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US4863755A
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Plasma enhanced chemical vapor deposition of thin films of silicon nitride from cyclic organosilicon nitrogen precursors
Assignee: THE, University of, Regents of
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Filing: 1987-10-16
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Granted: 1989-09-05
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Expires: 2007-10-16
Abstract
Abstract This invention relates to a process for the production of a solid thin film containing silicon and nitrogen on a substrate, said film having an aggregate low concentration of inorganic carbon and oxygen of less than about 51 atom percent, which process comprises: (A) contacting the substrate with a gaseous mixture itself comprising: (i) a volatile cyclic organic silicon-nitrogen source, and (ii) a reactant independently selected from hydrogen or a hydrogen-nitrogen source, under plasma enhanced chemical vapor deposition conditions of pressure lower than 10 Torr and temperature greater than ambient temperature for a time sufficient to produce a silicon nitride thin film. In another aspect, the invention relates to the silicon-nitride thin film coated article or substrate produced by the process of the present invention. Preferred process conditions evaluates include the RF of 13.56 MHz, 20-80 W Power, power density 0.37 watts/cm2 to 1.5 watts/cm2 and a ratio of the silicon-nitrogen source and the hydrogen nitrogen source of between about 0.1/19.9 and 0.6/19.4 percent by volume. When ammonia is used, the aggregate concentration of carbon and oxygen is less than 20 atom percent, preferably less than 10 atomic percent.
Inventors
- 👤 Dennis W. Hess
- 👤 Todd A. Brooks
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 18:53
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/66; H10P14/668; H10P14/6681; H10P14/6687; H10P14/6689; C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/34; C23C16/345; C23C16/36; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; H10P14/6336; H10P14/69; H10P14/694; H10P14/6943; H10P14/69433
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
100 words
A process for the production of a solid thin film containing silicon and nitrogen on a substrate, said film having a aggregate low concentration of carbon and oxygen of less than about 51 atom percent, which process comprises: (A) contacting the substrate with a gaseous mixture substantially in the absence of silane itself comprising: (i) a volatile cyclic organic silicon nitrogen source, and (ii) hydrogen, under plasma enchanced chemical vapor deposition conditions including a pressure lower than 10 Torr and a temperature greater than ambient temperature for a time sufficient to produce a silicon nitride thin film having ceramic-like properties.
Claim 2
Dependent Claim
100 words
A process for the production of a solid thin film containing silicon and nitrogen on a substrate, said film having a aggregate low concentration of carbon and oxygen of less than about 51 atom percent, which process comprises: (A) contacting the substrate with a gaseous mixture substantially in the absence of silane itself comprising: (i) a volatile cyclic organic silicon nitrogen source, and (ii) hydrogen, under plasma enchanced chemical vapor deposition conditions including a pressure lower than 10 Torr and a temperature greater than ambient temperature for a time sufficient to produce a silicon nitride thin film having ceramic-like properties.
Claim 3
Dependent Claim
25 words
The process of claim 1 wherein the organic silicon nitrogen source is selected from compounds consisting of silicon and nitrogen, and optionally carbon and hydrogen.
Claim 4
Dependent Claim
21 words
The process of claim 2 wherein the organic silicon nitrogen source is selected from 1,1,3,3,5,5-hexamethylcyclotrisilazane, 1,2,3,4,5,6-hexmethylcyclotrisilazane, 1,1,3,3,5,5,7,7-octamethylcyclotetrasilazane, 1,2,3,4,5,6,7,8-octamethylcyclotetrasilazane, or mixtures thereof.
Claim 5
Dependent Claim
26 words
The process of claim 1 wherein the aggregate of the carbon and oxygen present in the deposited thin film is less than about 45 atom percent.
Claim 6
Dependent Claim
31 words
The process of claim 1 wherein the plasma enhanced chemical vapor deposition conditions are temperatures of between about 200° and 400° C. and pressures of between about 0.1 and 0.7 Torr.
Claim 7
Dependent Claim
23 words
The process of claim 1 wherein the ratio of the organic silicon nitrogen source tohydrogen is between about 0.1/19.9 to 0.7/19.3 by volume.
Claim 8
Dependent Claim
28 words
The process of claim 6 wherein the ratio of the volatile cyclic organic silicon nitrogen source (i) to hydrogen (ii) is between about 0.2/19.8 and 0.6/19.4 by volume.
Claim 9
Dependent Claim
13 words
The process of claim 7 wherein the ratio is about 0.3/19.7 by volume.
Claim 10
Independent Claim
99 words
A method for depositing a thin surface film comprising silicon nitride on a substrate, which method comprises: (a) contacting said substrate with a gaseous mixture substantially in the absence of silane itself comprising: (i) a volatile cyclic organic silicon-nitrogen source, and (ii) a hydrogen-nitrogen source; (b) producing an enhanced plasma discharge in the gaseous mixture under reaction conditions including a pressure lower than 10 Torr and a temperature greater than ambient temperature to produce chemical vapor desposition, and ceramic-like properties on said substrate having an aggregate low concentration of carbon and oxygen of less than about 20 atom percent.
Claim 11
Independent Claim
99 words
A method for depositing a thin surface film comprising silicon nitride on a substrate, which method comprises: (a) contacting said substrate with a gaseous mixture substantially in the absence of silane itself comprising: (i) a volatile cyclic organic silicon-nitrogen source, and (ii) a hydrogen-nitrogen source; (b) producing an enhanced plasma discharge in the gaseous mixture under reaction conditions including a pressure lower than 10 Torr and a temperature greater than ambient temperature to produce chemical vapor desposition, and ceramic-like properties on said substrate having an aggregate low concentration of carbon and oxygen of less than about 20 atom percent.
Claim 12
Dependent Claim
24 words
The process of claim 9 wherein the hydrogen-nitrogen source is selected from compounds consisting of hydrogen and nitrogen, or of silicon, nitrogen and hydrogen.
Claim 13
Dependent Claim
18 words
The process of claim 10 wherein the hydrogen-nitrogen source is selected from hydrogen, nitrogen, ammonia, or mixtures thereof.
Claim 14
Dependent Claim
44 words
The method of claim 9, wherein: in step (a)(i) the organic silicon nitrogen source is selected from 1,1,3,3,5,5-hexamethylcylotrisilazane, 1,2,3,4,5,6-hexamethylcylotrisilazane, 1,1,3,3,5,5,7,7-octamethylcyclotetrasilazane, 1,2,3,4,5,6,7,8-octamethylcyclotetrasilazane, or mixtures thereof; and the ratio of organic silicon nitrogen source to hydrogen nitrogen source is between about 0.1/19.9 and 0.4/19.6 by volume.
Claim 15
Dependent Claim
30 words
The process of claim 12 wherein the plasma enhanced chemical vapor deposition conditions are temperatures of between about and 400° C. and pressures of between about 0.1 and 0.7 Torr.
Claim 16
Dependent Claim
22 words
The process of claim 13 wherein the temperature is about 300° C. and the pressure is between about 0.2 and 0.4 Torr.
Claim 17
Dependent Claim
31 words
The process of claim 13 wherein the ratio of the volatile cyclic organic silicon nitrogen source (i) to the hydrogen nitrogen source (ii) is between about 0.2/19.8 and 0.6/19.4 by volume.
Claim 18
Dependent Claim
13 words
The process of claim 15 wherein the ratio is about 0.3/19.7 by volume.
Claim 19
Dependent Claim
36 words
The process of claim 1 wherein the plasma enhanced chemical vapor deposition conditions comprise a power between 20 and 80 watts and, a power density of between about 0.37 and 1.5 watts per cm 2 .
Claim 20
Dependent Claim
16 words
The process of claim 1 wherein the plasma is produced using capacitively coupled parallel plate electrodes.
Claim 21
Dependent Claim
16 words
The process of claim 1 wherein the plasma is produced using an inductively coupled electrodeless reactor.
Claim 22
Dependent Claim
17 words
A substrate having a surface thin film comprising silicon nitride produced by the process of claim 1.
Claim 23
Dependent Claim
24 words
A substrate having a surface thin film comprising silicon nitride wherein the silicon nitride thin film is produced by the process of claim 9.
Claim 24
Dependent Claim
184 words
A process for the production of a solid thin film containing silicon and nitrogen on a substrate said film having an aggregate low concentration of carbon or oxygen of less than about 51 atom percent, which process comprises: (a) contacting the substrate with a gaseous mixture itself consisting essentially of: (i) 1,1,3,3,5,5-hexamethylcyclotrisilazane, 1,2,3,4,5,6-hexamethylcyclotrisilazane, or mixtures thereof, and (ii) hydrogen, wherein (i) and (ii) are in a ratio of between about 0.1/19.9 and 0.4/19.6 by volume, (b) reacting the gaseous mixture in step (a) in an enchaned plasma discharge in the gaseous mixture under reaction conditions to produce chemical vapor deposition on said substrate of a thin film of ceramic-like silicon nitride having an aggregate low concentration of carbon and oxygen of less than 51 atom percent, wherein said conditions comprise temperatures of between about 200° and 400° C., pressures of between about 0.2 and 0.7 Torr and a power of between about 20 and 40 watts, and a power density of between about 0.4 and 1.75 watts per cm 2 ; and (c) recovering the silicon-nitrogen thin film coated substrate having ceramic like character.
Claim 25
Dependent Claim
184 words
A process for the production of a solid thin film containing silicon and nitrogen on a substrate said film having an aggregate low concentration of carbon or oxygen of less than about 51 atom percent, which process comprises: (a) contacting the substrate with a gaseous mixture itself consisting essentially of: (i) 1,1,3,3,5,5-hexamethylcyclotrisilazane, 1,2,3,4,5,6-hexamethylcyclotrisilazane, or mixtures thereof, and (ii) hydrogen, wherein (i) and (ii) are in a ratio of between about 0.1/19.9 and 0.4/19.6 by volume, (b) reacting the gaseous mixture in step (a) in an enchaned plasma discharge in the gaseous mixture under reaction conditions to produce chemical vapor deposition on said substrate of a thin film of ceramic-like silicon nitride having an aggregate low concentration of carbon and oxygen of less than 51 atom percent, wherein said conditions comprise temperatures of between about 200° and 400° C., pressures of between about 0.2 and 0.7 Torr and a power of between about 20 and 40 watts, and a power density of between about 0.4 and 1.75 watts per cm 2 ; and (c) recovering the silicon-nitrogen thin film coated substrate having ceramic like character.
Claim 26
Dependent Claim
58 words
The process of claim 22 wherein in step (a), the gaseous mixture component (ii) is hydrogen, the ratio of (i) and (ii) is about 0.4/19.6 percent by volume, and; in step (b) the temperature is about 200° C., the pressure is about 0.3 Torr and the thin film deposited is between about 0.01 and 1 micrometers in thickness.
Claim 27
Dependent Claim
16 words
On a substrate, the thin film comprising silicon nitride deposited by the process of claim 9.
Claim 28
Dependent Claim
16 words
On a substrate the thin film comprising silicon nitride deposited by the process of claim 22.
Claim 29
Dependent Claim
24 words
The process of claim 22 wherein the film has an aggregate low concentration of carbon and oxygen of less than about 40 atom percent.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-09-04 | 1993-03-06 | 1993-09-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-09-04 | 1997-03-06 | 1997-09-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-09-04 | 2001-03-06 | 2001-09-05 | $7700.00 | Window Closed / Lapsed |