US5034604A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Refractory effusion cell to generate a reproducible, uniform and ultra-pure molecular beam of elemental molecules, utilizing reduced thermal gradient filament construction
Assignee: The University of Texas System
•
Filing: 1989-08-29
•
Granted: 1991-07-23
•
Expires: 2009-08-29
Abstract
Abstract A device and method for producing an ultra pure molecular beam of elemental molecules utilizing a reduced thermal gradient filament construction in an effusion cell is provided. The effusion cell comprises a crucible having an open and a closed end and at least one heating filament distributed immediate the crucible. The at least one heating filament or filaments are provided having a first portion having a first pitch in proximal relationship to the open end of the crucible and having a second portion having a second pitch wherein the first pitch is of a higher spatial frequency than the second pitch. The heating filament is non-inductively wound about the crucible and positioned in conformity to the outside structure of the crucible. The heat shield is positioned proximate and about the crucible and heating filament or filaments. The heating filaments are connected to a controllable electric power supply producing a near constant temperature along the long axis of the crucible. By placing source material in the crucible and placing the crucible heating filaments and heat shield in a reduced pressure atmosphere and powering the heating filaments, a substantially constant temperature is produced along the crucible long axis resulting in an ultra pure molecular beam of elemental molecules of the source material.
Inventors
- 👤 Ben G. Streetman
- 👤 Terry J. Mattord
- 👤 Vijay P. Kesan
- 👤 Ben G. Treetman
- 👤 Terry Mattord
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 15:11
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/243; C30; C30B; C30B23/00; C30B23/02; C30B23/06; C30B23/066
Claims Analysis
Total Claims: 69
Claim 1
Independent Claim
65 words
An effusion cell comprising: a crucible having an open end and a closed end; and at least one heating filament distributed immediate said crucible, a first portion of said at least one heating filament having a first pitch in proximal relationship to said open end, and a second portion of said at least one heating filament having a second pitch different from said first pitch.
Claim 2
Dependent Claim
65 words
An effusion cell comprising: a crucible having an open end and a closed end; and at least one heating filament distributed immediate said crucible, a first portion of said at least one heating filament having a first pitch in proximal relationship to said open end, and a second portion of said at least one heating filament having a second pitch different from said first pitch.
Claim 3
Dependent Claim
19 words
The effusion cell of claim 1 wherein said first pitch is a higher spatial frequency than said second pitch.
Claim 4
Dependent Claim
23 words
The effusion cell of claim 1 wherein said at least one heating filament is positioned in a non-inductively wound path about said crucible.
Claim 5
Dependent Claim
23 words
The effusion cell of claim 1 wherein said at least one heating filament is positioned in a serpentine path lengthwise about said crucible.
Claim 6
Dependent Claim
24 words
The effusion cell of claim 1 wherein said at least one heating filament is positioned in conformity to the outside structure of said crucible.
Claim 7
Dependent Claim
20 words
The effusion cell of claim 1 wherein said at least one heating filament comprises resistive material of a wire form.
Claim 8
Dependent Claim
20 words
The effusion cell of claim 1 wherein said at least one heating filament comprises resistive material of a foil form.
Claim 9
Dependent Claim
28 words
The effusion cell of claim 1 wherein said at least one heating filament comprises at least one material selected from the group consisting of tantalum, tungsten and rhenium.
Claim 10
Dependent Claim
30 words
The effusion cell of claim 1 wherein said at least one heating filament comprises at least one material selected from the group consisting of tantalum, tungsten, rhenium and alloys thereof.
Claim 11
Dependent Claim
24 words
The effusion cell of claim 1 further comprising heat shielding means positionable proximate and about said crucible and said at least one heating filament.
Claim 12
Dependent Claim
18 words
The effusion cell of claim 10 wherein said heat shielding means comprises multiple thermally isolated concentric foil wraps.
Claim 13
Dependent Claim
37 words
The effusion cell of claim 11 wherein said heat shielding means further comprises metal strips attached at one end of the outer diameter of said concentric foil wraps spacing each said wrap from each adjacent said wrap.
Claim 14
Dependent Claim
19 words
The effusion cell of claim 12 wherein said foil wraps comprise tantalum and said metal strips comprise expanded tantalum.
Claim 15
Dependent Claim
23 words
The effusion cell of claim 1 further comprising a temperature sensing assembly positioned in intimate proximity to said closed end of said crucible.
Claim 16
Dependent Claim
16 words
The effusion cell of claim 14 wherein said temperature sensing assembly comprises a dual thermocouple assembly.
Claim 17
Dependent Claim
16 words
The effusion cell of claim 1 further comprising a filament support disk positioned about said crucible.
Claim 18
Dependent Claim
27 words
The effusion cell of claim 16 wherein said filament support disk comprises passages, said at least one heating filament traversing said filament support disk through said passages.
Claim 19
Dependent Claim
13 words
The effusion cell of claim 16 wherein said filament support disk comprises tantalum.
Claim 20
Dependent Claim
21 words
The effusion cell of claim 10 further comprising crucible support means thermally isolated from said crucible and from said heating filament.
Claim 21
Dependent Claim
64 words
The effusion cell of claim 19 wherein said support means comprises: a support base; support rods attached perpendicular to said base; a heat shield base attached to said support rods in parallel and spaced apart relationship to said support base; a support cup attached to and thermally isolated from said heat shield base; and said heat shielding means being attached to said support cup.
Claim 22
Dependent Claim
12 words
The effusion cell of claim 20 wherein said support rods being inert.
Claim 23
Dependent Claim
12 words
The effusion cell of claim 20 wherein said support rods comprise molybdenum.
Claim 24
Dependent Claim
20 words
The effusion cell of claim 20 wherein said heat shield base being inert and weldable to said heat shielding means.
Claim 25
Dependent Claim
13 words
The effusion cell of claim 20 wherein said heat shield base comprises tantalum.
Claim 26
Dependent Claim
22 words
The effusion cell of claim 1 further comprising at least one electric power supply for powering said at least one heating filament.
Claim 27
Dependent Claim
55 words
The effusion cell of claim 14 wherein said temperature sensing assembly is connected to at least one controllable electric power supply, said at least one power supply being connected to said at least one heating filament and said temperature sensing assembly controls electric power to said at least one heating filament based on temperature sensed.
Claim 28
Dependent Claim
25 words
The effusion cell of claim 1 wherein said crucible being substantially inert, substantially transparent to infrared energy and substantially able to withstand high thermal stresses.
Claim 29
Dependent Claim
26 words
The effusion cell of claim 1 wherein said crucible comprises at least one material selected from the group consisting of pyrolytic boron nitride and aluminum nitride.
Claim 30
Dependent Claim
58 words
The effusion cell of claim 1 wherein said at least one heating filament comprises a heating filament distributed immediate said crucible having a plurality of pitches wherein said plurality of pitches comprises a first pitch in proximal relationship to said open end, said first pitch having a higher frequency than all other pitches of said plurality of pitches.
Claim 31
Dependent Claim
20 words
The effusion cell of claim 29 wherein said heating filament is positioned in a non-inductively wound path about said crucible.
Claim 32
Dependent Claim
21 words
The effusion cell of claim 29 wherein said heating filament is positioned in conformity to the outside structure of said crucible.
Claim 33
Dependent Claim
21 words
The effusion cell of claim 31 further comprising heat shielding means positioned proximate and about said crucible and said heating filament.
Claim 34
Dependent Claim
15 words
The effusion cell of claim 32 further comprising a filament support positioned about said crucible.
Claim 35
Dependent Claim
23 words
The effusion cell of claim 33 wherein said filament support comprises passages and said heating filament traverses said filament support through said passages.
Claim 36
Dependent Claim
26 words
The effusion cell of claim 33 wherein said filament support being substantially inert, substantially transparent to infrared energy and substantially able to withstand high thermal stress.
Claim 37
Dependent Claim
26 words
The effusion cell of claim 33 wherein said filament support comprises at least one material selected from the group consisting of boron nitride and aluminum nitride.
Claim 38
Dependent Claim
20 words
The effusion cell of claim 32 further comprising support means thermally isolated from said crucible and from said heating filament.
Claim 39
Dependent Claim
18 words
The effusion cell of claim 29 further comprising a controllable electric power supply for powering said heating filament.
Claim 40
Dependent Claim
66 words
The effusion cell of claim 1 wherein said at least one heating filament comprises: a first heating filament distributed immediate said crucible, in proximal relationship to said open end and having a first pitch; a second heating filament distributed immediate said crucible, in distal relationship to said open end and having a second pitch, said first pitch having a higher spatial frequency than said second pitch.
Claim 41
Dependent Claim
22 words
The effusion cell of claim 39 wherein said first and second heating filaments are positioned in non-inductively wound paths about said crucible.
Claim 42
Dependent Claim
24 words
The effusion cell of claim 39 wherein said first and second heating filaments are positioned in conformity to the outside structure of said crucible.
Claim 43
Dependent Claim
24 words
The effusion cell of claim 39 further comprising heat shielding means positioned proximate and about said crucible and said first and second heating filaments.
Claim 44
Dependent Claim
16 words
The effusion cell of claim 42 further comprising a filament support disk positioned about said crucible.
Claim 45
Dependent Claim
54 words
The effusion cell of claim 43 wherein said filament support disk comprises a first set of passages and a second set of passages, said first heating filament traversing said filament support disk through said first set of passages, and said second heating filament traversing said filament support disk through said second set of passages.
Claim 46
Dependent Claim
23 words
The effusion cell of claim 42 further comprising support means thermally isolated from said crucible and from said first and second heating filaments.
Claim 47
Dependent Claim
31 words
The effusion cell of claim 39 further comprising a first electric power supply for powering said first heating filament, and a second electric power supply for powering said second heating filament.
Claim 48
Dependent Claim
37 words
An effusion cell comprising: a crucible having an open end and a closed end; and at least one heating filament distributed immediate said crucible to produce a substantially constant temperature along the long axis of said crucible.
Claim 49
Dependent Claim
37 words
An effusion cell comprising: a crucible having an open end and a closed end; and at least one heating filament distributed immediate said crucible to produce a substantially constant temperature along the long axis of said crucible.
Claim 50
Independent Claim
124 words
A method of producing a molecular beam of source material comprising: placing source material in a crucible, said crucible having an open end and a closed end; distributing at least one heating filament immediate said crucible, a first portion of said at least one heating filament having a first pitch in proximal relationship to said open end, and a second portion of said at least one heating filament having a second pitch different from said first pitch; placing said crucible and said at least one heating filament in a reduced pressure atmosphere; and applying electrical power to said at least one heating filament producing a substantially constant temperature along the long axis of said crucible and generating a molecular beam of said source material.
Claim 51
Independent Claim
124 words
A method of producing a molecular beam of source material comprising: placing source material in a crucible, said crucible having an open end and a closed end; distributing at least one heating filament immediate said crucible, a first portion of said at least one heating filament having a first pitch in proximal relationship to said open end, and a second portion of said at least one heating filament having a second pitch different from said first pitch; placing said crucible and said at least one heating filament in a reduced pressure atmosphere; and applying electrical power to said at least one heating filament producing a substantially constant temperature along the long axis of said crucible and generating a molecular beam of said source material.
Claim 52
Dependent Claim
36 words
The method of claim 48 wherein said step of distributing at least one heating filament comprises distributing said at least one heating filament having said first pitch at a higher spatial frequency than said second pitch.
Claim 53
Dependent Claim
16 words
The method of claim 48 further comprising the step of controlling a temperature of said crucible.
Claim 54
Dependent Claim
24 words
The method of claim 50 wherein said step of controlling said temperature comprises controlling electric power supplied to said at least one heating filament.
Claim 55
Dependent Claim
43 words
The method of claim 50 wherein said step of controlling said temperature comprises sensing a temperature in intimate proximity to the closed end of said crucible, and controlling electric power supplied to said at least one heating filament according to said sensed temperature.
Claim 56
Dependent Claim
21 words
The method of claim 48 further comprising the step of heat shielding said crucible and said at least one heating filament.
Claim 57
Dependent Claim
27 words
The method of claim 48, wherein said step of distributing at least one heating filament comprises positioning said at least one heating filament non-inductively about said crucible.
Claim 58
Dependent Claim
61 words
The method of claim 48 wherein said step of distributing at least one heating filament comprises distributing a heating filament immediate said crucible having a plurality of pitches wherein said plurality of pitches includes a first pitch in proximal relationship to said open end, said first pitch having a higher spatial frequency than all other pitches of said plurality of pitches.
Claim 59
Dependent Claim
16 words
The method of claim 55 further comprising the step of controlling a temperature of said crucible.
Claim 60
Dependent Claim
21 words
The method of claim 56 wherein said step of controlling said temperature comprises controlling electric power supplied to said heating filament.
Claim 61
Dependent Claim
34 words
The method of claim 56 wherein said step of controlling said temperature comprises sensing a temperature in intimate proximity to the closed end of said crucible and controlling electric power to said heating filament.
Claim 62
Dependent Claim
18 words
The method of claim 55 further comprising the step of heat shielding said crucible and said heating filament.
Claim 63
Dependent Claim
21 words
The method of claim 55, wherein said step of distributing said filament comprises positioning said heating filament non-inductively about said crucible.
Claim 64
Dependent Claim
68 words
The method of claim 48 wherein said step of distributing at least one heating filament comprises: distributing a first heating filament immediate said crucible, in proximal relationship to said open end and having a first pitch; distributing a second heating filament immediate said crucible, in distal relationship to said open end and having a second pitch, said first pitch having a higher spatial frequency than said second pitch.
Claim 65
Dependent Claim
16 words
The method of claim 61 further comprising the step of controlling the temperature of said crucible.
Claim 66
Dependent Claim
24 words
The method of claim 62 wherein said step of controlling said temperature comprises controlling electric power supplied to said first and second heating filaments.
Claim 67
Dependent Claim
37 words
The method of claim 62 wherein said step of controlling said temperature comprises sensing a temperature in intimate proximity to the closed end of said crucible and controlling electric power to said first and second heating filaments.
Claim 68
Dependent Claim
21 words
The method of claim 61 further comprising the step of heat shielding said crucible and said first and second heating filaments.
Claim 69
Dependent Claim
28 words
The method of claim 61 wherein said steps of distributing said first and second heating filaments comprise positioning said first and second heating filaments noninductively about said crucible.
References Cited (Backward Citations)
US2330135A
Cited
US2793609A
Cited
US3153137A
Cited
US3662154A
Cited
US3974002A
Cited
US4137865A
Cited
US4181544A
Cited
US4239955A
Cited
US4385946A
Cited
US4392453A
Cited
US4570066A
Cited
US4426569A
Cited
US4543467A
Cited
US4607152A
Cited
US4648347A
Cited
US4553022A
Cited
US4518846A
Cited
US4789779A
Cited
US4777022A
Cited
US4699083A
Cited
US4646680A
Cited
US4748315A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-07-22 | 1995-01-21 | 1995-07-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-07-22 | 1999-01-21 | 1999-07-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-07-22 | 2003-01-21 | 2003-07-23 | $7700.00 | Window Closed / Lapsed |