Patent US4988424A successfully refreshed from Google Patents.
US4988424A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Mask and method for making gradient sputtered coatings
Assignee: PPG Industries Ohio Inc
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Filing: 1989-06-07
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Granted: 1991-01-29
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Expires: 2009-06-07
Abstract
Abstract Sputtered coatings of gradient thicknesses are produced by employing a foraminous mask between the cathode and the substrate. The size of openings in the foraminous mask may be varied in different areas to provide versatility in controlling the gradient patterns. The invention is particularly suitable for producing gradient electroconductive heating films on transparencies.
Inventors
- 👤 Danny L. Woodward
- 👤 Chester Thrasher
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 14:36
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/04; C23C14/042; C23C14/044
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
111 words
Apparatus for sputter coating a substrate with a coating having gradations in thickness comprising a sputtering target electrode, substrate support means adapted to support a substrate to be coated in facing relationship to the target electrode, the substrate being substantially larger in area than the target electrode, the target electrode and the substrate support having means associated therewith for providing reciprocating relative motion therebetween, a foraminous mask member having a large number of apertures between the target electrode and at least a portion of the substrate and spaced therefrom a distance sufficient to partially block deposition of sputtered material from the electrode onto said at least a portion of the substrate.
Claim 2
Dependent Claim
111 words
Apparatus for sputter coating a substrate with a coating having gradations in thickness comprising a sputtering target electrode, substrate support means adapted to support a substrate to be coated in facing relationship to the target electrode, the substrate being substantially larger in area than the target electrode, the target electrode and the substrate support having means associated therewith for providing reciprocating relative motion therebetween, a foraminous mask member having a large number of apertures between the target electrode and at least a portion of the substrate and spaced therefrom a distance sufficient to partially block deposition of sputtered material from the electrode onto said at least a portion of the substrate.
Claim 3
Dependent Claim
26 words
The apparatus of claim 1 wherein the foraminous mask has openings of one size in one area and openings of a different size in other areas.
Claim 4
Dependent Claim
22 words
The apparatus of claim 2 wherein the foraminous mask includes at least two layers of foraminous material in at least some portions.
Claim 5
Dependent Claim
38 words
The apparatus of claim 2 wherein at least one enlarged opening is provided in at least one of said areas of the foraminous mask, the enlarged opening being larger than other openings in that area of the mask.
Claim 6
Dependent Claim
15 words
The apparatus of claim 1 wherein the foraminous mask includes at least one non-foraminous area.
Claim 7
Dependent Claim
18 words
The apparatus of claim 5 wherein the non-foraminous area includes a solid sheet carried on the foraminous mask.
Claim 8
Dependent Claim
13 words
The apparatus of claim 1 wherein the foraminous mask includes expanded mesh material.
Claim 9
Independent Claim
12 words
The apparatus of claim I wherein the foraminous mask includes screen material.
Claim 10
Dependent Claim
12 words
The apparatus of claim 1 wherein the foraminous mask includes perforated sheeting.
Claim 11
Independent Claim
104 words
A method of sputter coating a substrate with a coating having gradations in thickness wherein a coating is sputtered from a target electrode onto the substrate which is of substantially larger area than the target electrode, reciprocating relative motion is provided between the substrate and the target electrode during sputtering, and the deposition of the coating onto at least a portion of the substrate is partially masked by means of a foraminous mask having a large number of apertures interposed between the electrode and said at least portion of the substrate and spaced therefrom a sufficient distance to produce gradations in the coating thickness.
Claim 12
Independent Claim
104 words
A method of sputter coating a substrate with a coating having gradations in thickness wherein a coating is sputtered from a target electrode onto the substrate which is of substantially larger area than the target electrode, reciprocating relative motion is provided between the substrate and the target electrode during sputtering, and the deposition of the coating onto at least a portion of the substrate is partially masked by means of a foraminous mask having a large number of apertures interposed between the electrode and said at least portion of the substrate and spaced therefrom a sufficient distance to produce gradations in the coating thickness.
Claim 13
Dependent Claim
12 words
The method of claim 10 wherein the substrate is a transparent sheet.
Claim 14
Dependent Claim
13 words
The method of claim 11 wherein the coating is a transparent, electroconductive coating.
Claim 15
Dependent Claim
40 words
The method of claim 10 wherein the partial masking is more complete in some areas of the foraminous mask than in other areas in accordance with the distribution of openings in the foraminous mask, whereby a gradient coating is produced.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-01-28 | 1994-07-30 | 1995-01-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-01-28 | 1998-07-30 | 1999-01-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-01-28 | 2002-07-30 | 2003-01-29 | $7700.00 | Window Closed / Lapsed |