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US4980197A
Expired / Lapsed
US
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Method of producing metallic structures on inorganic non-conductors
Assignee: Atotech Deutschland GmbH and Co KG
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Filing: 1986-04-16
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Granted: 1990-12-25
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Expires: 2006-04-16
Abstract
Abstract A method for manufacturing metallic structures on inorganic non-conductive substrates, in which desired structures to be produced on the upper faces of the substrates are covered with screen means and the objects are then subjected to the action of reactive halogen-containing gases in a glow-discharge zone. Then the screen means are removed from the objects and they are metallized by known physical methods.
Inventors
- 👤 Harald Suhr
- 👤 Ernst Feurer
- 👤 Christian Oehr
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 15:15
CPC Classifications
C; C04; C04B; C04B41/00; C04B41/009; C04B41/45; C04B41/50; C04B41/51; C04B41/80; C04B41/81; C04B41/85; C04B41/88; H; H05; H05K; H05K3/00; H05K3/02
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
127 words
A method of manufacturing conductive metallic structures on inorganic non-conductive objects, which comprises the following steps: (a) preparing conductive structures by applying to upper surfaces of the objects masks, lacquers or other screen means in the position where the conductive structure is to be formed; (b) treating the objects with said masks, lacquers or other screen means thereon in a glow-discharge zone under the action of reactive halogen-containing gases; (c) removing said masks, lacquers or other screen means from the objects after said treating step has been completed; (d) metalizing the objects by known physical methods; and (e) immersing the objects after said metallizing step into water or aqueous solutions of complex-forming agents, acids, alkalines or material which dissolve resulting metal halide-compositions, to develop said conductive structures.
Claim 2
Independent Claim
127 words
A method of manufacturing conductive metallic structures on inorganic non-conductive objects, which comprises the following steps: (a) preparing conductive structures by applying to upper surfaces of the objects masks, lacquers or other screen means in the position where the conductive structure is to be formed; (b) treating the objects with said masks, lacquers or other screen means thereon in a glow-discharge zone under the action of reactive halogen-containing gases; (c) removing said masks, lacquers or other screen means from the objects after said treating step has been completed; (d) metalizing the objects by known physical methods; and (e) immersing the objects after said metallizing step into water or aqueous solutions of complex-forming agents, acids, alkalines or material which dissolve resulting metal halide-compositions, to develop said conductive structures.
Claim 3
Dependent Claim
26 words
The method as defined in claim 1, wherein said halogen-containing gases are selected from the group consisting of boron trichloride, silicon tetrachloride, boron trifluoride and tetrachlorocarbon.
Claim 4
Dependent Claim
16 words
The method as defined in claim 1, wherein said metallizing step is carried out by vapor-depositing.
Claim 5
Dependent Claim
17 words
The method as defined in claim 1, wherein said metallizing step is carried out by cathode disintegration.
Claim 6
Dependent Claim
17 words
The method as defined in claim 1, wherein said metallizing step is carried out by plasma-metal depositing.
Claim 7
Dependent Claim
23 words
The method as defined in claim 1, wherein the structures obtained in said metallizing step are reinforced in chemical baths for metallic deposition.
Claim 8
Dependent Claim
25 words
The method as defined in claim 6, wherein said objects are immersed directly into a chemical bath for metallic deposition after said physical metallizing step.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-12-24 | 1994-06-25 | 1994-12-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-12-24 | 1998-06-25 | 1998-12-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-12-24 | 2002-06-25 | 2002-12-25 | $7700.00 | Window Closed / Lapsed |