Patent US5010296A successfully refreshed from Google Patents.
US5010296A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Wafer prober
Assignee: Mitsubishi Electric Corp
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Filing: 1990-03-12
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Granted: 1991-04-23
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Expires: 2010-03-12
Abstract
Abstract A wafer prober includes a supporting device for supporting a wafer on which a plurality of electrode pads are disposed, a plurality of probes for contacting respective electrode pads, a spraying device for spraying a gas onto the electrode pads contacted by the plurality of probes, and an aspirating device for aspirating waste generated by the contact of the probes with the electrode pads and carried by the gas.
Inventors
- 👤 Kazuhisa Okada
- 👤 Ichirou Kusumoto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 15:39
CPC Classifications
G; G01; G01R; G01R1/00; G01R1/02; G01R1/04; G01R31/00; G01R31/28; G01R31/2851; G01R31/2886
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
116 words
A wafer prober comprising: supporting means for supporting a wafer having a plurality of electrode pads disposed on a surface thereof; a plurality of probes for contacting respective electrode pads on a wafer supported by said supporting means; a nozzle having a nozzle opening for spraying a gas onto the electrode pads on the wafer contacted by said probes; and a suction duct having a duct opening for aspirating waste generated by contacting said plurality of probes with the plurality of electrode pads on the wafer and carried by gas sprayed through said nozzle wherein said nozzle opening and said duct opening are disposed directly opposite each other and said plurality of probes are disposed therebetween.
Claim 2
Dependent Claim
116 words
A wafer prober comprising: supporting means for supporting a wafer having a plurality of electrode pads disposed on a surface thereof; a plurality of probes for contacting respective electrode pads on a wafer supported by said supporting means; a nozzle having a nozzle opening for spraying a gas onto the electrode pads on the wafer contacted by said probes; and a suction duct having a duct opening for aspirating waste generated by contacting said plurality of probes with the plurality of electrode pads on the wafer and carried by gas sprayed through said nozzle wherein said nozzle opening and said duct opening are disposed directly opposite each other and said plurality of probes are disposed therebetween.
Claim 3
Dependent Claim
27 words
A wafer prober according to claim 1 wherein said supporting means includes a wafer table and driving means for moving said wafer table relative to said probes.
Claim 4
Dependent Claim
19 words
A wafer prober according to claim 1 wherein said nozzle opening and duct opening have substantially the same shape.
Claim 5
Dependent Claim
19 words
A wafer prober according to claim 3 wherein said nozzle opening and duct opening have substantially the same area.
Claim 6
Dependent Claim
15 words
A wafer prober according to claim 3 wherein the nozzle and duct openings are elongate.
Claim 7
Dependent Claim
152 words
A wafer prober comprising: supporting means for supporting a wafer having a plurality of electrode pads disposed thereon; a plurality of probes for contacting respective electrode pads on a wafer supported by said supporting means; a probe card for supporting the plurality of probes and including a central through hole; a cover including a conical portion including a base having a cover opening at the base for covering said probe card and a wafer supported by said supporting means and including a gas inlet for admitting a gas sprayed on the electrode pads on the wafer contacted by said probes within said cover; and a suction duct disposed within said cover and co-axially mounted with said conical portion of said cover including a duct opening for aspirating waste generated by contacting the plurality of probes with respective electrode pads on the wafer and carried by a gas admitted through said gas inlet.
Claim 8
Dependent Claim
152 words
A wafer prober comprising: supporting means for supporting a wafer having a plurality of electrode pads disposed thereon; a plurality of probes for contacting respective electrode pads on a wafer supported by said supporting means; a probe card for supporting the plurality of probes and including a central through hole; a cover including a conical portion including a base having a cover opening at the base for covering said probe card and a wafer supported by said supporting means and including a gas inlet for admitting a gas sprayed on the electrode pads on the wafer contacted by said probes within said cover; and a suction duct disposed within said cover and co-axially mounted with said conical portion of said cover including a duct opening for aspirating waste generated by contacting the plurality of probes with respective electrode pads on the wafer and carried by a gas admitted through said gas inlet.
Claim 9
Dependent Claim
43 words
A wafer prober according to claim 6 wherein said suction duct includes a generally conical duct portion having a base, said conical duct portion being disposed adjacent the duct opening, the duct opening being disposed at said base of said conical duct portion.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-04-22 | 1994-10-22 | 1995-04-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-04-22 | 1998-10-22 | 1999-04-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-04-22 | 2002-10-22 | 2003-04-23 | $7700.00 | Window Closed / Lapsed |