Patent US4882200A successfully refreshed from Google Patents.
US4882200A
Expired / Lapsed
US
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Method for photopatterning metallization via UV-laser ablation of the activator
Assignee: General Electric Co
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Filing: 1988-08-23
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Granted: 1989-11-21
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Expires: 2008-08-23
Abstract
Abstract A laser, such as an excimer laser, is employed to ablate electroless plating activator material from polymer and other substrates. The treated substrates are then immersed in electroless plating baths for plating of conductive material over remaining activator material. The method is particularly effective for depositing conductive patterns on non-flat substrates and on substrates needing plated-through connections. High resolution patterns are created on any compatible polymer substrate with any compatible electroless plating activator material.
Inventors
- 👤 Yung S. Liu
- 👤 Willard T. Grubb
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 12:32
CPC Classifications
B; B05; B05D; B05D3/00; B05D3/06; G; G03; G03F; G03F7/00; G03F7/004; G03F7/0047; C; C23; C23C; C23C18/00; C23C18/16; C23C18/1601; C23C18/1603; C23C18/1607; C23C18/1608; C23C18/1612; C23C18/18; C23C18/20; C23C18/2006; C23C18/2026; C23C18/204; C23C18/28; C23C18/30; G03F7/20; G03F7/2002; G03F7/2004; G03F7/2006; H; H05; H05K; H05K3/00; H05K3/10; H05K3/18; H05K3/181; H05K3/182; H05K3/185; H10; H10W; H10W70/00; H10W70/60; H10W70/611; H10W70/614; H05K2203/00; H05K2203/10; H05K2203/107
Claims Analysis
Total Claims: 38
Claim 1
Independent Claim
46 words
A method for patterning electroless plating activator material disposed on a polymer substrate, said method comprising the step of: selectively exposing said polymer substrate and said electroless plating activator material disposed thereon to an ultraviolet laser beam which is sufficiently powerful to ablate said activator material.
Claim 2
Independent Claim
46 words
A method for patterning electroless plating activator material disposed on a polymer substrate, said method comprising the step of: selectively exposing said polymer substrate and said electroless plating activator material disposed thereon to an ultraviolet laser beam which is sufficiently powerful to ablate said activator material.
Claim 3
Dependent Claim
11 words
The method of claim 1 wherein: said polymer is a polyimide.
Claim 4
Dependent Claim
11 words
The method of claim 2 wherein: said polyimide is a polyetherimide.
Claim 5
Dependent Claim
13 words
The method of claim 1 in which said exposure occurs through a mask.
Claim 6
Dependent Claim
18 words
The method of claim 1 in which said exposure is performed with a scanned and focused laser beam.
Claim 7
Dependent Claim
13 words
The method of claim 1 in which said laser is an excimer laser.
Claim 8
Dependent Claim
22 words
The method of claim 1 in which said laser is selected from the group consisting of ArF, KrF, XeCl and XeF lasers.
Claim 9
Dependent Claim
13 words
The method of claim 1 in which said laser is a pulsed laser.
Claim 10
Dependent Claim
14 words
The method of claim 8 in which said pulse duration is approximately 15 nanoseconds.
Claim 11
Dependent Claim
13 words
The method of claim 1 in which said laser is a continuous laser.
Claim 12
Dependent Claim
25 words
The method of claim 1 in which said laser is operated to produce a fluence level of at least approximately 20 millijoules per square centimeter.
Claim 13
Dependent Claim
24 words
The method of claim 1 in which said activator material is selected from the group consisting of palladium, palladium complexes and precious metal activators.
Claim 14
Dependent Claim
27 words
The method of claim 1 in which said substrate is a polymer and said polymer is selected from the group consisting of epoxy polymers and aromatic polymers.
Claim 15
Dependent Claim
11 words
The method of claim 1 in which said substrate includes apertures.
Claim 16
Dependent Claim
23 words
The method of claim 1 in which said substrate exhibits at least two surfaces disposed at non-zero angles with respect to one another.
Claim 17
Dependent Claim
38 words
The method of claim 1 in which said laser is operated to produce a fluence level of at least approximately 20 millijoules per square centimeter at a power level of at least about 1 megawatt per square centimeter.
Claim 18
Independent Claim
76 words
The method for forming conductive patterns on a polymer substrate, said method comprising the steps of: coating said substrate with an electroless plating activator material; selectively exposing said substrate and said electroless plating activator material thereon to an ultraviolet laser beam which is sufficiently powerful to ablate said activator material; and then immersing said substrate in an electroless plating bath for a time sufficient to deposit conductive material on the activator material which was not ablated.
Claim 19
Independent Claim
76 words
The method for forming conductive patterns on a polymer substrate, said method comprising the steps of: coating said substrate with an electroless plating activator material; selectively exposing said substrate and said electroless plating activator material thereon to an ultraviolet laser beam which is sufficiently powerful to ablate said activator material; and then immersing said substrate in an electroless plating bath for a time sufficient to deposit conductive material on the activator material which was not ablated.
Claim 20
Dependent Claim
11 words
The method of claim 17 wherein: said polymer is a polyetherimide.
Claim 21
Dependent Claim
13 words
The method of claim 17 in which said exposure occurs through a mask.
Claim 22
Dependent Claim
18 words
The method of claim 17 in which said exposure is performed with a driven and focused laser beam.
Claim 23
Dependent Claim
13 words
The method of claim 17 in which said laser is an excimer laser.
Claim 24
Dependent Claim
22 words
The method of claim 17 in which said laser is selected from the group consisting of ArF, KrF, XeCl and XeF lasers.
Claim 25
Dependent Claim
13 words
The method of claim 17 in which said laser is a pulsed laser.
Claim 26
Dependent Claim
14 words
The method of claim 23 in which said pulse duration is approximately 15 nanoseconds.
Claim 27
Dependent Claim
13 words
The method of claim 17 in which said laser is a continuous laser.
Claim 28
Dependent Claim
25 words
The method of claim 17 in which said laser is operated to produce a fluence level of at least approximately 20 millijoules per square centimeter.
Claim 29
Dependent Claim
23 words
The method of claim 17 in which said activator is selected from the group consisting of palladium, palladium complexes and precious metal activators.
Claim 30
Dependent Claim
20 words
The method of claim 17 wherein: said polymer is selected from the group consisting of epoxy polymers and aromatic polymers.
Claim 31
Dependent Claim
11 words
The method of claim 17 in which said substrate includes apertures.
Claim 32
Dependent Claim
23 words
The method of claim 17 in which said substrate exhibits at least two surfaces disposed at non-zero angles with respect to one another.
Claim 33
Dependent Claim
38 words
The method of claim 17 in which said laser is operated to produce a fluence level of at least approximately 20 millijoules per square centimeter at a power level of at least about 1 megawatt per square centimeter.
Claim 34
Dependent Claim
11 words
The method of claim 17 wherein: said polymer is a polyimide.
Claim 35
Independent Claim
52 words
The method for patterning electroless plating activator material disposed on a polymer substrate, said method comprising the steps of: selectively exposing said polymer substrate and said electroless plating activator material thereon to an ultraviolet laser beam with a power level which is above an ablation threshold level to ablate said activator material.
Claim 36
Independent Claim
52 words
The method for patterning electroless plating activator material disposed on a polymer substrate, said method comprising the steps of: selectively exposing said polymer substrate and said electroless plating activator material thereon to an ultraviolet laser beam with a power level which is above an ablation threshold level to ablate said activator material.
Claim 37
Independent Claim
82 words
A method of forming conductive patterns on a polymer substrate, said method comprising the steps of: coating said substrate with an electroless plating activator material; selectively exposing said substrate and said electroless plating activator material thereon to an ultraviolet laser beam having a power level which is above an ablation threshold to ablate said activator material; and then immersing said substrate in an electroless plating bath for a time sufficient to deposit conductive material on the activator material which was not ablated.
Claim 38
Independent Claim
82 words
A method of forming conductive patterns on a polymer substrate, said method comprising the steps of: coating said substrate with an electroless plating activator material; selectively exposing said substrate and said electroless plating activator material thereon to an ultraviolet laser beam having a power level which is above an ablation threshold to ablate said activator material; and then immersing said substrate in an electroless plating bath for a time sufficient to deposit conductive material on the activator material which was not ablated.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-11-20 | 1993-05-22 | 1993-11-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-11-20 | 1997-05-22 | 1997-11-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-11-20 | 2001-05-22 | 2001-11-21 | $7700.00 | Window Closed / Lapsed |