US4970567A — Method and apparatus for detecting infrared radia…

Claim 1

Independent Claim 242 words

A monolithic structure for detecting infrared radiation comprising: a substrate having readout and signal processing circuits integrated therein, said substrate formed from a material selected from the group consisting of silicon, gallium arsenide, and germanium; a first semiconductor layer grown on said substrate which has said readout and signal processing circuits integrated therein, said first layer of simiconductor material formed from a material selected from the group consisting of mercury-cadmium-telluride, mercury-zinc-telluride, mercury-cadmium-selenide, mercury-zinc-selenide, mercury-cadmium-sulfide, mercury-zince-sulfide, lead-tin-telluride, lead-tin-selenide, lead-tin-sulfide, indium-arsenide-antimonide, gallium-indium-antimonide, and gallium-antimonide-arsenide, said first semiconductor layer disposed directly over and displaced from at least a portion of said readout and signal processing electronics; a first passivation layer disposed between said substrate and said first semiconductor layer; A plurality of nucleation windows disposed on said first passivation layer operable to control the formation of said first semiconductor layer, at least one of said nucleation windows permitting electrical communication between said first semiconductor layer and said readout and signal processing circuits; a plurality of nucleation crystals formed in said nucleation windows, said nucleation crystals formed from a material selected from the group consisting of mercury-cadmiun-telluride, mercury-zinc-telluride, mercury-cadmium-selenide, mercury-zinc-selenide, mercury-cadmium-sulfide, mercury-zinc-sulfide, lead-tin-telluride, lead-tin-selenide, lead-tin-sulfide, indium-arsenide-antimonide, gallium-indium-antimonide, or gallium-antimonide-arsenide; and a second semiconductor layer grown on said first semiconductor layer, said first and second semiconductor layers operable to deliver an electrical signal to said readout and signal processing circuits in said substrate in response to the infrared radiation received by said first and second semiconductor layers.

Claim 2

Dependent Claim 242 words

A monolithic structure for detecting infrared radiation comprising: a substrate having readout and signal processing circuits integrated therein, said substrate formed from a material selected from the group consisting of silicon, gallium arsenide, and germanium; a first semiconductor layer grown on said substrate which has said readout and signal processing circuits integrated therein, said first layer of simiconductor material formed from a material selected from the group consisting of mercury-cadmium-telluride, mercury-zinc-telluride, mercury-cadmium-selenide, mercury-zinc-selenide, mercury-cadmium-sulfide, mercury-zince-sulfide, lead-tin-telluride, lead-tin-selenide, lead-tin-sulfide, indium-arsenide-antimonide, gallium-indium-antimonide, and gallium-antimonide-arsenide, said first semiconductor layer disposed directly over and displaced from at least a portion of said readout and signal processing electronics; a first passivation layer disposed between said substrate and said first semiconductor layer; A plurality of nucleation windows disposed on said first passivation layer operable to control the formation of said first semiconductor layer, at least one of said nucleation windows permitting electrical communication between said first semiconductor layer and said readout and signal processing circuits; a plurality of nucleation crystals formed in said nucleation windows, said nucleation crystals formed from a material selected from the group consisting of mercury-cadmiun-telluride, mercury-zinc-telluride, mercury-cadmium-selenide, mercury-zinc-selenide, mercury-cadmium-sulfide, mercury-zinc-sulfide, lead-tin-telluride, lead-tin-selenide, lead-tin-sulfide, indium-arsenide-antimonide, gallium-indium-antimonide, or gallium-antimonide-arsenide; and a second semiconductor layer grown on said first semiconductor layer, said first and second semiconductor layers operable to deliver an electrical signal to said readout and signal processing circuits in said substrate in response to the infrared radiation received by said first and second semiconductor layers.

Claim 3

Dependent Claim 22 words

The apparatus of claim 1, further comprising a second pasivation layer disposed between said first passivation layer and said first semiconductor layer.

Claim 4

Dependent Claim 18 words

The apparatus of claim 2, wherein nucleation of said first semiconductor layer occurs only in said nucleation windows.

Claim 5

Dependent Claim 38 words

The apparatus of claim 1, further comprising a third semiconductor layer disposed on said second semiconductor layer, said third semiconductor layer operable to reduce the surface recombination velocity of the free charge carriers in said second semiconductor layer.

Claim 6

Dependent Claim 18 words

The apparatus of claim 4, further comprising a layer of anti-reflection material disposed on said third semiconductor layer.

Claim 7

Independent Claim 195 words

A method for detecting infrared radiation comprising: forming first and second layers of semiconductor material by growing nucleation crystals using metallorganic vapor phase epitaxy in nucleation windows of a first passivation layer which is disposed on a substrate, said nucleation cyrstals being formed from the same material as said first layer of semiconductor material; exposing said first layer and said second layer of semiconductor material to a source of infrared radiation, said first and second semiconductor layers being formed from a material selected from the group consisting of mercury-cadmium-telluride, mercury-zinc-telluride, mercury-cadmium-selenide, mercury-zinc-selenide, mercury-cadmium-sulfide, mercury-zinc-sulfide, lead-tin-telluride, lead-tin-selenide, lead-tin-sulfide; generating a photocurrent in said first and second layers of semiconductor material; sensing said photocurrent by readout and signal processing circuits disposed within said substrate upon which said first and second semiconductor layers are grown, said first semiconductor layer disposed directly over and displaced from at least a portion of said readout and signal processing electronics, said substrate being formed of a material selected from the group consisting of silicon, gallium arsenide, or germanium; and causing electrical communication between said first semiconductor layer and said readout and signal processing circuits through at least one of said nucleation windows.

Claim 8

Independent Claim 195 words

A method for detecting infrared radiation comprising: forming first and second layers of semiconductor material by growing nucleation crystals using metallorganic vapor phase epitaxy in nucleation windows of a first passivation layer which is disposed on a substrate, said nucleation cyrstals being formed from the same material as said first layer of semiconductor material; exposing said first layer and said second layer of semiconductor material to a source of infrared radiation, said first and second semiconductor layers being formed from a material selected from the group consisting of mercury-cadmium-telluride, mercury-zinc-telluride, mercury-cadmium-selenide, mercury-zinc-selenide, mercury-cadmium-sulfide, mercury-zinc-sulfide, lead-tin-telluride, lead-tin-selenide, lead-tin-sulfide; generating a photocurrent in said first and second layers of semiconductor material; sensing said photocurrent by readout and signal processing circuits disposed within said substrate upon which said first and second semiconductor layers are grown, said first semiconductor layer disposed directly over and displaced from at least a portion of said readout and signal processing electronics, said substrate being formed of a material selected from the group consisting of silicon, gallium arsenide, or germanium; and causing electrical communication between said first semiconductor layer and said readout and signal processing circuits through at least one of said nucleation windows.

Claim 9

Dependent Claim 25 words

The method of claim 6, wherein said first layer of semiconductor material, said second layer of semiconductor material and said substrate comprise a monolithic structure.

Claim 10

Dependent Claim 24 words

The method of claim 6, wherein said first passivation layer is separated from said first layer of semiconductor material by a second passivation layer.

Claim 11

Dependent Claim 52 words

The method of claim 6, comprising the additional step of reducing the surface recombination velocity of free charge carriers in said second layer of semiconductor material by free charge carriers in said second layer of semiconductor material by disposing a third layer of semiconductor material on said second layer of semiconductor material.

Claim 12

Dependent Claim 22 words

The method of claim 6, further comprising the additional step of allowing infrared radiation to pass through a layer of anti-reflection material.

Claim 13

Dependent Claim 277 words

An array of monolithic structures for detecting infrared radiation, each of said monolithic structures comprising: a substrate having readout and signal processing circuits integrated therein, said substrate formed from a material selected to optimize performance of said readout and signal processing circuits; a first semiconductor layer grown on said substrate which has said readout and signal processing circuits integrated therein, said first layer of semiconductor material formed from a material selected to optimize infrared detection, said first semiconductor layer disposed directly over and displaced from at least a portion of said readout and signal processing electronics; a plurality of passivation layers disposed between said substrate and said first layer of semiconductor material; a plurality of nucleation windows within said plurality of passivation layers, said plurality of nucleation windows operable to control the formation of said first semiconductor layers, at least one of said nucleation windows permitting electrical communication between said first semiconductor layer and said readout and signal processing circuits; a plurality of nucleation crystals formed in said nucleation windows, said necleation crystals formed from the same material as said first semiconductor layer; a second semiconductor layer disposed on said first semiconductor layer operable to deliver an electrical signal to said readout and signal processing circuits in said substrate in response to the infrared radiation received by said first and second semiconductor layers; a third semiconductor layer disposed on said second semiconductor layer operable to reduce the surface recombination velocity of the free charge carriers in said second semiconductor layer; and an anti-reflection coating disposed on the third semiconductor layer, said anti-reflection coating having an index of refraction between that of air and the third semiconductor layer.

Claim 14

Dependent Claim 277 words

An array of monolithic structures for detecting infrared radiation, each of said monolithic structures comprising: a substrate having readout and signal processing circuits integrated therein, said substrate formed from a material selected to optimize performance of said readout and signal processing circuits; a first semiconductor layer grown on said substrate which has said readout and signal processing circuits integrated therein, said first layer of semiconductor material formed from a material selected to optimize infrared detection, said first semiconductor layer disposed directly over and displaced from at least a portion of said readout and signal processing electronics; a plurality of passivation layers disposed between said substrate and said first layer of semiconductor material; a plurality of nucleation windows within said plurality of passivation layers, said plurality of nucleation windows operable to control the formation of said first semiconductor layers, at least one of said nucleation windows permitting electrical communication between said first semiconductor layer and said readout and signal processing circuits; a plurality of nucleation crystals formed in said nucleation windows, said necleation crystals formed from the same material as said first semiconductor layer; a second semiconductor layer disposed on said first semiconductor layer operable to deliver an electrical signal to said readout and signal processing circuits in said substrate in response to the infrared radiation received by said first and second semiconductor layers; a third semiconductor layer disposed on said second semiconductor layer operable to reduce the surface recombination velocity of the free charge carriers in said second semiconductor layer; and an anti-reflection coating disposed on the third semiconductor layer, said anti-reflection coating having an index of refraction between that of air and the third semiconductor layer.

Claim 15

Dependent Claim 32 words

The array of claim 11, wherein said monolithic structure further comprises an ohmic contact permitting electrical communication between said first and second semiconductor layers and said read out and signal processing circuits.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1993-11-12	1994-05-14	1994-11-13	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	1997-11-12	1998-05-14	1998-11-13	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2001-11-12	2002-05-14	2002-11-13	$7700.00	Window Closed / Lapsed

Method and apparatus for detecting infrared radiation

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