Prober device having temperature control means

Abstract

Abstract PURPOSE:To elevate the temperature of a wafer to a fixed value rapidly with high precision by mounting an air-feeding hose and an air discharging hose and feeding and circulating a gas at a fixed temperature into a closed chamber in which the wafer is placed. CONSTITUTION:A tempered glass board 13 is releasably supported horizontally to the upper section of a table 1' driven in the X, Y, Z and theta directions while a hood 14 is fitted around the table 1', the upper end of the hood is brought into contact with the glass board 13 in a sliding manner, thus forming a closed space 15 to the upper section of the table 1'. The glass board 13 is the size capable of covering the range of the movement area of the table 1' when the table 1' is shifted in a horizontal surface. A probe card 11' is mounted onto the glass board 13. An air feeding hose 19 and an air discharging hose 20 are set up while penetrating these glass board 13 and card 11', and temperature- controlled air is fed and circulated into the space 15. Accordingly, the temperature of a wafer 3 is elevated quickly to a fixed value when the novel wafer 3 is placed on the table 1'.

Inventors

• 👤 Fujio Ozawa
• 👤 小沢　不二夫
• 👤 Hikari Okitsu
• 👤 興津　光

Bibliographic Details