wafer prober

Abstract

Abstract PURPOSE:To effectively remove aluminum waste and chips at the end of a probe by relatively moving an air nozzle to a probe card, thereby effectively spraying air to any probe card. CONSTITUTION:A probe card 1 having many probes 2 is mounted on a holder 7. An X-Y stage 4 is movable in X and Y directions to dispose a chip to be inspected directly under the probe 2 by placing a wafer. A solenoid valve of an air blow driver 5 is opened by the operation of an air blow controller 6 to inject air from an air nozzle 3. The stage 4 is controlled to be driven to move the end of the nozzle 3 along the ends of all the probes 2 as designated by arrows 8 in this state. The air is sprayed to the ends of all the probes 2, and aluminum chips adhered to the ends of the probes are removed. When the width of the probe group is small and the diameter of the air nozzle is relatively large, one-dimension movable structure in X or Y direction may be employed.

Inventors

• 👤 Shinkichi Deguchi
• 👤 出口　信吉

Bibliographic Details