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US4808513A
Expired / Lapsed
US
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Method of developing a high contrast, positive photoresist using a developer containing alkanolamine
Assignee: EMD Performance Materials Corp
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Filing: 1987-04-06
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Granted: 1989-02-28
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Expires: 2007-04-06
Abstract
Abstract Compositions and methods for developing quinone diazide positive-working photoresists. The compositions consist essentially of an aqueous solution of a tetraalkylammonium hydroxide primary alkali and an alkanolamine having the following structure: <IMAGE> wherein n is zero or 1, and each R is independently selected from hydrogen, methyl, or ethyl. The methods involve use of this composition to develop the indicated photoresists. The addition of an alkanolamine of the indicated type prevents the formation of irregular deposits on the edges of unexposed portions of the photoresist lines when the photoresist is developed. Selection of these alkanolamines also increases the uniformity of line widths of photoresist lines developed according to the present invention, and increases the process latitude of the developer.
Inventors
- 👤 Richard M. Lazarus
- 👤 Kenneth L. Bell
- 👤 Carla M. Bauer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 22:04
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/26; G03F7/30; G03F7/32; G03F7/322
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
125 words
A method for developing an image-wise exposed quinone diazide positive-working photoresist without forming irregular deposits on the edges of unexposed portions of said photoresist, comprising the steps of: A. providing said exposed photoresist; B. providing a developer composition consisting essentially of an aqueous solution of a tetraalkylammonium hydroxide present in an amount effective to enable said composition to develop said photoresist; and an alkanolamine having the following structure: ##STR3## wherein n is zero or one, each R is independently selected from hydrogen, methyl, or ethyl, and the weight ratio of said primary alkali to said alkanolamine is less than about 1:9; C. developing said photoresist with said developer until the exposed portions of said photoresist are cleared; and D. rinsing said developer from said photoresist.
Claim 2
Independent Claim
125 words
A method for developing an image-wise exposed quinone diazide positive-working photoresist without forming irregular deposits on the edges of unexposed portions of said photoresist, comprising the steps of: A. providing said exposed photoresist; B. providing a developer composition consisting essentially of an aqueous solution of a tetraalkylammonium hydroxide present in an amount effective to enable said composition to develop said photoresist; and an alkanolamine having the following structure: ##STR3## wherein n is zero or one, each R is independently selected from hydrogen, methyl, or ethyl, and the weight ratio of said primary alkali to said alkanolamine is less than about 1:9; C. developing said photoresist with said developer until the exposed portions of said photoresist are cleared; and D. rinsing said developer from said photoresist.
Claim 3
Dependent Claim
12 words
The method of claim 1, wherein said step C is immersion development.
Claim 4
Dependent Claim
12 words
The method of claim 1, wherein said step C is spray development.
Claim 5
Dependent Claim
10 words
The method of claim 1, wherein said alkanolamine is 1-amino-3-hydroxypropane.
Claim 6
Independent Claim
125 words
A method for developing an image-wise exposed quinone diazide positive-working photoresist in a manner providing a C p value of at least about 1.33, comprising the steps of: A. providing said exposed photoresist; B. providing a developer composition consisting essentially of an aqueous solution of a tetraalkylammonium hydroxide present in an amount effective to enable said composition to develop said photoresist; and an alkanolamine having the following structure: ##STR4## wherein n is zero or one, each R is independently selected from hydrogen, methyl, or ethyl, and the weight ratio of said primary alkali to said alkanolamine is less than about 1:9; C. developing said photoresist with said developer until the exposed portions of said photoresist are cleared; and D. rinsing said developer from said photoresist.
Claim 7
Independent Claim
125 words
A method for developing an image-wise exposed quinone diazide positive-working photoresist in a manner providing a C p value of at least about 1.33, comprising the steps of: A. providing said exposed photoresist; B. providing a developer composition consisting essentially of an aqueous solution of a tetraalkylammonium hydroxide present in an amount effective to enable said composition to develop said photoresist; and an alkanolamine having the following structure: ##STR4## wherein n is zero or one, each R is independently selected from hydrogen, methyl, or ethyl, and the weight ratio of said primary alkali to said alkanolamine is less than about 1:9; C. developing said photoresist with said developer until the exposed portions of said photoresist are cleared; and D. rinsing said developer from said photoresist.
Claim 8
Dependent Claim
94 words
The method of claim 5, wherein said C p value is at least about 1.33 when said exposed photoresist thickness is 1.3 microns plus or minus 0.1 microns; the exposure energy used to expose said photoresist is from 220 to 260 millijoules per square centimeter; the soft bake temperature for said photoresist is from 115° C. to 120° C.; the temperature of said developer is 15° C., plus or minus 1° C.; and the tool used to expose said photoresist is focused on the upper surface of said photoresist, plus or minus 1 micron.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-02-28 | 1992-08-29 | 1993-02-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-02-28 | 1996-08-29 | 1997-02-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-02-28 | 2000-08-29 | 2001-02-28 | $7700.00 | Window Closed / Lapsed |