q.sub.y).sub.8-a O.sub.12, in which M is an element selected from the group consisting of bismuth, lanthanum, gadolinium and lutetium, the subscript a is a positive number in the range from 3.0 to 3.1, the subscript x is a positive number in the range from 0.01 to 0.9, Q is an element selected from the group ocnsisting of aluminum, gallium, indium and scandium and the subscript y is a positive number in the range from 0.1 to 0.2.
Claim 19
Dependent Claim
72 words
The epitaxial single crystal wafer as claimed in claim 16 in which the epitaxial layer of a magnetic single crystal has a chemical composition expressed by the formula (Y.sub.1-x La.sub.x).sub.a (Fe.sub.1-y Al.sub.y).sub.8-a O.sub.12, in which x is a positive number in the range from 0.08 to 0.12, y is a positive number in the range from 0.13 to 0.17 and a is a positive number in the range from 3.00 to 3.04.
Claim 20
Dependent Claim
72 words
The epitaxial single crystal wafer as claimed in claim 16 in which the epitaxial layer of a magnetic single crystal has a chemical composition expressed by the formula (Y.sub.1-x Gd.sub.x).sub.a (Fe.sub.1-y Ga.sub.y).sub.8-a O.sub.12, in which x is a positive number in the range from 0.15 to 0.19, y is a positive number in the range from 0.14 to 0.18 and a is a positive number in the range from 3.01 to 3.05.
Claim 21
Dependent Claim
62 words
A tunable filter for magnetostatic waves comprising an epitacial single crystal wafer according to claim 16 provided on the surface of the epitaxial layer with an exciting electrode and a detecting electrode for magnetostatic waves and held in an external magnetic field in such a disposition that the plane of the epitaxial layer is perpendicular to the direction of the magnetic field.
Claim 22
Dependent Claim
24 words
An oscillator for magnetostatic waves which comprises a tunable filter according to claim 19 and an amplifier connected in series to the tunable filter.
References Cited (Backward Citations)
US4624901A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-11-05 | 1994-05-07 | 1994-11-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-11-05 | 1998-05-07 | 1998-11-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-11-05 | 2002-05-07 | 2002-11-06 | $7700.00 | Window Closed / Lapsed |