Split-cross-bridge resistor for testing for proper fabrication of integrated circuits

Claim 2

A testing apparatus for testing the accuracy of fabrication of circuit components on an integrated circuit comprising: a cross resistor having a first voltage contact pad and first and second current contact in electrical contact therewith; a bridge resistor electrically connected at one and thereof to the cross resistor and having first and second bridge resistor voltage contact pads in electrical contact therewith; a split-bridge resistor having first and second split conductor channels electrically connected to the other end of the bridge resistor and having first and second split conductor voltage contact pads electrically connected to the first split conductor channel, with the second split conductor channel spaced apart from the first; and, a current contact pad in electrical contact with the junction of the split conductor channels at the end thereof remote from the bridge resistor.

Claim 3

The apparatus of claim 1 wherein: the cross resistor is formed by first and second intersecting rectangular portions resulting in a central portion with four appending portions, each appending portion having a length at least twice its width.

Claim 4

The apparatus of claim 1 wherein: the first and second bridge resistor voltage contact pads are each electrically connected to the bridge resistor by a tap conducted having a width and a centerline axis, with the centerline axis of each of the tap conductors spaced apart by a separation distance; and wherein, the ratio of the width of each of the tap conductors and the width of the bridge resistor is selected, in conjunction with the ratio of the width of the bridge resistor to the separation distance, to reduce the measurement error below a selected value.

Claim 5

The apparatus of claim 3 wherein: the first and second bridge resistor voltage contact taps each having a length at least twice their width.

Claim 6

The apparatus of claim 2 wherein: the first and second bridge resistor voltage contact pads are each electrically connected to the bridge resistor by a tap conductor having a centerline axis; and wherein, the centerline axis of the first bridge resistor voltage contact pad tap is spaced apart from the border of the central portion adjacent to the portion of the cross resistor in electrical contact with the bridge resistor and the centerline axis of the second bridge resistor voltage contact pad tap is spaced apart from the junction of the split-bridge resistor and the bridge resistor, by at least a distance equal to twice the width of the bridge resistor.

Claim 7

The apparatus of claim 1 wherein: the first and second split-bridge resistor voltage contact pads are each electrically connected to the split-bridge resistor by, respectively, a first and a second split-bridge resistor tap conductor each having a width, and with the centerline of each split-bridge resistor tap conductor spaced apart by a separation distance; and wherein, the ratio of the width of each of the first and second split-bridge resistor tap conductors and the width of the first channel conductor are selected, in conjunction with the ratio of the first channel conductor width to the separation distance, to reduce measurement error below a selected value.

Claim 8

The apparatus of claim 1 wherein: the first and second split-bridge resistor voltage contact pads are each electrically connected to the split-bridge resistor by, respectively, a first and a second split-bridge resistor tap conductor having a width, a length, and a centerline axis wherein the length is at least twice the width.

Claim 9

The apparatus of claim 7 wherein: the centerline axis of the first split-bridge resistor tap conductor is spaced apart from the junction of the first split conductor channel and bridge resistor and the centerline axis of the second split-bridge resistor tap conductor is spaced apart from the terminal end at the point where the first and second split conductor channels are rejoined by the end member, by at least a distance equal to twice the width of the first split conductor channel.

Claim 10

A testing apparatus for testing the accuracy of fabrication of circuit components on an integrated circuit comprising: a first conductor and a second conductor each of equivalent width and formed into a cross during the fabrication process of the chip, along with the circuit components for the integrated circuit, with the second conductor having a first end and second end, and with the first conductor forming two extending cross arms, on either side of the second conductor at generally the first end of the second conductor, and a split-bridge portion contained in the second conductor at generally the second end of the second conductor and spaced apart from but electrically connected to the cross-arms by a bridge resistor portion of the second conductor, the split-bridge portion having first and second conductor channels separated by a space extending between the conductor channels; a cross-arm voltage contact electrically connected to the extremity of one cross-arm; a cross-arm current contact electrically connected to the extremity of the other cross-arm; a first end current contact electrically connected at the first end of the second conductor; a cross/bridge voltage contact electrically connected to the second conductor spaced equally apart from the center of the cross formed by the first and second conductors as the first end current contact is spaced from the center; a bridge resistor voltage contact electrically connected to the bridge resistor portion; a first and a second split-bridge voltage contact each electrically connected to the first spaced-apart conductor channel; and a second end current contact electrically connected at the second end of the second conductor.

Claim 11

A testing apparatus for testing the accuracy of fabrication of circuit components on an integrated circuit comprising: a first conductor and a second conductor each of equivalent width and formed into a cross during the fabrication process of the chip, along with the circuit components for the integrated circuit, with the second conductor having a first end and second end, and with the first conductor forming two extending cross arms, on either side of the second conductor at generally the first end of the second conductor, and a split-bridge portion contained in the second conductor at generally the second end of the second conductor and spaced apart from but electrically connected to the cross-arms by a bridge resistor portion of the second conductor, the split-bridge portion having first and second conductor channels separated by a space extending between the conductor channels; a cross-arm voltage contact electrically connected to the extremity of one cross-arm; a cross-arm current contact electrically connected to the extremity of the other cross-arm; a first end current contact electrically connected at the first end of the second conductor; a cross/bridge voltage contact electrically connected to the second conductor spaced equally apart from the center of the cross formed by the first and second conductors as the first end current contact is spaced from the center; a bridge resistor voltage contact electrically connected to the bridge resistor portion; a first and a second split-bridge voltage contact each electrically connected to the first spaced-apart conductor channel; and a second end current contact electrically connected at the second end of the second conductor.