Patent US4902966A successfully refreshed from Google Patents.
US4902966A
Expired / Lapsed
US
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Method and apparatus for operating a scanning microscope
Assignee: Siemens AG
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Filing: 1988-11-02
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Granted: 1990-02-20
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Expires: 2008-11-02
Abstract
Abstract A scanning microscope scans over the surface of a specimen to be tested in point-by-point fashion with a probe. The scan rate of the probe is controlled as dependent on a secondary electrical signal derived from the measuring point of the specimen surface and, thus, serves as a control signal to the output signal of a signal processing unit which is evaluated at a window discriminator or comparator. The output signal is supplied to a voltage controlled oscillator of the scan generator through an adjustable timer element. Simultaneously, the evaluated output signal is used for modulating the intensity of the write beam of a display means for controlling the intensity of the probe.
Inventors
- 👤 Hans-Detlef Brust
- 👤 Johann Otto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 20:37
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/26; H01J37/28; B; B82; B82Y; B82Y15/00; G; G02; G02B; G02B21/00; G02B21/0004; G02B21/002
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
113 words
An apparatus for scanning a specimen surface, comprising: a scanning microscope having a scanning primary beam; a scan generator for generating a scan signal to scan said primary beam; a specimen control connectable to a specimen to be tested; a signal processing arrangement connected to receive signals from the specimen to be tested; a threshold circuit connected to an output of said signal processing arrangement; a first signal line connecting an output of said threshold circuit to an input of said specimen control; and an adjustable timer element connecting an output of said threshold circuit to an input of said scan generator for switching from a first to a second lower scan rate.
Claim 2
Independent Claim
113 words
An apparatus for scanning a specimen surface, comprising: a scanning microscope having a scanning primary beam; a scan generator for generating a scan signal to scan said primary beam; a specimen control connectable to a specimen to be tested; a signal processing arrangement connected to receive signals from the specimen to be tested; a threshold circuit connected to an output of said signal processing arrangement; a first signal line connecting an output of said threshold circuit to an input of said specimen control; and an adjustable timer element connecting an output of said threshold circuit to an input of said scan generator for switching from a first to a second lower scan rate.
Claim 3
Dependent Claim
49 words
An apparatus as claimed in claim 1, further comprising: a modulation arrangement for modulating the intensity of said probe; and a second signal line connected to carry an output signal of said specimen control that is dependent on an output signal from said threshold circuit to said modulation arrangement.
Claim 4
Dependent Claim
55 words
An apparatus as claimed in claim 1, wherein an output of said threshold circuit is connected to a control input of said scan generator for chronologically limited reversal of the scan direction and for reswitching to an original scan direction following said reversal, switching to a lower second scan rate being simultaneous with said reswitching.
Claim 5
Dependent Claim
38 words
An apparatus as claimed in claim 1, wherein a third signal line supplies a second output signal from said specimen control dependent on the output signal of said threshold circuit to a control input of said scan generator.
Claim 6
Dependent Claim
53 words
An apparatus as claimed in claim 1, further comprising: display means having deflection means for a write beam connected to said scan generator; and a switchover means connectible to an input of said display means for controlling the intensity of said write beam to an output of said threshold circuit with a signal.
Claim 7
Dependent Claim
31 words
An apparatus as claimed in claim 1, further comprising: a recording means for receiving a position signal defining a scan point together with an output signal of said signal processing unit.
Claim 8
Independent Claim
108 words
A method for operating a scanning microscope having a probe generated in a probe-shaping portion and capable of being scanned over a specimen using a deflection unit, comprising the steps of: establishing a defined operating condition in the specimen for testing; scanning the probe point-by-point over regions of a specimen surface to be tested; converting the effects triggered by the interaction of the specimen and the probe into electrical signals; supplying said electrical signal to an arrangement for signal processing evaluating said electrical signal by said arrangement for signal processing; and controlling the intensity of said probe depending on an output signal from said arrangement for signal processing.
Claim 9
Independent Claim
108 words
A method for operating a scanning microscope having a probe generated in a probe-shaping portion and capable of being scanned over a specimen using a deflection unit, comprising the steps of: establishing a defined operating condition in the specimen for testing; scanning the probe point-by-point over regions of a specimen surface to be tested; converting the effects triggered by the interaction of the specimen and the probe into electrical signals; supplying said electrical signal to an arrangement for signal processing evaluating said electrical signal by said arrangement for signal processing; and controlling the intensity of said probe depending on an output signal from said arrangement for signal processing.
Claim 10
Independent Claim
130 words
An apparatus for scanning a specimen surface, comprising: a scanning microscope having a scanning primary beam; a scan generator for generating a scan signal to scan said primary beam; a specimen control connectable to a specimen to be tested; a signal processing arrangement connected to receive signals from the specimen to be tested; a threshold circuit connected to an output of said signal processing arrangement; a first signal line connecting an output of said threshold circuit to an input of said specimen control; and said threshold circuit having an output connected to a control input of said scan generator for chronologically limited reversal of the scan direction and for reswitching to an original scan direction following said reversal, switching to a lower second scan rate being simultaneous with said reswitching.
Claim 11
Independent Claim
130 words
An apparatus for scanning a specimen surface, comprising: a scanning microscope having a scanning primary beam; a scan generator for generating a scan signal to scan said primary beam; a specimen control connectable to a specimen to be tested; a signal processing arrangement connected to receive signals from the specimen to be tested; a threshold circuit connected to an output of said signal processing arrangement; a first signal line connecting an output of said threshold circuit to an input of said specimen control; and said threshold circuit having an output connected to a control input of said scan generator for chronologically limited reversal of the scan direction and for reswitching to an original scan direction following said reversal, switching to a lower second scan rate being simultaneous with said reswitching.
Claim 12
Independent Claim
127 words
An apparatus for scanning a specimen surface, comprising: a scanning microscope having a scanning primary beam; a scan generator for generating a scan signal to scan said primary beam; a specimen control connectable to a specimen to be tested; a signal processing arrangement connected to receive signals from the specimen to be tested; a threshold circuit connected to an output of said signal processing arrangement; a first signal line connecting an output of said threshold circuit to an input of said specimen control; display means having deflection means for a write beam connected to said scan generator; and a switchover means connectible to an input of said display means for controlling the intensity of said write beam to an output of said threshold circuit with a signal.
Claim 13
Independent Claim
127 words
An apparatus for scanning a specimen surface, comprising: a scanning microscope having a scanning primary beam; a scan generator for generating a scan signal to scan said primary beam; a specimen control connectable to a specimen to be tested; a signal processing arrangement connected to receive signals from the specimen to be tested; a threshold circuit connected to an output of said signal processing arrangement; a first signal line connecting an output of said threshold circuit to an input of said specimen control; display means having deflection means for a write beam connected to said scan generator; and a switchover means connectible to an input of said display means for controlling the intensity of said write beam to an output of said threshold circuit with a signal.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-02-19 | 1993-08-21 | 1994-02-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-02-19 | 1997-08-21 | 1998-02-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-02-19 | 2001-08-21 | 2002-02-20 | $7700.00 | Window Closed / Lapsed |