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US5024971A
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Method for patterning submicron openings using an image reversal layer of material
Assignee: Motorola Solutions Inc
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Filing: 1990-08-20
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Granted: 1991-06-18
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Expires: 2010-08-20
Abstract
Abstract The invention provides a method for patterning a submicron opening in a layer of semiconductor material. The method comprises use of conventional photolithography to position a sidewall spacer in a predetermined location on a semiconductor device. A layer of cobalt is selectively reacted with an underlying layer to form an image reversal layer which functions as a hard mask. The submicron features are then transferred into the underlying layer of semiconducting material by etching.
Inventors
- 👤 Frank K. Baker
- 👤 James D. Hayden
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 13:24
CPC Classifications
H; H10; H10P; H10P50/00; H10P50/69; H10P50/691; H10P50/692; H10P50/693; H10P50/695; Y; Y10; Y10S; Y10S148/00; Y10S148/105; Y10S148/147; Y10S438/00; Y10S438/942; Y10S438/945; Y10S438/947
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
171 words
A method for patterning a submicron opening within a first layer of material in a semiconductor device, comprising the steps of: patterning a second layer of material overlying the first layer of material to define a window of a first dimension; forming at least one sidewall spacer from a third layer of material along an edge of the window; etching the second material while leaving the at least one sidewall spacer substantially intact; depositing a fourth layer of material which selectively reacts with the second layer of material but not the at least one sidewall spacer to form a compound which functions as a hard mask; removing unreacted portions of the fourth layer of material and the at least one sidewall spacer to expose a pedetermined portion of the first layer having a second dimension less than the first dimension, and selectively etching the first layer where exposed with an etch process which uses the hard mask provided by the fourth layer to form the small opening in the first layer.
Claim 2
Independent Claim
171 words
A method for patterning a submicron opening within a first layer of material in a semiconductor device, comprising the steps of: patterning a second layer of material overlying the first layer of material to define a window of a first dimension; forming at least one sidewall spacer from a third layer of material along an edge of the window; etching the second material while leaving the at least one sidewall spacer substantially intact; depositing a fourth layer of material which selectively reacts with the second layer of material but not the at least one sidewall spacer to form a compound which functions as a hard mask; removing unreacted portions of the fourth layer of material and the at least one sidewall spacer to expose a pedetermined portion of the first layer having a second dimension less than the first dimension, and selectively etching the first layer where exposed with an etch process which uses the hard mask provided by the fourth layer to form the small opening in the first layer.
Claim 3
Dependent Claim
18 words
The method of claim 1 wherein the step of depositing a fourth layer of material comprises depositing cobalt.
Claim 4
Dependent Claim
28 words
The method of claim 1 wherein the first layer of material in the semiconductor device consists of one of the group of polysilicon, amorphous silicon, or single-crystal silicon.
Claim 5
Dependent Claim
24 words
The method of claim 1 wherein the step of patterning a second layer of material comprises patterning one of silicon dioxide or silicon nitride.
Claim 6
Dependent Claim
52 words
The method of claim 1 wherein the step of forming at least one sidewall spacer from a third layer of material comprises using a material for the third layer which is different from the second layer of material, the material for the third layer comprising one of silicon nitride or silicon dioxide.
Claim 7
Dependent Claim
31 words
The method of claim 1 wherein the step of patterning a second layer of material comprises patterning the second layer to define a window having a width less than one micron.
Claim 8
Dependent Claim
19 words
The method of claim 1 wherein the submicron opening which is patterned separates an electrode of a bipolar transistor.
Claim 9
Dependent Claim
23 words
The method of claim 1 wherein the submicron opening which is patterned defines a side of a gate region of an MOS transistor.
Claim 10
Independent Claim
197 words
A method for patterning at least one submicron opening in a semiconductor using an image reversal layer of material, comprising the steps of: providing a first layer of material; patterning a seocnd layer of material overlying the first layer of material to define a pattern image having at least one window with a predetermined dimension; forming at least one sidewall spacer from a third layer of material along an edge of the at least one window; etching the second material while leaving the at least one sidewall spacer substantially intact; depositing a fourth layer of material which selectively reacts with the second layer of material but not the at least one sidewall spacer to form a compound which functions as a hard mask which is an image reversal of the pattern image; removing unreacted portions of the fourth layer of material and the at least one sidewall spacer to expose a predetermined portion of the first layer having a seocnd dimension less than the first dimension, and selectively etching the first layer where exposed with an etch process which uses the hard mask provided by the fourth layer to form the small opening in the first layer.
Claim 11
Independent Claim
197 words
A method for patterning at least one submicron opening in a semiconductor using an image reversal layer of material, comprising the steps of: providing a first layer of material; patterning a seocnd layer of material overlying the first layer of material to define a pattern image having at least one window with a predetermined dimension; forming at least one sidewall spacer from a third layer of material along an edge of the at least one window; etching the second material while leaving the at least one sidewall spacer substantially intact; depositing a fourth layer of material which selectively reacts with the second layer of material but not the at least one sidewall spacer to form a compound which functions as a hard mask which is an image reversal of the pattern image; removing unreacted portions of the fourth layer of material and the at least one sidewall spacer to expose a predetermined portion of the first layer having a seocnd dimension less than the first dimension, and selectively etching the first layer where exposed with an etch process which uses the hard mask provided by the fourth layer to form the small opening in the first layer.
Claim 12
Dependent Claim
18 words
The method of claim 9 wherein the step of depositing a fourth layer of material comprises depositing cobalt.
Claim 13
Dependent Claim
28 words
The method of claim 9 wherein the first layer of material in the semiconductor device consists of one of the group of polysilicon, amorphous silicon, or single-crystal silicon.
Claim 14
Dependent Claim
24 words
The method of claim 9 wherein the step of patterning a second layer of material comprises patterning one of silicon dioxide or silicon nitride.
Claim 15
Dependent Claim
52 words
The method of claim 9 wherein the step of forming at least one sidewall spacer from a third layer of material comprises using a material for the third layer which is different from the second layer of material, the material for the third layer comprising one of silicon nitride or silicon dioxide.
Claim 16
Dependent Claim
31 words
The method of claim 9 wherein the step of patterning a second layer of material comprises patterning the second layer to define a window having a width less than one micron.
Claim 17
Dependent Claim
19 words
The method of claim 9 wherein the submicron opening which is patterned separates an electrode of a bipolar transistor.
Claim 18
Dependent Claim
23 words
The method of claim 9 wherein the submicron opening which is patterned defines a side of a gate region of an MOS transistor.
References Cited (Backward Citations)
US4378627A
Cited
US4455738A
Cited
EP0113161A2
Cited
US4472872A
Cited
US4784718A
Cited
US4689869A
Cited
US4735681A
Cited
US4855247A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-06-17 | 1994-12-17 | 1995-06-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-06-17 | 1998-12-17 | 1999-06-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-06-17 | 2002-12-17 | 2003-06-18 | $7700.00 | Window Closed / Lapsed |