Effusion cells for molecular beam epitaxy apparatus

Claim 1

A molecular beam epitaxy apparatus comprising an evacuated growth chamber and at least one improved effusion cell for generating a molecular beam from a source material, said improved effusion cell comprising: an elongated cylindrical Pyrolytic Boron Nitride crucible having an opening at one end thereof to permit egress of said beam, a heating coil surrounding and in heat transfer relationship with said crucible, a plurality of ceramic rods, extending essentially parallel to the cylinder axis and having notches along their length, for engaging said coil and firmly pressing said coil onto the outer surface of said crucible; a retaining ring to secure said ceramic rods near said one end of the crucible, an apertured disc to secure said ceramic rods near the other end of the crucible; and a radiation heat shield surrounding the crucible, coil and rod assembly.