Semiconductor device and a method of manufacturing the same

Claim 1

A method of manufacturing a semiconductor device comprising the steps of: forming an insulating layer in a semiconductor substrate, for defining a semiconductor region of a first conductivity type separated from other semiconductor regions; forming a first silicon dioxide layer, a silicon nitride layer and a first polysilicon semiconductor layer of the first conductivity type and a high impurity concentration on said semiconductor region in a successive manner in the order specified, and patterning these layer to form a layered structure on an emitter forming region; forming a second polysilicon semiconductor layer on the semiconductor structure, and patterning the second layer; implanting impurity ions of a second conductivity type into said second polysilicon semiconductor layer; thermally heating the semiconductor structure resulting from the previous step to diffuse the impurity implanted in said second polysilicon semiconductor layer into said semiconductor region, so that a first region of the second conductivity type, which is in contact with said insulating layer and is between the insulating layer and the emitter forming region is formed in said semiconductor region, and to diffuse the impurity inplanted in said first polysilicon semiconductor layer into that portion of said second polysilicon semiconductor layer, to change the conductivity type of said portion of said first polysilicon semiconductor layer from said second conductivity type to said first conductivity type; removing said first polysilicon semiconductor layer and said portion of the first conductivity type of said second polysilicon semiconductor layer; thermally heating the semiconductor structure to form a second silicon dioxide layer on said first polysilicon layer to be thicker than said first silicon dioxide layer under said silicon nitride layer; removing said silicon nitride layer and said first silicon dioxide layer to expose said semiconductor region; forming a third polysilicon semiconductor layer on the semiconductor structure, and patterning the third layer; implanting impurity ions of the second conductivity type into said third polysilicon semiconductor layer, and thermally heating the third layer to diffuse the impurity implanted therein into said semiconductor region to form a second region of the second conductivity type acting as an active base region in contact with said first region of the second conductivity type; and forming a region of the first conductivity type acting as an emitter region in a part of said second region of the second conductivity type by implanting impurity ions of the first conductivity type into said third polysilicon semiconductor layer, and thermally heating the third structure.

Claim 2

A method of manufacturing a semiconductor device comprising the steps of: forming an insulating layer in a semiconductor substrate, for defining a semiconductor region of a first conductivity type separated from other semiconductor regions; forming a first silicon dioxide layer, a silicon nitride layer and a first polysilicon semiconductor layer of the first conductivity type and a high impurity concentration on said semiconductor region in a successive manner in the order specified, and patterning these layer to form a layered structure on an emitter forming region; forming a second polysilicon semiconductor layer on the semiconductor structure, and patterning the second layer; implanting impurity ions of a second conductivity type into said second polysilicon semiconductor layer; thermally heating the semiconductor structure resulting from the previous step to diffuse the impurity implanted in said second polysilicon semiconductor layer into said semiconductor region, so that a first region of the second conductivity type, which is in contact with said insulating layer and is between the insulating layer and the emitter forming region is formed in said semiconductor region, and to diffuse the impurity inplanted in said first polysilicon semiconductor layer into that portion of said second polysilicon semiconductor layer, to change the conductivity type of said portion of said first polysilicon semiconductor layer from said second conductivity type to said first conductivity type; removing said first polysilicon semiconductor layer and said portion of the first conductivity type of said second polysilicon semiconductor layer; thermally heating the semiconductor structure to form a second silicon dioxide layer on said first polysilicon layer to be thicker than said first silicon dioxide layer under said silicon nitride layer; removing said silicon nitride layer and said first silicon dioxide layer to expose said semiconductor region; forming a third polysilicon semiconductor layer on the semiconductor structure, and patterning the third layer; implanting impurity ions of the second conductivity type into said third polysilicon semiconductor layer, and thermally heating the third layer to diffuse the impurity implanted therein into said semiconductor region to form a second region of the second conductivity type acting as an active base region in contact with said first region of the second conductivity type; and forming a region of the first conductivity type acting as an emitter region in a part of said second region of the second conductivity type by implanting impurity ions of the first conductivity type into said third polysilicon semiconductor layer, and thermally heating the third structure.