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US4786960A Expired / Lapsed US ⏱️ 0.0 years remaining

CMOS integrated circuit and process for producing an electric isolation zones in said integrated circuit

Assignee: Commissariat à l'Énergie Atomique et Aux Énergies Alternatives
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Filing: 1987-07-23
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Granted: 1988-11-22
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Expires: 2007-07-23
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Abstract

Abstract CMOS integrated circuit and process for the production of electric isolation zones in the integrated circuit. According to the invention the process comprises the following stages: formation of several trenches in a silicon substrate, thermal oxidation of the substrate leading to the formation of an oxide film on the sides and bottom of the trenches, elimination of the oxide film near the bottom of the trenches and filling the trenches with a conductive material, thus constituting an electrode connected to the substrate corresponding to the circuit earth.

Inventors

  • 👤 Pierre Jeuch

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-29 22:48
CPC Classifications
H; H10; H10W; H10W10/00; H10W10/01; H10W10/041; H10W10/40; H10W20/00; H10W20/01; H10W20/021

Claims Analysis

Total Claims: 6
Claim 1
Independent Claim 170 words
A CMOS integrated circuit having at least one n-channel MOS transistor and at least one p-channel MOS transistor formed on a same silicon substrate having a determined conductivity type and corresponding to the circuit ground, an isolation trench having a layer of insulating material on the side walls of said trench only for electrically isolating said n-channel transistor from said p-channel transistor, a gate common to said n-channel transistor and to said p-channel transistor crossing said isolation trench in a first direction, corresponding to the channel width direction said isolation trench being in direct contact with the channels of said transistors in said first direction at the location where the gate crosses the trench, without there being a field oxide between said transistors and said trench, said trench being filled with a filling conductive material constituting a conductive electrode, which is electrically connected to said substrate and grounded by means of a doping formed in the bottom of said trench and which has the same conductivity type of said substrate.
Claim 2
Dependent Claim 170 words
A CMOS integrated circuit having at least one n-channel MOS transistor and at least one p-channel MOS transistor formed on a same silicon substrate having a determined conductivity type and corresponding to the circuit ground, an isolation trench having a layer of insulating material on the side walls of said trench only for electrically isolating said n-channel transistor from said p-channel transistor, a gate common to said n-channel transistor and to said p-channel transistor crossing said isolation trench in a first direction, corresponding to the channel width direction said isolation trench being in direct contact with the channels of said transistors in said first direction at the location where the gate crosses the trench, without there being a field oxide between said transistors and said trench, said trench being filled with a filling conductive material constituting a conductive electrode, which is electrically connected to said substrate and grounded by means of a doping formed in the bottom of said trench and which has the same conductivity type of said substrate.
Claim 3
Dependent Claim 33 words
An integrated circuit according to claim 1, wherein the substrate comprises a weakly doped zone surmounting a strongly doped zone, the weakly doped zone being obtained by epitaxy from the strongly doped zone.
Claim 4
Dependent Claim 19 words
An integrated circuit according to claim 1, wherein the filling material is polycrystalline silicon or a refractory metal silicide.
Claim 5
Dependent Claim 19 words
An integrated circuit according to claim 3, wherein the polycrystalline silicon is n + doped or p + doped.
Claim 6
Dependent Claim 13 words
An integrated circuit according to claim 3, wherein the silicide is tungsten silicide.

References Cited (Backward Citations)

US4044452A Cited
EP0073370A2 Cited
US4454646A Cited
US4528581A Cited
US4503451A Cited
US4621276A Cited
US4589193A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1991-11-22 1992-05-23 1992-11-22 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1995-11-22 1996-05-23 1996-11-22 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1999-11-22 2000-05-23 2000-11-22 $7700.00 Window Closed / Lapsed

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