US4648347A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vacuum depositing apparatus
Assignee: Balzers und Leybold Deutschland Holding AG
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Filing: 1985-05-29
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Granted: 1987-03-10
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Expires: 2005-05-29
Abstract
Abstract In vacuum depositing apparatus, especially for the manufacture of magnetic tapes, a substrate holder is disposed in the form of a cooling cylinder, and in the path of the vapor stream there is a mask for the purpose of geometrically restricting the vapor stream. In order to prevent any condensation of vaporized material in solid form, the surface of the mask facing the vapor stream is not aligned horizontally, and its lowermost edge lies within the projected surface of the crucible opening. The surface of the mask can be heated up to a temperature that is between the vaporizing temperature and the solidification temperature of the vaporized material. In an especially advantageous manner, the surface of the mask is formed by tiles of a ceramic material.
Inventors
- 👤 Hans Aichert
- 👤 Volker Bauer
- 👤 Albert Feuerstein
- 👤 Horst Ranke
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 17:21
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/56; C23C14/562
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
149 words
Vacuum depositing apparatus comprising: a substrate holder; a vaporization crucible having a crucible opening having a projected surface; and a mask lying in the path of a vapor stream, from a vaporized material, between said crucible opening and said substrate holder, said mask having a non-horizontal surface facing the vapor stream, said non-horizontal surface being heated to a temperature between the vaporization temperature and the solidification temperature of the vaporized material, and the lowest point of said surface of said mask lying within said projected surface of said crucible opening, said mask comprising a metal supporting structure having two sides, one side facing away from said crucible opening and an other side facing toward said crucible opening and a row arrangement of ceramic building blocks mounted on said other side of said supporting structure, said blocks having sides facing said crucible opening and forming said surface of said mask.
Claim 2
Dependent Claim
149 words
Vacuum depositing apparatus comprising: a substrate holder; a vaporization crucible having a crucible opening having a projected surface; and a mask lying in the path of a vapor stream, from a vaporized material, between said crucible opening and said substrate holder, said mask having a non-horizontal surface facing the vapor stream, said non-horizontal surface being heated to a temperature between the vaporization temperature and the solidification temperature of the vaporized material, and the lowest point of said surface of said mask lying within said projected surface of said crucible opening, said mask comprising a metal supporting structure having two sides, one side facing away from said crucible opening and an other side facing toward said crucible opening and a row arrangement of ceramic building blocks mounted on said other side of said supporting structure, said blocks having sides facing said crucible opening and forming said surface of said mask.
Claim 3
Dependent Claim
29 words
Vacuum depositing apparatus in accordance with claim 1, in which said surface of said mask comprises a material selected from the group consisting of magnesium oxide and zirconium oxide.
Claim 4
Dependent Claim
50 words
Vacuum depositing apparatus in accordance with claim 1, in which said metal supporting structure has a plate having two sides, one side facing away from said crucible opening and another side facing said crucible opening with ribs with flanges in which said ceramic building blocks are disposed between said ribs.
Claim 5
Dependent Claim
19 words
Vacuum depositing apparatus in accordance with claim 3, in which said ribs have principal planes lying in vertical planes.
Claim 6
Dependent Claim
39 words
Vacuum depositing apparatus in accordance with claim 1, in which said crucible opening is rectangular and has a longest axis, and in which said mask has a longest axis aligned parallel to said longest axis of said crucible opening.
Claim 7
Dependent Claim
96 words
Vacuum depositing apparatus in accordance with claim 5, in which said substrate holder is a rotatable cooling cylinder having a surface sector adjacent to said crucible opening and having an axis of rotation parallel to said longest axis of said crucible opening, but is disposed above and laterally offset from said longest axis of said crucible opening, such that, between said surface sector of said cooling cylinder adjacent to said crucible opening and a horizontal plane running through said crucible opening, an approximately wedge-shaped gap is present, and said mask being disposed in said wedge-shaped gap.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-03-09 | 1990-09-08 | 1991-03-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-03-09 | 1994-09-08 | 1995-03-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-03-09 | 1998-09-08 | 1999-03-10 | $7700.00 | Window Closed / Lapsed |