Apparatus and method for detecting vertically propagated defects in integrated circuits

Claim 1

An apparatus for detecting defects arising as a result of integrated circuit processing, said apparatus comprising: (a) a substrate; (b) a first meander formed on or in said substrate, said first meander comprising a high electrical resistivity material having a predetermined number of intermediate segments, the ends of which are interconnected by folded segments such that an electrical circuit, having an predetermined electrical resistance, is formed between the ends of the first meander; (c) a second meander electrically insulated from said first meander, said second meander comprising a high electrical resistivity material having a predetermined number of intermediate segments, the ends of which are interconnected by folded segments such that an electrical circuit, having a predetermined electrical resistance, is formed between the ends of the second meander; (d) a first set of strips comprising a predetermined number of strips of high electrical conductivity material, electrically insulated from said first and second meanders, the ends of each strip being electrically connected to the ends of a corresponding intermediate segment of said first meander; and (e) a second set of strips comprising a predetermined number of strips of high electrical conductivity material which are electrically insulated from said first set of strips, said first meander and said second meander, the ends of each strip of said second set being electrically connected to the ends of a corresponding intermediate segment of said second meander, and a least a portion of said second set of strips overlying a least a portion of said first set of strips.

Claim 2

An apparatus for detecting defects arising as a result of integrated circuit processing, said apparatus comprising: (a) a substrate; (b) a first meander formed on or in said substrate, said first meander comprising a high electrical resistivity material having a predetermined number of intermediate segments, the ends of which are interconnected by folded segments such that an electrical circuit, having an predetermined electrical resistance, is formed between the ends of the first meander; (c) a second meander electrically insulated from said first meander, said second meander comprising a high electrical resistivity material having a predetermined number of intermediate segments, the ends of which are interconnected by folded segments such that an electrical circuit, having a predetermined electrical resistance, is formed between the ends of the second meander; (d) a first set of strips comprising a predetermined number of strips of high electrical conductivity material, electrically insulated from said first and second meanders, the ends of each strip being electrically connected to the ends of a corresponding intermediate segment of said first meander; and (e) a second set of strips comprising a predetermined number of strips of high electrical conductivity material which are electrically insulated from said first set of strips, said first meander and said second meander, the ends of each strip of said second set being electrically connected to the ends of a corresponding intermediate segment of said second meander, and a least a portion of said second set of strips overlying a least a portion of said first set of strips.

Claim 13

An apparatus for detecting defects arising as a result of integrated circuit processing, said apparatus comprising; (a) a substrate; (b) a first meander formed on substrate, said first meander comprising high electrical resistivity material having predetermined number of intermediate segments, the ends of which are interconnected by folded segments such that an electrical circuit, having a predetermined electrical resistance, is formed between the ends of the first meander; (c) a second meander disposed over and electrically insulated from said first meander, said second meander comprising a high electrical resistivity material having a predetermined number of intermediate segments, which are oriented substantially orthogonally with respect to the intermediate segments of said first meander, the ends of the intermediate segment of said second meander being interconnected by folded segments such that an electrical circuit, having a predetermined electrical resistance, is formed between the ends of the second meander; (d) a first set of strips comprising a predetermined number of strips of high electrical conductivity material, electrically insulated from said first and second meanders, each strip being in substantial overlying alignment with a corresponding one of each of said intermediate segments of said first meander and the ends of each strip being electrically connected to the ends of said corresponding intermediate segment of said first meander; (e) a second set of strips comprising a predetermined number of strips of high electrical conductivity material which are electrically insulated from said first set of strips, said first meander and said second meander, each strip of said second set being in substantial overlying alignment with a corresponding one of each of said intermediate segments of said second meander and the ends of each strip of said second set being electrically connected to the ends of said corresponding intermediate segments of said second meander; (f) a first end contact terminal electrically connected to one end of said first meander, a second end contact terminal electrically connected to the other end of said first meander, a first intermediate contact terminal electrically connected to an end of an intermediate segment of said first meander such that the portion of the first meander between said first intermediate contact terminal and an end contact terminal of said first meander includes one intermediate segment, and a second intermediate contact terminal electrically connected to the end of a second intermediate segment of said first meander such that the portion of the first meander between said first and second intermediate contact terminals includes a folded segment; and (g) a first end contact terminal electrically connected to one end of said second meander, a second end contact terminal electrically connected to the other end of said second meander, a first intermediate contact terminal electrically connected to one end of an intermediate segment of said second meander such that the portion of the second meander between the first intermediate contact terminal and an end contact terminal of said second meander includes one intermediate segment, and a second intermediate contact terminal electrically connected to one end of a second intermediate segment of said second meander such that the portion of the second meander between the first and second intermediate contact terminals of said second meander includes one folded segment of said second meander.

Claim 14

An apparatus for detecting defects arising as a result of integrated circuit processing, said apparatus comprising; (a) a substrate; (b) a first meander formed on substrate, said first meander comprising high electrical resistivity material having predetermined number of intermediate segments, the ends of which are interconnected by folded segments such that an electrical circuit, having a predetermined electrical resistance, is formed between the ends of the first meander; (c) a second meander disposed over and electrically insulated from said first meander, said second meander comprising a high electrical resistivity material having a predetermined number of intermediate segments, which are oriented substantially orthogonally with respect to the intermediate segments of said first meander, the ends of the intermediate segment of said second meander being interconnected by folded segments such that an electrical circuit, having a predetermined electrical resistance, is formed between the ends of the second meander; (d) a first set of strips comprising a predetermined number of strips of high electrical conductivity material, electrically insulated from said first and second meanders, each strip being in substantial overlying alignment with a corresponding one of each of said intermediate segments of said first meander and the ends of each strip being electrically connected to the ends of said corresponding intermediate segment of said first meander; (e) a second set of strips comprising a predetermined number of strips of high electrical conductivity material which are electrically insulated from said first set of strips, said first meander and said second meander, each strip of said second set being in substantial overlying alignment with a corresponding one of each of said intermediate segments of said second meander and the ends of each strip of said second set being electrically connected to the ends of said corresponding intermediate segments of said second meander; (f) a first end contact terminal electrically connected to one end of said first meander, a second end contact terminal electrically connected to the other end of said first meander, a first intermediate contact terminal electrically connected to an end of an intermediate segment of said first meander such that the portion of the first meander between said first intermediate contact terminal and an end contact terminal of said first meander includes one intermediate segment, and a second intermediate contact terminal electrically connected to the end of a second intermediate segment of said first meander such that the portion of the first meander between said first and second intermediate contact terminals includes a folded segment; and (g) a first end contact terminal electrically connected to one end of said second meander, a second end contact terminal electrically connected to the other end of said second meander, a first intermediate contact terminal electrically connected to one end of an intermediate segment of said second meander such that the portion of the second meander between the first intermediate contact terminal and an end contact terminal of said second meander includes one intermediate segment, and a second intermediate contact terminal electrically connected to one end of a second intermediate segment of said second meander such that the portion of the second meander between the first and second intermediate contact terminals of said second meander includes one folded segment of said second meander.

Claim 16

A method for detecting defects arising as a result of processing integrated circuits, said method comprising steps of: (a) forming a first meander on or in a substrate, said first meander comprising a high electrical resistivity material having a predetermined number of intermediate segments, the ends of which are interconnected by folded segments such that an electrical circuit, having a predetermined electrical resistance, is formed between the ends of the first meander; (b) forming a second meander electrically insulated from said first meander, said second meander comprising a high electrical resistivity material having predetermined number of intermediate segments, the ends of which are interconnected by folded segments such that an electrical circuit, having a predetermined electrical resistance, is formed between the ends of the second meander; (c) forming a first set of strips comprising a predetermined number of strips of high electrical conductivity material, electrically insulated from said first and second meanders, the ends of each strip being electrically connected to the ends of a corresponding intermediate segment of said first meander whereby an electrical circuit having a resistance R M1 is formed between the ends of said first meander; (d) forming a second set of strips comprising a predetermined number of strips of high electrical conductivity material which are electrically insulated from said first set of strips, said first meander and said second meander, the ends of each strip of said second set being electrically connected to the ends of a corresponding intermediate segment of said second meander whereby an electrical circuit having a resistance R M2 is formed between the ends of said second meander, and at least a portion of said second set of strips overlies at least a portion of said first set of strips; (e) forming a first end contact terminal electrically connected to one end of said first meander, and a second end contact terminal electrically connected to the other end of said first meander; (f) forming a first end contact terminal electrically connected to one end of said second meander, and a second end contact terminal electrically connected to the other end of said second meander; (g) measuring the electrical resistance R 1 between the first and second end contact terminals of said first meander and the electrical resistance R 2 between the first and second end contact terminals of said second meander; and (h) providing an indication of: (i) no defects where the magnitude of the resistance R 1 is substantially equal to R M1 and the magnitude of R 2 is substantially equal to R M2; (ii) the presence of a vertically propogated defect where the magnitude of the resistance R 1 is not substantially equal to R M1 and the magnitude of the resistance R 2 is not substantially equal to R M2 .

Claim 17

A method for detecting defects arising as a result of processing integrated circuits, said method comprising steps of: (a) forming a first meander on or in a substrate, said first meander comprising a high electrical resistivity material having a predetermined number of intermediate segments, the ends of which are interconnected by folded segments such that an electrical circuit, having a predetermined electrical resistance, is formed between the ends of the first meander; (b) forming a second meander electrically insulated from said first meander, said second meander comprising a high electrical resistivity material having predetermined number of intermediate segments, the ends of which are interconnected by folded segments such that an electrical circuit, having a predetermined electrical resistance, is formed between the ends of the second meander; (c) forming a first set of strips comprising a predetermined number of strips of high electrical conductivity material, electrically insulated from said first and second meanders, the ends of each strip being electrically connected to the ends of a corresponding intermediate segment of said first meander whereby an electrical circuit having a resistance R M1 is formed between the ends of said first meander; (d) forming a second set of strips comprising a predetermined number of strips of high electrical conductivity material which are electrically insulated from said first set of strips, said first meander and said second meander, the ends of each strip of said second set being electrically connected to the ends of a corresponding intermediate segment of said second meander whereby an electrical circuit having a resistance R M2 is formed between the ends of said second meander, and at least a portion of said second set of strips overlies at least a portion of said first set of strips; (e) forming a first end contact terminal electrically connected to one end of said first meander, and a second end contact terminal electrically connected to the other end of said first meander; (f) forming a first end contact terminal electrically connected to one end of said second meander, and a second end contact terminal electrically connected to the other end of said second meander; (g) measuring the electrical resistance R 1 between the first and second end contact terminals of said first meander and the electrical resistance R 2 between the first and second end contact terminals of said second meander; and (h) providing an indication of: (i) no defects where the magnitude of the resistance R 1 is substantially equal to R M1 and the magnitude of R 2 is substantially equal to R M2; (ii) the presence of a vertically propogated defect where the magnitude of the resistance R 1 is not substantially equal to R M1 and the magnitude of the resistance R 2 is not substantially equal to R M2 .

Claim 18

An apparatus for detecting defects arising as a result of integrated circuit processing, said apparatus comprising at least one set of test structures on a substrate, said set (a) a first test structure comprising: (i) a first meander formed on or in said substrate, said first meander comprising a high electrical resistivity material having a predetermined number of intermediate segments, the ends of which are interconnected by folded segments such that an electrical circuit, having a predetermined electrical resistance, is formed between the ends of the first meander; (ii) a first set of strips comprising a predetermined number of strips of high electrical conductivity material, electrically insulated from and positioned in substantially non-overlying spaced relationship with respect to said first meander, the ends of each strip being electrically connected to the ends of a corresponding intermediate segment of said first meander; and (b) a second test structure comprising: (i) a second meander formed on or in said substrate, said second meander comprising a high electrical resistivity material having a predetermined number of intermediate segments, the ends of which are interconnected by folded segments such that an electrical circuit, having a predetermined electrical resistance, is formed between the ends of the second meander; and (ii) a second set of strips comprising a predetermined number of strips of high electrical conductivity material, electrically insulated from said second meander, each strip being in substantial overlying alignment with a corresponding one of each of said intermediate segments of said second meander and the ends of each strip being electrically connected to the ends of the corresponding intermediate segment of said second meander.

Claim 19

An apparatus for detecting defects arising as a result of integrated circuit processing, said apparatus comprising at least one set of test structures on a substrate, said set (a) a first test structure comprising: (i) a first meander formed on or in said substrate, said first meander comprising a high electrical resistivity material having a predetermined number of intermediate segments, the ends of which are interconnected by folded segments such that an electrical circuit, having a predetermined electrical resistance, is formed between the ends of the first meander; (ii) a first set of strips comprising a predetermined number of strips of high electrical conductivity material, electrically insulated from and positioned in substantially non-overlying spaced relationship with respect to said first meander, the ends of each strip being electrically connected to the ends of a corresponding intermediate segment of said first meander; and (b) a second test structure comprising: (i) a second meander formed on or in said substrate, said second meander comprising a high electrical resistivity material having a predetermined number of intermediate segments, the ends of which are interconnected by folded segments such that an electrical circuit, having a predetermined electrical resistance, is formed between the ends of the second meander; and (ii) a second set of strips comprising a predetermined number of strips of high electrical conductivity material, electrically insulated from said second meander, each strip being in substantial overlying alignment with a corresponding one of each of said intermediate segments of said second meander and the ends of each strip being electrically connected to the ends of the corresponding intermediate segment of said second meander.

Claim 26

A method for detecting defects arising as a result of processing integrated circuits, said method comprising the steps of: (a) providing at least one set of test structures on a substrate, said set comprising: (i) a first test structure comprising a first meander on or in said substrate, said first meander comprising a high electrical resistivity material having a predetermined number of intermediate segments, the ends of which are interconnected by folded segments such that a electrical circuit, having a predetermined electrical resistance, is formed between the ends of the first meander; and a first set of strips comprising a predetermined number of strips of high electrical conductivity material, electrically insulated from and positioned in substantially non-overlying spaced relationship with respect to said first meander, the ends of each strip being electrically connected to the ends of a corresponding intermediate segment of said first meander whereby an electrical circuit having a resistance R M1 is formed between the ends of said first meander; and (ii) a second test structure comprising a second meander formed on or in said substrate, said second meander comprising a high electrical resistivity material having a predetermined number of intermediate segments, the ends of which are interconnected by folded segments such that an electrical circuit, having a predetermined electrical resistance, is formed between the ends of the second meander; and a second set of strips comprising a predetermined number of strips of high electrical conductivity material, electrically insulated from said second meander, each strip being in substantial overlying alignment with a corresponding one of each of said intermediate segments of said second meander and the ends of each strip being electrically connected to the ends of the corresponding intermediate segment of said second meander whereby an electrical circuit having a resistance R M2 is formed between the ends of said second meander; (b) providing a first end contact terminal electrically connected to one end of said first meander, and a second end contact terminal electrically connected to the other end of said first meander; (c) providing a first end contact terminal electrically connected to one end of said second meander, and a second end contact terminal electrically connected to the other end of said second meander; (d) measuring the electrical resistance R 1 between the first and second end contact terminals of said first meander and the electrical resistance R 2 between the first and second end contact terminals of said second meander; and (e) providing an indication of: (i) no defects where the magnitude of R 1 is substantially equal to R M1 and the magnitude of R 2 is substantially equal to R M2 (ii) the presence of a defect attributable to meander processing where the magnitude of the resistance R 1 is substantially equal to R M1 and the magnitude of R 2 is not substantially equal to R M2 ; and (iii) a defect attributable to strip metallization processing where the magnitude of the resistance R 1 is not substantially equal to R M1 and the magnitude of the resistance R 2 is not substantially equal to R M2 .

Claim 27

A method for detecting defects arising as a result of processing integrated circuits, said method comprising the steps of: (a) providing at least one set of test structures on a substrate, said set comprising: (i) a first test structure comprising a first meander on or in said substrate, said first meander comprising a high electrical resistivity material having a predetermined number of intermediate segments, the ends of which are interconnected by folded segments such that a electrical circuit, having a predetermined electrical resistance, is formed between the ends of the first meander; and a first set of strips comprising a predetermined number of strips of high electrical conductivity material, electrically insulated from and positioned in substantially non-overlying spaced relationship with respect to said first meander, the ends of each strip being electrically connected to the ends of a corresponding intermediate segment of said first meander whereby an electrical circuit having a resistance R M1 is formed between the ends of said first meander; and (ii) a second test structure comprising a second meander formed on or in said substrate, said second meander comprising a high electrical resistivity material having a predetermined number of intermediate segments, the ends of which are interconnected by folded segments such that an electrical circuit, having a predetermined electrical resistance, is formed between the ends of the second meander; and a second set of strips comprising a predetermined number of strips of high electrical conductivity material, electrically insulated from said second meander, each strip being in substantial overlying alignment with a corresponding one of each of said intermediate segments of said second meander and the ends of each strip being electrically connected to the ends of the corresponding intermediate segment of said second meander whereby an electrical circuit having a resistance R M2 is formed between the ends of said second meander; (b) providing a first end contact terminal electrically connected to one end of said first meander, and a second end contact terminal electrically connected to the other end of said first meander; (c) providing a first end contact terminal electrically connected to one end of said second meander, and a second end contact terminal electrically connected to the other end of said second meander; (d) measuring the electrical resistance R 1 between the first and second end contact terminals of said first meander and the electrical resistance R 2 between the first and second end contact terminals of said second meander; and (e) providing an indication of: (i) no defects where the magnitude of R 1 is substantially equal to R M1 and the magnitude of R 2 is substantially equal to R M2 (ii) the presence of a defect attributable to meander processing where the magnitude of the resistance R 1 is substantially equal to R M1 and the magnitude of R 2 is not substantially equal to R M2 ; and (iii) a defect attributable to strip metallization processing where the magnitude of the resistance R 1 is not substantially equal to R M1 and the magnitude of the resistance R 2 is not substantially equal to R M2 .