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US4969956A
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Transparent thin film thermocouple
Assignee: United States Department of Commerce
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Filing: 1989-12-19
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Granted: 1990-11-13
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Expires: 2009-12-19
Abstract
Abstract A transparent thin film thermocouple and a method of manufacturing comprig a positive element of indium tin oxide (ITO) and a negative element of indium oxide (In 2 O 3 ) formed on a surface by reactive sputtering with the elements being electrically joined to form a hot junction for conversion of heat into electricity.
Inventors
- 👤 Kenneth G. Kreider
- 👤 Moshe Yust
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-10 01:35
CPC Classifications
H; H10; H10N; H10N10/00; H10N10/01; H10N10/80; H10N10/81; H10N10/817; H10N10/85; H10N10/851; H10N10/855
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
87 words
A method for producing a transparent thin film thermocouple on a surface comprising the steps of: forming a thin film element of indium tin oxide (ITO) with an In:Sn weight fraction ratio of 9:1 on said surface by reactive sputtering; and forming a thin film element of indium oxide (In 2 O 3 ) or ITO with a lower tin constant than the positive leg on said surface by reactive sputtering; said elements being electrically joined to form a hot junction for conversion of heat into electricity.
Claim 2
Independent Claim
87 words
A method for producing a transparent thin film thermocouple on a surface comprising the steps of: forming a thin film element of indium tin oxide (ITO) with an In:Sn weight fraction ratio of 9:1 on said surface by reactive sputtering; and forming a thin film element of indium oxide (In 2 O 3 ) or ITO with a lower tin constant than the positive leg on said surface by reactive sputtering; said elements being electrically joined to form a hot junction for conversion of heat into electricity.
Claim 3
Dependent Claim
30 words
A method according to claim 1, in which said reactive sputtering is accomplished with a magnetron source in an argon and oxygen atmosphere and a surface temperature between 550-600 K.
Claim 4
Dependent Claim
16 words
A method according to claim 2, wherein said atmosphere comprises 10 to 40 % of oxygen.
Claim 5
Dependent Claim
76 words
A transparent thin film thermoelectric device for the conversion of heat into electricity comprising: a surface; a positive element comprising indium tin oxide (ITO) with an In:Sn weight fraction ratio of 9:1 formed on said surface; a negative element comprising indium oxide (In 2 O 3 ) or ITO with a lower tin content than the positive leg formed on said surface; and said positive and negative elements being electrically joined to form a hot junction.
Claim 6
Dependent Claim
76 words
A transparent thin film thermoelectric device for the conversion of heat into electricity comprising: a surface; a positive element comprising indium tin oxide (ITO) with an In:Sn weight fraction ratio of 9:1 formed on said surface; a negative element comprising indium oxide (In 2 O 3 ) or ITO with a lower tin content than the positive leg formed on said surface; and said positive and negative elements being electrically joined to form a hot junction.
Claim 7
Dependent Claim
15 words
A thermoelectric device as claimed in claim 4 wherein said positive element contains 10% tin.
Claim 8
Dependent Claim
21 words
A thermoelectric device as claimed in claim 1, wherein said positive and negative elements are thin films formed by reactive sputtering.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-11-12 | 1994-05-14 | 1994-11-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-11-12 | 1998-05-14 | 1998-11-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-11-12 | 2002-05-14 | 2002-11-13 | $7700.00 | Window Closed / Lapsed |