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Positive-working radiation-sensitive mixture comprising a sensitizing polymethine dye

Assignee: Hoechst AG
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Filing: 1986-11-24
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Granted: 1988-12-06
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Expires: 2006-11-24
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Abstract

Abstract A positive-working radiation-sensitive mixture is described that contains (a) a radiation-sensitive compound which forms a strong acid under the action of actinic radiation, (b) a compound with at least one C--O--C bond cleavable by acid, (c) a binder which is insoluble in water but soluble in aqueous-alkaline solutions, and (d) a polymethine dye. The polymethine dyes used are hemioxonol dyes or symmetrical cyanine dyes. In the light-sensitive mixture, these dyes effect high sensitization and high image sharpness contrast which, in addition, is substantially irreversible.

Inventors

  • 👤 Hans Ruckert
  • 👤 Joachim Knaul

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-26 18:50
CPC Classifications
G; G03; G03C; G03C5/00; G03C5/16; G03F; G03F7/00; G03F7/004; G03F7/0045; G03F7/09; G03F7/105; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/127

Claims Analysis

Total Claims: 13
Claim 1
Independent Claim 64 words
A positive-working radiation-sensitive mixture containing, (a) a radiation-sensitive compound which forms a strong acid under the action of actinic radiation, (b) a compound with at least one C--O--C bond cleavable by acid, (c) a binder which is insoluble in water but soluble in aqueous-alkaline solutions, and (d) a sensitizing polymethine dye, wherein said polymethine dye is a hemioxonol dye or a symmetrical cyanine dye.
Claim 2
Dependent Claim 64 words
A positive-working radiation-sensitive mixture containing, (a) a radiation-sensitive compound which forms a strong acid under the action of actinic radiation, (b) a compound with at least one C--O--C bond cleavable by acid, (c) a binder which is insoluble in water but soluble in aqueous-alkaline solutions, and (d) a sensitizing polymethine dye, wherein said polymethine dye is a hemioxonol dye or a symmetrical cyanine dye.
Claim 3
Dependent Claim 93 words
A radiation-sensitive mixture as claimed in claim 1, wherein said polymethine dye is a hemioxonol dye represented by the formula: ##STR3## in which L is a methine group which is unsubstituted or substituted by an alkyl group, K is a carbon-conjugated ring system, n is a positive number from 1 to 3, m is 0 or 1, R 1 and R 2 are identical or different, and each represents a hydrogen atom or an alkyl radical, and Z 1 represents non-metallic atoms which complete a five-membered or six-membered, substituted or unsubstituted heterocyclic ring.
Claim 4
Dependent Claim 77 words
A radiation-sensitive mixture as claimed in claim 1, wherein said polymethine dye is a symmetrical cyanine dye represented by the formula ##STR4## in which 1is a methine group which is unsubstituted or substituted by an alkyl group, n is a positive integer from 1 to 4, R 3 and R 4 represent an alkyl radical, Z 2 represents the atoms required for completing a substituted or unsubstituted heterocyclic ring system, and X( - ) is an anion.
Claim 5
Dependent Claim 40 words
A radiation-sensitive mixture as claimed in claim 2, wherein the linear carbon-conjugated system of said hemioxonol dye is either substituted in the meso-position by an alkyl group or further comprises a carbocyclic ring, and Z 1 is a pyrazolinone ring.
Claim 6
Dependent Claim 38 words
A radiation-sensitive mixture as claimed in claim 3, wherein (a) R 3 and R 4 are identical and represent ethyl groups, (b) each Z 2 represents at least two fused rings and (c) X.sup.(-) is a bromide ion.
Claim 7
Dependent Claim 30 words
A radiation-sensitive mixture as claimed in claim 1, wherein said polymethine dye is present in said radiation-sensitive mixture in an amount ranging from about 0.05 to about 1.0% by weight.
Claim 8
Dependent Claim 29 words
A radiation-sensitive mixture as claimed in claim 1, wherein said binder is a novolak, a polyvinylphenol or a copolymer of acrylic or methacrylic acid and an acrylate or methacrylate.
Claim 9
Dependent Claim 15 words
A radiation-sensitive mixture as claimed in claim 1, wherein said compound (a) is a trihalogenomethyl-s-triazine.
Claim 10
Dependent Claim 20 words
A radiation-sensitive mixture as claimed in claim 1, wherein said compound (b) is an orthocarboxylic acid derivative or an acetal.
Claim 11
Dependent Claim 59 words
A process for the preparation of photoresists and printing plates, comprising the steps of applying a radiation-sensitive mixture as claimed in claim 1 to a support; drying said mixture to form a layer on said support; imagewise irradiating said layer with actinic radiation; developing said layer and modifying said support in the bared areas by etching or metal deposition.
Claim 12
Dependent Claim 36 words
The process as claimed in claim 10, further comprising, after modification of said support, the steps of exposing the developed layer on said support under a further original, developing and again modifying the support thus bared.
Claim 13
Dependent Claim 28 words
A radiation-sensitive mixture as claimed in claim 1, wherein said radiation-sensitive compound comprises more than one halogen atom attached to one carbon atom or to one aromatic ring.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1991-12-06 1992-06-06 1992-12-06 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1995-12-06 1996-06-06 1996-12-06 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1999-12-06 2000-06-06 2000-12-06 $7700.00 Window Closed / Lapsed

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