US4417948A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Self developing, photoetching of polyesters by far UV radiation
Assignee: International Business Machines Corp
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Filing: 1982-07-09
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Granted: 1983-11-29
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Expires: 2002-07-09
Abstract
Abstract A technique is described for photoetching polyesters, such as polyethylene teraphthalate (PET), efficiently, and without causing degradation or heating of the bulk of the PET material. At least about 1000Å of the polyester are removed by application of ultraviolet radiation having wavelengths less than 220 nm. To enhance the process, irradiation can occur in the presence of oxygen or air.
Inventors
- 👤 Veronica I. Mayne-Banton
- 👤 Rangaswamy Srinivasan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 15:03
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/039; B; B29; B29C; B29C59/00; B29C59/16; B29C35/00; B29C35/02; B29C35/08; B29C35/0805; B29C2035/0827; B29K; B29K2067/00
Claims Analysis
Total Claims: 28
Claim 1
Independent Claim
40 words
A method for etching polyethylene teraphthalate (PET) comprising photoetching said PET to a depth of at least 1,000 Å without degradation of the bulk of the PET by irradiating said PET with uv radiation having wavelengths less than 220 nm.
Claim 2
Independent Claim
40 words
A method for etching polyethylene teraphthalate (PET) comprising photoetching said PET to a depth of at least 1,000 Å without degradation of the bulk of the PET by irradiating said PET with uv radiation having wavelengths less than 220 nm.
Claim 3
Dependent Claim
15 words
The method of claim 1, where said uv radiation has a wavelength of 193 nm.
Claim 4
Dependent Claim
15 words
The method of claim 1, where said uv radiation has a wavelength of 185 nm.
Claim 5
Dependent Claim
14 words
The method of claim 1, where said radiation is produced by an ArF laser.
Claim 6
Dependent Claim
28 words
The method of claim 1, where said uv irradiation occurs in the presence of a gas selected from the group consisting of air, oxygen, nitrogen, and mixtures thereof.
Claim 7
Dependent Claim
13 words
The method of claim 1, where said uv irradiation occurs in a vacuum.
Claim 8
Dependent Claim
25 words
The method of claim 1, where said uv irradiation continues until said PET is completely photoetched in the area of irradiation by said uv radiation.
Claim 9
Dependent Claim
17 words
The method of claim 1, where said uv irradiation is applied in selected areas of said PET.
Claim 10
Dependent Claim
15 words
The method of claim 1, where said uv irradiation occurs in an atmosphere containing oxygen.
Claim 11
Dependent Claim
15 words
The method of claim 1, where said PET is a film located on a substrate.
Claim 12
Independent Claim
126 words
A method for photoetching the surface of polyethylene teraphthalate (PET) including the steps of: breaking the long hydrocarbon chains in a surface layer of said PET into shorter chains by incident uv radiation of wavelengths less than 220 nm to photochemically produce small molecules which are volatile, said surface layer having a depth of at least about 1,000 Å but being much less than 1 micrometer in thickness, said beaking occurring along the path of said radiation in said PET and being limited at any instant to the depth to which said radiation is absorbed, said depth being between about 1,000 Å and 1 micrometer, sealing the ends of said shorter chains to reduce the probability of said shorter chains recombining to form long hydrocarbon chains.
Claim 13
Independent Claim
126 words
A method for photoetching the surface of polyethylene teraphthalate (PET) including the steps of: breaking the long hydrocarbon chains in a surface layer of said PET into shorter chains by incident uv radiation of wavelengths less than 220 nm to photochemically produce small molecules which are volatile, said surface layer having a depth of at least about 1,000 Å but being much less than 1 micrometer in thickness, said beaking occurring along the path of said radiation in said PET and being limited at any instant to the depth to which said radiation is absorbed, said depth being between about 1,000 Å and 1 micrometer, sealing the ends of said shorter chains to reduce the probability of said shorter chains recombining to form long hydrocarbon chains.
Claim 14
Dependent Claim
15 words
The method of claim 11, where said sealing is accomplished in the presence of oxygen.
Claim 15
Dependent Claim
18 words
The method of claim 11, where said PET surface is irradiated with said radiation in selected regions thereof.
Claim 16
Dependent Claim
12 words
The method of claim 11, where said radiation is applied as pulses.
Claim 17
Dependent Claim
11 words
The method of claim 11, where said irradiation is applied continuously.
Claim 18
Independent Claim
114 words
A method for photochemically etching polyethylene teraphthalate (PET) without heating the bulk of the PET, comprising the step of impinging radiation on the surface of said PET, said radiation having a wavelength <220 nm such that substantially all of said radiation is intensely absorbed by said PET in a surface layer having a depth between about 1,000 Å and less than 1 micron, said radiation photochemically reacting with said PET to a depth less than 1 micron, all of said photochemical reaction occurring only in the path of said radiation in said PET and producing volatile molecules which vaporize and are thereby removed from said surface layer in those regions struck by said radiation.
Claim 19
Independent Claim
114 words
A method for photochemically etching polyethylene teraphthalate (PET) without heating the bulk of the PET, comprising the step of impinging radiation on the surface of said PET, said radiation having a wavelength <220 nm such that substantially all of said radiation is intensely absorbed by said PET in a surface layer having a depth between about 1,000 Å and less than 1 micron, said radiation photochemically reacting with said PET to a depth less than 1 micron, all of said photochemical reaction occurring only in the path of said radiation in said PET and producing volatile molecules which vaporize and are thereby removed from said surface layer in those regions struck by said radiation.
Claim 20
Dependent Claim
30 words
The method of claim 16, where said PET is located in a gaseous environment, said environment including gasses selected from the group consisting of oxygen, nitrogen, air, and mixtures thereof.
Claim 21
Dependent Claim
14 words
The method of claim 16, where said PET is located in a vacuum environment.
Claim 22
Dependent Claim
16 words
The method of claim 16, where said radiation impinges upon said PET in selected areas thereof.
Claim 23
Independent Claim
79 words
A method for photoetching an organic polymer having ester groups therein to a depth of at least 1,000 Å without degradation of the bulk of the polymer, using the steps of: irradiating the surface of said organic polymer with uv radiation of wavelength <220 nm to produce volatile products from a surface layer at least 1,000 Å deep, without heating of the bulk of said polymer, and continuing said irradiation until said photoetching is completed to a desired depth.
Claim 24
Independent Claim
79 words
A method for photoetching an organic polymer having ester groups therein to a depth of at least 1,000 Å without degradation of the bulk of the polymer, using the steps of: irradiating the surface of said organic polymer with uv radiation of wavelength <220 nm to produce volatile products from a surface layer at least 1,000 Å deep, without heating of the bulk of said polymer, and continuing said irradiation until said photoetching is completed to a desired depth.
Claim 25
Dependent Claim
27 words
The method of claim 20, where said irradiation occurs in the presence of a gas selected from the group consisting of air, oxygen, nitrogen, and mixtures thereof.
Claim 26
Independent Claim
101 words
A method for controllably photoetching an organic polymer having ester groups therein to a depth of at least 1,000 Å without degradation of the bulk of the polymer, including the steps of: irradiating the surface of said polymer with uv radiation having a wavelength <220 nm to remove a surface layer thereof to a depth of at least 1,000 Å, said organic polymer incorporating an ester group in its backbone and being made by the condensation of terephthalic acid and α, ω dihydric alcohol of any molecular weight, and continuing said irradiation until said photoetching is completed to a desired depth.
Claim 27
Independent Claim
101 words
A method for controllably photoetching an organic polymer having ester groups therein to a depth of at least 1,000 Å without degradation of the bulk of the polymer, including the steps of: irradiating the surface of said polymer with uv radiation having a wavelength <220 nm to remove a surface layer thereof to a depth of at least 1,000 Å, said organic polymer incorporating an ester group in its backbone and being made by the condensation of terephthalic acid and α, ω dihydric alcohol of any molecular weight, and continuing said irradiation until said photoetching is completed to a desired depth.
Claim 28
Dependent Claim
27 words
The method of claim 22, where said irradiation occurs in the presence of a gas selected from the group consisting of air, oxygen, nitrogen, and mixtures thereof.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1986-11-28 | 1987-05-30 | 1987-11-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1990-11-28 | 1991-05-30 | 1991-11-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1994-11-28 | 1995-05-30 | 1995-11-29 | $7700.00 | Window Closed / Lapsed |