US4922106A
Expired / Lapsed
US
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Ion beam scanning method and apparatus
Assignee: Varian Semiconductor Equipment Associates Inc
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Filing: 1987-04-08
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Granted: 1990-05-01
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Expires: 2007-04-08
Abstract
Abstract An ion beam scanning method and apparatus produces a parallel scanned ion beam with a magnetic deflector having in one instance wedge-shaped pole pieces that develop a uniform magnetic field. A beam accelerator for the scanned beam has a slot-shaped passage which the scanned beam traverses. The beam scan and the beam traverse over a target object are controlled to attain selected beam current, and correspondingly ion dose, on a target object.
Inventors
- 👤 Donald W. Berrian
- 👤 Robert E. Kaim
- 👤 John W. Vanderpot
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:22
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/317; H01J37/3171; H01J37/02; H01J37/04; H01J37/147
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
201 words
In apparatus for producing an accelerated scanning ion beam and having (i) ion beam accelerator means and (ii) a scanning beam source for producing an ion beam and directing said beam along a beam axis and through said accelerator for exiting therefrom, said scanning beam source producing said beam with a lineal scan having a scan width that is a multiple of the scan height at least at the exit of the beam from said accelerator the improvement wherein A. said accelerator means has at least first and second electrode means spaced apart along the beam axis and for supporting a beam-accelerating axial field therebetween, B. each electrode means forming a passage therethrough for the passage of said scanning beam, C. at least a second of said electrode means proximal to the exit of the beam from said accelerator forming said passage with a slot-like configuration that has a slot length that is a multiple of the slot width and that is oriented for receiving said scanning beam with said scanning width aligned with said slot length and for subjecting said scanning beam to electrostatic fringe field having substantially uniform magnitude and direction at each instantaneous trajectory of said scanning beam.
Claim 2
Dependent Claim
201 words
In apparatus for producing an accelerated scanning ion beam and having (i) ion beam accelerator means and (ii) a scanning beam source for producing an ion beam and directing said beam along a beam axis and through said accelerator for exiting therefrom, said scanning beam source producing said beam with a lineal scan having a scan width that is a multiple of the scan height at least at the exit of the beam from said accelerator the improvement wherein A. said accelerator means has at least first and second electrode means spaced apart along the beam axis and for supporting a beam-accelerating axial field therebetween, B. each electrode means forming a passage therethrough for the passage of said scanning beam, C. at least a second of said electrode means proximal to the exit of the beam from said accelerator forming said passage with a slot-like configuration that has a slot length that is a multiple of the slot width and that is oriented for receiving said scanning beam with said scanning width aligned with said slot length and for subjecting said scanning beam to electrostatic fringe field having substantially uniform magnitude and direction at each instantaneous trajectory of said scanning beam.
Claim 3
Dependent Claim
73 words
In apparatus according to claim 1, the further improvement wherein A. said scanning beam source produces said beam to have parallel beam paths during the traverse through said accelerator means and B. said passage of said first electrode means is axially aligned and in register with said passage of said second electrode means, and said passage of said first electrode means has a slot-like configuration identical to that of said second electrode means.
Claim 4
Dependent Claim
28 words
In apparatus according to claim 1, the further improvement wherein said second electrode means forms said slot-like passage with a length to width ratio in excess of three.
Claim 5
Dependent Claim
34 words
In apparatus according to claim 1, the further improvement wherein said second electrode means forms said passage with a slot-like configuration having a length to width ratio of the order of magnitude of ten.
Claim 6
Dependent Claim
113 words
In apparatus for producing a scanning ion beam and having (i) a source of ions of selected mass directed in a beam along a first axis, and (ii) scanning deflector means for deflecting said beam of ions to form a scanning ion beam for scanning across a target path at a target location, the improvement comprising A. ion detection means for sensing the current in said ion bean continuously along said target path, and B. deflector drive means connected with said ion detection means and with said deflector means for adjusting the deflection of said ion beam across said target path for attaining a selected ion beam current correspondingly continuously along said path.
Claim 7
Dependent Claim
113 words
In apparatus for producing a scanning ion beam and having (i) a source of ions of selected mass directed in a beam along a first axis, and (ii) scanning deflector means for deflecting said beam of ions to form a scanning ion beam for scanning across a target path at a target location, the improvement comprising A. ion detection means for sensing the current in said ion bean continuously along said target path, and B. deflector drive means connected with said ion detection means and with said deflector means for adjusting the deflection of said ion beam across said target path for attaining a selected ion beam current correspondingly continuously along said path.
Claim 8
Dependent Claim
198 words
In apparatus for producing a scanning ion beam and having (i) a source of ions of selected mass directed in a beam along a first axis, and (ii) scanning deflector means for deflecting said beam of ions to form a scanning ion beam for scanning across a target path at a target location, the improvement comprising A. ion detection means for sensing the current in said ion beam at least at multiple locations along said target path, B. deflector drive means connected with said ion detection means and with said deflector means for adjusting the deflection of said ion beam across said target path for attaining a selected ion beam current at each said location along said path, C. means for providing relative movement of a target object across said target path at said target location, D. means for sensing current in said ion beam at a selected end of said target path for producing an end-of-path beam signal, and E. means responsive to said end-of-path signal and connected with said target object moving means for adjusting the movement of said target object to attain selected ion doses at said selected target path locations on said target object.
Claim 9
Dependent Claim
198 words
In apparatus for producing a scanning ion beam and having (i) a source of ions of selected mass directed in a beam along a first axis, and (ii) scanning deflector means for deflecting said beam of ions to form a scanning ion beam for scanning across a target path at a target location, the improvement comprising A. ion detection means for sensing the current in said ion beam at least at multiple locations along said target path, B. deflector drive means connected with said ion detection means and with said deflector means for adjusting the deflection of said ion beam across said target path for attaining a selected ion beam current at each said location along said path, C. means for providing relative movement of a target object across said target path at said target location, D. means for sensing current in said ion beam at a selected end of said target path for producing an end-of-path beam signal, and E. means responsive to said end-of-path signal and connected with said target object moving means for adjusting the movement of said target object to attain selected ion doses at said selected target path locations on said target object.
Claim 10
Dependent Claim
55 words
In apparatus according to claim 6, the further improvement wherein said adjusting means adjusts at least any one of the amount or the speed of target object movement during the time of a beam scan thereacross or the number of movements of a target object across said target path, for attaining said selected ion dose.
Claim 11
Dependent Claim
195 words
In apparatus for producing a scanning ion beam and having (i) a source of ions of selected mass directed in a beam along a first axis, and (ii) scanning deflector means for deflecting said beam of ions to form a scanning ion beam for scanning across a target path at a target location, the improvement comprising A. ion detection means for sensing the current in said ion beam at least at multiple locations along said target path, B. deflector drive means connected with said ion detection means and with said deflector means for adjusting the deflection of said ion beam across said target path for attaining a selected ion beam current at each said location along said path, C. means for providing relative movement of a target object across said target path at said target location, D. means for sensing current in said ion beam incident on said target location for producing a beam-responsive signal, and E. means responsive to said beam signal and responsive to relative location of said target object for adjusting said scanning ion beam for attaining a selected ion dose at each of selected target path locations on said target object.
Claim 12
Dependent Claim
195 words
In apparatus for producing a scanning ion beam and having (i) a source of ions of selected mass directed in a beam along a first axis, and (ii) scanning deflector means for deflecting said beam of ions to form a scanning ion beam for scanning across a target path at a target location, the improvement comprising A. ion detection means for sensing the current in said ion beam at least at multiple locations along said target path, B. deflector drive means connected with said ion detection means and with said deflector means for adjusting the deflection of said ion beam across said target path for attaining a selected ion beam current at each said location along said path, C. means for providing relative movement of a target object across said target path at said target location, D. means for sensing current in said ion beam incident on said target location for producing a beam-responsive signal, and E. means responsive to said beam signal and responsive to relative location of said target object for adjusting said scanning ion beam for attaining a selected ion dose at each of selected target path locations on said target object.
Claim 13
Dependent Claim
38 words
In apparatus according to claim 8, a further improvement wherein said adjusting means includes means for adjusting the duration of each ion beam scan across said target object at said target path, for attaining said selected ion dose.
Claim 14
Dependent Claim
160 words
Apparatus for irradiating a target object with a scanning particle beam having a particle beam source for producing a particle beam with a substantially planar scan along a target path at a selected target surface in response to an electrical scanning signal, and having the improvement comprising A. beam detection means for exposure to the scanning beam during scanning along said target path and at substantially any location along said target path, for producing a beam signal responsive to beam particle density, B. position means for providing a position signal responsive to the location of the beam relative to said target surface at the time of exposure of said detection means to said scanning beam, and C. dose control means responsive to said beam signal and to the position signal for producing and applying to the scanning source an electrical correction signal for producing said scanning beam to attain selected beam particle density at selected locations along said target path.
Claim 15
Dependent Claim
160 words
Apparatus for irradiating a target object with a scanning particle beam having a particle beam source for producing a particle beam with a substantially planar scan along a target path at a selected target surface in response to an electrical scanning signal, and having the improvement comprising A. beam detection means for exposure to the scanning beam during scanning along said target path and at substantially any location along said target path, for producing a beam signal responsive to beam particle density, B. position means for providing a position signal responsive to the location of the beam relative to said target surface at the time of exposure of said detection means to said scanning beam, and C. dose control means responsive to said beam signal and to the position signal for producing and applying to the scanning source an electrical correction signal for producing said scanning beam to attain selected beam particle density at selected locations along said target path.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-04-30 | 1993-10-30 | 1994-05-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-04-30 | 1997-10-30 | 1998-05-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-04-30 | 2001-10-30 | 2002-05-01 | $7700.00 | Window Closed / Lapsed |