US4449051A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Dose compensation by differential pattern scanning
Assignee: Varian Semiconductor Equipment Associates Inc
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Filing: 1982-02-16
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Granted: 1984-05-15
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Expires: 2002-02-16
Abstract
Abstract Precise control of radiation dose distribution over the surface of a workpiece is obtained by differential scanning in accord with a density of scanning traces function. This may be accomplished by differential repetition of the trace in the incremented area dA at generalized coordinates (p,q) of the surface, by frequency modulation of the waveform(s) controlling the scan, by spatial modulation of the scan through choice of scan pattern, or by combinations of these approaches.
Inventors
- 👤 Edward H. Berkowitz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 19:55
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/317; H01J37/3171
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
95 words
A method for irradiating a workpiece with a flux of charged particles to obtain a desired spatial distribution of integrated radiation dose thereon, comprising (a) scanning the surface of the workpiece with said charged particle beam to irradiate said surface along locii of a first pattern in order to obtain a first integrated dose distribution over said surface, (b) scanning selected regions of said surface wherein the integrated dose distribution established by step (a) is less than said desired spatial distribution than said regions, and (c) repeating step (b) until said desired distribution is accomplished.
Claim 2
Independent Claim
95 words
A method for irradiating a workpiece with a flux of charged particles to obtain a desired spatial distribution of integrated radiation dose thereon, comprising (a) scanning the surface of the workpiece with said charged particle beam to irradiate said surface along locii of a first pattern in order to obtain a first integrated dose distribution over said surface, (b) scanning selected regions of said surface wherein the integrated dose distribution established by step (a) is less than said desired spatial distribution than said regions, and (c) repeating step (b) until said desired distribution is accomplished.
Claim 3
Dependent Claim
14 words
The method of claim 1 wherein said desired distribution is uniform over said surface.
Claim 4
Dependent Claim
10 words
The method of claim 1 wherein said surface is planar.
Claim 5
Independent Claim
82 words
A method for irradiating a workpiece with a flux of charged particles to obtain a desired spatial distribution of integrated radiation dose in accord with a function of generalized coordinates p and q on the surface of said workpiece, comprising (a) scanning to define irradiated path segments mutually spaced apart over a surface portion of said workpiece and forming a first pattern thereon, (b) modulating said scanning to control said spacing of said path segments in accord with a desired functional dependence.
Claim 6
Independent Claim
82 words
A method for irradiating a workpiece with a flux of charged particles to obtain a desired spatial distribution of integrated radiation dose in accord with a function of generalized coordinates p and q on the surface of said workpiece, comprising (a) scanning to define irradiated path segments mutually spaced apart over a surface portion of said workpiece and forming a first pattern thereon, (b) modulating said scanning to control said spacing of said path segments in accord with a desired functional dependence.
Claim 7
Dependent Claim
24 words
The method of claim 4 wherein said scanning step comprises directing said flux along a first coordinate p in accord with a periodic waveform.
Claim 8
Dependent Claim
25 words
The method of claim 5 wherein said modulating step comprises modulating the period of said waveform in accord with the value of said coordinate q.
Claim 9
Independent Claim
82 words
The method of distributing a radiation dose over a surface, comprising scanning a radiation flux over a path s on said surface with a radiation distribution function dq(s) along a path s on said surface, distributing paths s over said surface in accord with a density of traces weighting function ρ(p,q) where p and q are generalized coordinates on said surface and said function ρ(p,q) measures the numbers of traces M in an area increment dA=dp.dq at respective coordinates p and q.
Claim 10
Independent Claim
82 words
The method of distributing a radiation dose over a surface, comprising scanning a radiation flux over a path s on said surface with a radiation distribution function dq(s) along a path s on said surface, distributing paths s over said surface in accord with a density of traces weighting function ρ(p,q) where p and q are generalized coordinates on said surface and said function ρ(p,q) measures the numbers of traces M in an area increment dA=dp.dq at respective coordinates p and q.
Claim 11
Dependent Claim
28 words
The method of claim 7 wherein said surface is non-planar and said weighted density of traces is selected to yield a desired dose distribution to said non-planar surface.
Claim 12
Dependent Claim
79 words
Apparatus for irradiating an object with a radiation flux to distribute the radiation dose over the surface of said object in accord with a desired areal distribution dQ (p,q) comprising (a) radiation source means, (b) scanning means for directing said radiation flux in spaced-apart trace portions over a portion of the surface of said object, (c) trace distributing means for controlling the number of traces per unit area as a function of said generalized surface coordinates p and q.
Claim 13
Dependent Claim
79 words
Apparatus for irradiating an object with a radiation flux to distribute the radiation dose over the surface of said object in accord with a desired areal distribution dQ (p,q) comprising (a) radiation source means, (b) scanning means for directing said radiation flux in spaced-apart trace portions over a portion of the surface of said object, (c) trace distributing means for controlling the number of traces per unit area as a function of said generalized surface coordinates p and q.
Claim 14
Dependent Claim
46 words
The apparatus of claim 9 wherein said trace distributing means comprises means for repeating said portions of traces a desired number of times in a given region of said surface in accord with a relationship to the coordinates p r , q r locating said region.
Claim 15
Dependent Claim
38 words
The apparatus of claim 9 wherein said scanning means comprises deflection means for directing said flux in accord with a desired periodic waveform, and said distributing means comprises frequency modulation means for altering the period of said waveform.
Claim 16
Dependent Claim
53 words
The apparatus of claim 9 wherein said scanning means comprises deflection means for directing said flux in accord with a desired periodic waveform, and said trace distribution means comprises means for controlling the spatial separation of adjacent said trace portions in said time sequence as a function of said coordinates p and q.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-05-15 | 1987-11-14 | 1988-05-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-05-15 | 1991-11-14 | 1992-05-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-05-15 | 1995-11-14 | 1996-05-15 | $7700.00 | Window Closed / Lapsed |