Monolithic integration of light emitting elements and driver electronics

Claim 3

A recording head for linewise recording information upon a photoreceptor being built up by a plurality of recording modules arranged so that an uninterrupted row of light-emitting elements is formed along the length of said recording head, characterized in that each of said modules comprises a GaAs p-type conductive layer representing a substrate, a number of double heterostructure light-emitting diodes each comprising a first layer of GaAs of p-type, a second layer of a ternary compound of Al x Ga 1-x As of p-type, a third layer of a ternary compound of Al x Ga 1-x As of n-type, a fourth layer of GaAs of n-type, said heterostructures being etched to form a number of mesas on top of said substrate, a SiO 2 -protecting layer grown on top of each mesa, a selectively grown GaAs undoped bufferlayer having a thickness equal to the height of said mesas and covering the surface of said substrate excluding each mesa, a semi-insulating layer formed by the implantation of O + -ions into said bufferlayer, a number of field effect transistor mesas equal to said number of light-emitting diodes, being formed by Si-ion implantation and etching on top of said bufferlayer, SiO 2 -windows etched into said SiO 2 -protecting layer, ohmic bonding contacts on the backside of the substrate and on said SiO 2 -protecting layer close to the edges of said SiO 2 -windows and on both sides of the field effect transistor mesas forming source and drain electrodes, light-emitting diode windows etched in said fourth n-type GaAs-layer of each of said light-emitting diodes, a first metallisation layer forming said bonding contacts and Schottky type contacts forming the gatae electrodes of each of said field effect transistors, an insulating and planarising layer that covers said module, contact holes and light-emitting diode windows etched on said insulating and planarising layer, a second metallisation layer interconnecting said light-emitting diodes and said field effect transistors.

Claim 4

A recording head for linewise recording information upon a photoreceptor being built up by a plurality of recording modules arranged so that an uninterrupted row of light-emitting elements is formed along the length of said recording head, characterized in that each of said modules comprises a GaAs p-type conductive layer representing a substrate, a number of double heterostructure light-emitting diodes each comprising a first layer of GaAs of p-type, a second layer of a ternary compound of Al x Ga 1-x As of p-type, a third layer of a ternary compound of Al x Ga 1-x As of n-type, a fourth layer of GaAs of n-type, said heterostructures being etched to form a number of mesas on top of said substrate, a SiO 2 -protecting layer grown on top of each mesa, a selectively grown GaAs undoped bufferlayer having a thickness equal to the height of said mesas and covering the surface of said substrate excluding each mesa, a semi-insulating layer formed by the implantation of O + -ions into said bufferlayer, a number of field effect transistor mesas equal to said number of light-emitting diodes, being formed by Si-ion implantation and etching on top of said bufferlayer, SiO 2 -windows etched into said SiO 2 -protecting layer, ohmic bonding contacts on the backside of the substrate and on said SiO 2 -protecting layer close to the edges of said SiO 2 -windows and on both sides of the field effect transistor mesas forming source and drain electrodes, light-emitting diode windows etched in said fourth n-type GaAs-layer of each of said light-emitting diodes, a first metallisation layer forming said bonding contacts and Schottky type contacts forming the gatae electrodes of each of said field effect transistors, an insulating and planarising layer that covers said module, contact holes and light-emitting diode windows etched on said insulating and planarising layer, a second metallisation layer interconnecting said light-emitting diodes and said field effect transistors.

Claim 5

Device according to claims 1 or 2 wherein said insulating and planarising layer is a polyimide layer.