US4990988A
Expired / Lapsed
US
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Laterally stacked Schottky diodes for infrared sensor applications
Assignee: National Aeronautics and Space Administration
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Filing: 1989-06-09
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Granted: 1991-02-05
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Expires: 2009-06-09
Abstract
Abstract Laterally stacked Schottky diodes (25) for infrared sensor applications are fabricated utilizing porous silicon (10) having pores (12). A Schottky metal contact (24) is formed in the pores, such as by electroplating. The sensors may be integrated with silicon circuits on the same chip with a high quantum efficiency, which is ideal for IR focal plane array applications due to uniformity and reproducibility.
Inventors
- 👤 True-Lon Lin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 01:41
CPC Classifications
H; H10; H10F; H10F77/00; H10F77/10; H10F77/12; H10F77/122; H10F77/1228; H10F30/00; H10F30/20; H10F30/21; H10F30/22; H10F30/227; H10F39/00; H10F39/10; H10F39/12; H10F39/15; H10F39/157; H10F39/1575
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
51 words
An infrared sensor comprising a plurality of laterally stacked Schottky diodes, each diode comprising a Schottky barrier metal formed in an opening in a silicon substrate, each said opening having a diameter ranging from about 50 to 200 Å and a depth ranging from about 1 to more than 100 μm.
Claim 2
Dependent Claim
51 words
An infrared sensor comprising a plurality of laterally stacked Schottky diodes, each diode comprising a Schottky barrier metal formed in an opening in a silicon substrate, each said opening having a diameter ranging from about 50 to 200 Å and a depth ranging from about 1 to more than 100 μm.
Claim 3
Dependent Claim
25 words
The sensor of claim 1 wherein said Schottky barrier metal comprises a metal selected from the group consisting of platinum, iridium, palladium, cobalt and nickel.
Claim 4
Dependent Claim
20 words
The sensor of claim 1 further including a silicide portion formed between said silicon substrate and said Schottky barrier metal.
Claim 5
Dependent Claim
26 words
The sensor of claim 3 wherein said silicide comprises a member selected from the group consisting of the silicides of platinum, iridium, palladium, cobalt and nickel.
Claim 6
Dependent Claim
16 words
The sensor of claim 1 further including a metal contact formed to said Schottky barrier metal.
Claim 7
Dependent Claim
26 words
The sensor of claim 5 wherein said metal contact comprises a metal selected from the group consisting of platinum, iridium, palladium, cobalt, nickel, aluminum, and gold.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-02-04 | 1994-08-06 | 1995-02-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-02-04 | 1998-08-06 | 1999-02-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-02-04 | 2002-08-06 | 2003-02-05 | $7700.00 | Window Closed / Lapsed |